10/29/2011	9:14:14 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/29/2011	9:14:14 AM	Recipe started at 9:14 AM
10/29/2011	9:14:14 AM	Helium valve closed
10/29/2011	9:14:14 AM	H2 valve closed
10/29/2011	9:14:14 AM	BCl3 valve closed
10/29/2011	9:14:15 AM	PH3 valve closed
10/29/2011	9:14:15 AM	SiCl4 pre valve closed
10/29/2011	9:14:15 AM	SiCl4 post valve closed
10/29/2011	9:14:15 AM	Main Vac valve closed
10/29/2011	9:14:15 AM	Bypass valve closed
10/29/2011	9:14:15 AM	Bubbler valve closed
10/29/2011	9:14:15 AM	Helium MFC set to  0.000000
10/29/2011	9:14:15 AM	H2 MFC set to  0.000000
10/29/2011	9:14:15 AM	BCl3 MFC set to  0.000000
10/29/2011	9:14:15 AM	PHl3 MFC set to  0.000000
10/29/2011	9:14:15 AM	SiCl4 MFC set to  0.000000
10/29/2011	9:14:15 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	9:14:15 AM	Tube furnace set to 0
10/29/2011	9:14:18 AM	H2 valve closed
10/29/2011	9:14:18 AM	BCl3 valve closed
10/29/2011	9:14:18 AM	PH3 valve closed
10/29/2011	9:14:18 AM	SiCl4 pre valve closed
10/29/2011	9:14:18 AM	SiCl4 post valve closed
10/29/2011	9:14:18 AM	Main Vac valve closed
10/29/2011	9:14:18 AM	Bypass valve closed
10/29/2011	9:14:18 AM	Bubbler valve closed
10/29/2011	9:14:18 AM	Helium valve opened
10/29/2011	9:14:18 AM	Helium MFC set to  500.000000
10/29/2011	9:14:18 AM	H2 MFC set to  0.000000
10/29/2011	9:14:18 AM	BCl3 MFC set to  0.000000
10/29/2011	9:14:18 AM	PHl3 MFC set to  0.000000
10/29/2011	9:14:18 AM	SiCl4 MFC set to  0.000000
10/29/2011	9:14:18 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	9:14:18 AM	Tube furnace set to 0
10/29/2011	9:15:24 AM	Helium valve closed
10/29/2011	9:15:24 AM	H2 valve closed
10/29/2011	9:15:24 AM	BCl3 valve closed
10/29/2011	9:15:24 AM	PH3 valve closed
10/29/2011	9:15:24 AM	SiCl4 pre valve closed
10/29/2011	9:15:24 AM	SiCl4 post valve closed
10/29/2011	9:15:24 AM	Main Vac valve closed
10/29/2011	9:15:24 AM	Bypass valve closed
10/29/2011	9:15:24 AM	Bubbler valve closed
10/29/2011	9:15:24 AM	Helium MFC set to  0.000000
10/29/2011	9:15:24 AM	H2 MFC set to  0.000000
10/29/2011	9:15:24 AM	BCl3 MFC set to  0.000000
10/29/2011	9:15:24 AM	PHl3 MFC set to  0.000000
10/29/2011	9:15:24 AM	SiCl4 MFC set to  0.000000
10/29/2011	9:15:24 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	9:15:24 AM	Tube furnace set to 0
10/29/2011	9:15:25 AM	Run finished at 9:15 AM
10/29/2011	9:15:25 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/29/2011	9:20:29 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/29/2011	9:20:30 AM	Recipe started at 9:20 AM
10/29/2011	9:20:30 AM	Helium valve closed
10/29/2011	9:20:30 AM	H2 valve closed
10/29/2011	9:20:30 AM	BCl3 valve closed
10/29/2011	9:20:30 AM	PH3 valve closed
10/29/2011	9:20:30 AM	SiCl4 pre valve closed
10/29/2011	9:20:30 AM	SiCl4 post valve closed
10/29/2011	9:20:30 AM	Main Vac valve closed
10/29/2011	9:20:30 AM	Bubbler valve closed
10/29/2011	9:20:30 AM	Bypass valve opened
10/29/2011	9:20:30 AM	Helium MFC set to  0.000000
10/29/2011	9:20:30 AM	H2 MFC set to  0.000000
10/29/2011	9:20:30 AM	BCl3 MFC set to  0.000000
10/29/2011	9:20:30 AM	PHl3 MFC set to  0.000000
10/29/2011	9:20:30 AM	SiCl4 MFC set to  0.000000
10/29/2011	9:20:30 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	9:20:30 AM	Tube furnace set to 0
10/29/2011	9:21:32 AM	Helium valve closed
10/29/2011	9:21:32 AM	H2 valve closed
10/29/2011	9:21:32 AM	BCl3 valve closed
10/29/2011	9:21:32 AM	PH3 valve closed
10/29/2011	9:21:32 AM	SiCl4 pre valve closed
10/29/2011	9:21:32 AM	SiCl4 post valve closed
10/29/2011	9:21:32 AM	Main Vac valve closed
10/29/2011	9:21:32 AM	Bubbler valve closed
10/29/2011	9:21:32 AM	Bypass valve opened
10/29/2011	9:21:32 AM	Helium MFC set to  0.000000
10/29/2011	9:21:32 AM	H2 MFC set to  0.000000
10/29/2011	9:21:32 AM	BCl3 MFC set to  0.000000
10/29/2011	9:21:32 AM	PHl3 MFC set to  0.000000
10/29/2011	9:21:32 AM	SiCl4 MFC set to  0.000000
10/29/2011	9:21:32 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	9:21:33 AM	Tube furnace set to 0
10/29/2011	9:22:01 AM	Helium valve closed
10/29/2011	9:22:01 AM	H2 valve closed
10/29/2011	9:22:01 AM	BCl3 valve closed
10/29/2011	9:22:01 AM	PH3 valve closed
10/29/2011	9:22:01 AM	SiCl4 pre valve closed
10/29/2011	9:22:01 AM	SiCl4 post valve closed
10/29/2011	9:22:01 AM	Bypass valve closed
10/29/2011	9:22:01 AM	Bubbler valve closed
10/29/2011	9:22:01 AM	Main Vac valve opened
10/29/2011	9:22:01 AM	Helium MFC set to  0.000000
10/29/2011	9:22:01 AM	H2 MFC set to  0.000000
10/29/2011	9:22:01 AM	BCl3 MFC set to  0.000000
10/29/2011	9:22:01 AM	PHl3 MFC set to  0.000000
10/29/2011	9:22:01 AM	SiCl4 MFC set to  0.000000
10/29/2011	9:22:01 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	9:22:01 AM	Tube furnace set to 0
10/29/2011	9:22:02 AM	Run finished at 9:22 AM
10/29/2011	9:22:02 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/29/2011	9:24:58 AM	Recipe started at 9:24 AM
10/29/2011	9:24:58 AM	Helium valve closed
10/29/2011	9:24:58 AM	H2 valve closed
10/29/2011	9:24:58 AM	BCl3 valve closed
10/29/2011	9:24:58 AM	PH3 valve closed
10/29/2011	9:24:58 AM	SiCl4 pre valve closed
10/29/2011	9:24:58 AM	SiCl4 post valve closed
10/29/2011	9:24:58 AM	Bypass valve closed
10/29/2011	9:24:58 AM	Bubbler valve closed
10/29/2011	9:24:58 AM	Main Vac valve opened
10/29/2011	9:24:58 AM	Helium MFC set to  0.000000
10/29/2011	9:24:58 AM	H2 MFC set to  0.000000
10/29/2011	9:24:58 AM	BCl3 MFC set to  0.000000
10/29/2011	9:24:58 AM	PHl3 MFC set to  0.000000
10/29/2011	9:24:58 AM	SiCl4 MFC set to  0.000000
10/29/2011	9:24:58 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	9:24:58 AM	Tube furnace set to 150
10/29/2011	9:25:13 AM	H2 valve closed
10/29/2011	9:25:13 AM	BCl3 valve closed
10/29/2011	9:25:13 AM	PH3 valve closed
10/29/2011	9:25:13 AM	SiCl4 pre valve closed
10/29/2011	9:25:13 AM	SiCl4 post valve closed
10/29/2011	9:25:13 AM	Bypass valve closed
10/29/2011	9:25:13 AM	Bubbler valve closed
10/29/2011	9:25:13 AM	Helium valve opened
10/29/2011	9:25:13 AM	Main Vac valve opened
10/29/2011	9:25:13 AM	Helium MFC set to  20.000000
10/29/2011	9:25:13 AM	H2 MFC set to  0.000000
10/29/2011	9:25:13 AM	BCl3 MFC set to  0.000000
10/29/2011	9:25:13 AM	PHl3 MFC set to  0.000000
10/29/2011	9:25:13 AM	SiCl4 MFC set to  0.000000
10/29/2011	9:25:13 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	9:25:13 AM	Tube furnace set to 150
10/29/2011	9:25:43 AM	Helium valve closed
10/29/2011	9:25:43 AM	H2 valve closed
10/29/2011	9:25:43 AM	BCl3 valve closed
10/29/2011	9:25:43 AM	PH3 valve closed
10/29/2011	9:25:43 AM	SiCl4 pre valve closed
10/29/2011	9:25:43 AM	SiCl4 post valve closed
10/29/2011	9:25:43 AM	Bypass valve closed
10/29/2011	9:25:43 AM	Bubbler valve closed
10/29/2011	9:25:43 AM	Main Vac valve opened
10/29/2011	9:25:43 AM	Helium MFC set to  0.000000
10/29/2011	9:25:43 AM	H2 MFC set to  0.000000
10/29/2011	9:25:43 AM	BCl3 MFC set to  0.000000
10/29/2011	9:25:43 AM	PHl3 MFC set to  0.000000
10/29/2011	9:25:43 AM	SiCl4 MFC set to  0.000000
10/29/2011	9:25:43 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	9:25:43 AM	Tube furnace set to 150
10/29/2011	9:26:13 AM	H2 valve closed
10/29/2011	9:26:13 AM	BCl3 valve closed
10/29/2011	9:26:13 AM	PH3 valve closed
10/29/2011	9:26:13 AM	SiCl4 pre valve closed
10/29/2011	9:26:13 AM	SiCl4 post valve closed
10/29/2011	9:26:13 AM	Bypass valve closed
10/29/2011	9:26:13 AM	Bubbler valve closed
10/29/2011	9:26:13 AM	Helium valve opened
10/29/2011	9:26:13 AM	Main Vac valve opened
10/29/2011	9:26:13 AM	Helium MFC set to  20.000000
10/29/2011	9:26:13 AM	H2 MFC set to  0.000000
10/29/2011	9:26:13 AM	BCl3 MFC set to  0.000000
10/29/2011	9:26:13 AM	PHl3 MFC set to  0.000000
10/29/2011	9:26:13 AM	SiCl4 MFC set to  0.000000
10/29/2011	9:26:13 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	9:26:13 AM	Tube furnace set to 150
10/29/2011	9:26:43 AM	Helium valve closed
10/29/2011	9:26:43 AM	H2 valve closed
10/29/2011	9:26:43 AM	BCl3 valve closed
10/29/2011	9:26:43 AM	PH3 valve closed
10/29/2011	9:26:43 AM	SiCl4 pre valve closed
10/29/2011	9:26:43 AM	SiCl4 post valve closed
10/29/2011	9:26:43 AM	Bypass valve closed
10/29/2011	9:26:43 AM	Bubbler valve closed
10/29/2011	9:26:43 AM	Main Vac valve opened
10/29/2011	9:26:43 AM	Helium MFC set to  0.000000
10/29/2011	9:26:43 AM	H2 MFC set to  0.000000
10/29/2011	9:26:43 AM	BCl3 MFC set to  0.000000
10/29/2011	9:26:43 AM	PHl3 MFC set to  0.000000
10/29/2011	9:26:43 AM	SiCl4 MFC set to  0.000000
10/29/2011	9:26:43 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	9:26:43 AM	Tube furnace set to 150
10/29/2011	9:27:13 AM	H2 valve closed
10/29/2011	9:27:13 AM	BCl3 valve closed
10/29/2011	9:27:13 AM	PH3 valve closed
10/29/2011	9:27:13 AM	SiCl4 pre valve closed
10/29/2011	9:27:13 AM	SiCl4 post valve closed
10/29/2011	9:27:13 AM	Bypass valve closed
10/29/2011	9:27:13 AM	Bubbler valve closed
10/29/2011	9:27:13 AM	Helium valve opened
10/29/2011	9:27:13 AM	Main Vac valve opened
10/29/2011	9:27:13 AM	Helium MFC set to  20.000000
10/29/2011	9:27:13 AM	H2 MFC set to  0.000000
10/29/2011	9:27:14 AM	BCl3 MFC set to  0.000000
10/29/2011	9:27:14 AM	PHl3 MFC set to  0.000000
10/29/2011	9:27:14 AM	SiCl4 MFC set to  0.000000
10/29/2011	9:27:14 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	9:27:14 AM	Tube furnace set to 150
10/29/2011	9:27:44 AM	Helium valve closed
10/29/2011	9:27:44 AM	H2 valve closed
10/29/2011	9:27:44 AM	BCl3 valve closed
10/29/2011	9:27:44 AM	PH3 valve closed
10/29/2011	9:27:44 AM	SiCl4 pre valve closed
10/29/2011	9:27:44 AM	SiCl4 post valve closed
10/29/2011	9:27:44 AM	Bypass valve closed
10/29/2011	9:27:44 AM	Bubbler valve closed
10/29/2011	9:27:44 AM	Main Vac valve opened
10/29/2011	9:27:44 AM	Helium MFC set to  0.000000
10/29/2011	9:27:44 AM	H2 MFC set to  0.000000
10/29/2011	9:27:44 AM	BCl3 MFC set to  0.000000
10/29/2011	9:27:44 AM	PHl3 MFC set to  0.000000
10/29/2011	9:27:44 AM	SiCl4 MFC set to  0.000000
10/29/2011	9:27:44 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	9:27:44 AM	Tube furnace set to 150
10/29/2011	9:28:14 AM	H2 valve closed
10/29/2011	9:28:14 AM	BCl3 valve closed
10/29/2011	9:28:14 AM	PH3 valve closed
10/29/2011	9:28:14 AM	SiCl4 pre valve closed
10/29/2011	9:28:14 AM	SiCl4 post valve closed
10/29/2011	9:28:14 AM	Bypass valve closed
10/29/2011	9:28:14 AM	Bubbler valve closed
10/29/2011	9:28:14 AM	Helium valve opened
10/29/2011	9:28:14 AM	Main Vac valve opened
10/29/2011	9:28:14 AM	Helium MFC set to  20.000000
10/29/2011	9:28:14 AM	H2 MFC set to  0.000000
10/29/2011	9:28:14 AM	BCl3 MFC set to  0.000000
10/29/2011	9:28:14 AM	PHl3 MFC set to  0.000000
10/29/2011	9:28:14 AM	SiCl4 MFC set to  0.000000
10/29/2011	9:28:14 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	9:28:14 AM	Tube furnace set to 150
10/29/2011	9:28:44 AM	Helium valve closed
10/29/2011	9:28:44 AM	H2 valve closed
10/29/2011	9:28:44 AM	BCl3 valve closed
10/29/2011	9:28:44 AM	PH3 valve closed
10/29/2011	9:28:44 AM	SiCl4 pre valve closed
10/29/2011	9:28:44 AM	SiCl4 post valve closed
10/29/2011	9:28:44 AM	Bypass valve closed
10/29/2011	9:28:44 AM	Bubbler valve closed
10/29/2011	9:28:44 AM	Main Vac valve opened
10/29/2011	9:28:44 AM	Helium MFC set to  0.000000
10/29/2011	9:28:44 AM	H2 MFC set to  0.000000
10/29/2011	9:28:44 AM	BCl3 MFC set to  0.000000
10/29/2011	9:28:44 AM	PHl3 MFC set to  0.000000
10/29/2011	9:28:44 AM	SiCl4 MFC set to  0.000000
10/29/2011	9:28:44 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	9:28:44 AM	Tube furnace set to 150
10/29/2011	9:29:14 AM	H2 valve closed
10/29/2011	9:29:14 AM	BCl3 valve closed
10/29/2011	9:29:14 AM	PH3 valve closed
10/29/2011	9:29:14 AM	SiCl4 pre valve closed
10/29/2011	9:29:14 AM	SiCl4 post valve closed
10/29/2011	9:29:14 AM	Bypass valve closed
10/29/2011	9:29:14 AM	Bubbler valve closed
10/29/2011	9:29:14 AM	Helium valve opened
10/29/2011	9:29:14 AM	Main Vac valve opened
10/29/2011	9:29:14 AM	Helium MFC set to  20.000000
10/29/2011	9:29:14 AM	H2 MFC set to  0.000000
10/29/2011	9:29:14 AM	BCl3 MFC set to  0.000000
10/29/2011	9:29:14 AM	PHl3 MFC set to  0.000000
10/29/2011	9:29:14 AM	SiCl4 MFC set to  0.000000
10/29/2011	9:29:14 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	9:29:14 AM	Tube furnace set to 150
10/29/2011	9:29:45 AM	Helium valve closed
10/29/2011	9:29:45 AM	H2 valve closed
10/29/2011	9:29:45 AM	BCl3 valve closed
10/29/2011	9:29:45 AM	PH3 valve closed
10/29/2011	9:29:45 AM	SiCl4 pre valve closed
10/29/2011	9:29:45 AM	SiCl4 post valve closed
10/29/2011	9:29:45 AM	Bypass valve closed
10/29/2011	9:29:45 AM	Bubbler valve closed
10/29/2011	9:29:45 AM	Main Vac valve opened
10/29/2011	9:29:45 AM	Helium MFC set to  0.000000
10/29/2011	9:29:45 AM	H2 MFC set to  0.000000
10/29/2011	9:29:45 AM	BCl3 MFC set to  0.000000
10/29/2011	9:29:45 AM	PHl3 MFC set to  0.000000
10/29/2011	9:29:45 AM	SiCl4 MFC set to  0.000000
10/29/2011	9:29:45 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	9:29:45 AM	Tube furnace set to 150
10/29/2011	9:30:15 AM	H2 valve closed
10/29/2011	9:30:15 AM	BCl3 valve closed
10/29/2011	9:30:15 AM	PH3 valve closed
10/29/2011	9:30:15 AM	SiCl4 pre valve closed
10/29/2011	9:30:15 AM	SiCl4 post valve closed
10/29/2011	9:30:15 AM	Bypass valve closed
10/29/2011	9:30:15 AM	Bubbler valve closed
10/29/2011	9:30:15 AM	Helium valve opened
10/29/2011	9:30:15 AM	Main Vac valve opened
10/29/2011	9:30:15 AM	Helium MFC set to  20.000000
10/29/2011	9:30:15 AM	H2 MFC set to  0.000000
10/29/2011	9:30:15 AM	BCl3 MFC set to  0.000000
10/29/2011	9:30:15 AM	PHl3 MFC set to  0.000000
10/29/2011	9:30:15 AM	SiCl4 MFC set to  0.000000
10/29/2011	9:30:15 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	9:30:15 AM	Tube furnace set to 150
10/29/2011	9:30:45 AM	Helium valve closed
10/29/2011	9:30:45 AM	H2 valve closed
10/29/2011	9:30:45 AM	BCl3 valve closed
10/29/2011	9:30:45 AM	PH3 valve closed
10/29/2011	9:30:45 AM	SiCl4 pre valve closed
10/29/2011	9:30:45 AM	SiCl4 post valve closed
10/29/2011	9:30:45 AM	Bypass valve closed
10/29/2011	9:30:45 AM	Bubbler valve closed
10/29/2011	9:30:45 AM	Main Vac valve opened
10/29/2011	9:30:45 AM	Helium MFC set to  0.000000
10/29/2011	9:30:45 AM	H2 MFC set to  0.000000
10/29/2011	9:30:45 AM	BCl3 MFC set to  0.000000
10/29/2011	9:30:45 AM	PHl3 MFC set to  0.000000
10/29/2011	9:30:45 AM	SiCl4 MFC set to  0.000000
10/29/2011	9:30:45 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	9:30:45 AM	Tube furnace set to 150
10/29/2011	9:31:15 AM	H2 valve closed
10/29/2011	9:31:15 AM	BCl3 valve closed
10/29/2011	9:31:15 AM	PH3 valve closed
10/29/2011	9:31:15 AM	SiCl4 pre valve closed
10/29/2011	9:31:15 AM	SiCl4 post valve closed
10/29/2011	9:31:15 AM	Bypass valve closed
10/29/2011	9:31:15 AM	Bubbler valve closed
10/29/2011	9:31:15 AM	Helium valve opened
10/29/2011	9:31:15 AM	Main Vac valve opened
10/29/2011	9:31:15 AM	Helium MFC set to  20.000000
10/29/2011	9:31:15 AM	H2 MFC set to  0.000000
10/29/2011	9:31:15 AM	BCl3 MFC set to  0.000000
10/29/2011	9:31:15 AM	PHl3 MFC set to  0.000000
10/29/2011	9:31:15 AM	SiCl4 MFC set to  0.000000
10/29/2011	9:31:15 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	9:31:15 AM	Tube furnace set to 150
10/29/2011	9:31:45 AM	Helium valve closed
10/29/2011	9:31:45 AM	H2 valve closed
10/29/2011	9:31:45 AM	BCl3 valve closed
10/29/2011	9:31:45 AM	PH3 valve closed
10/29/2011	9:31:45 AM	SiCl4 pre valve closed
10/29/2011	9:31:45 AM	SiCl4 post valve closed
10/29/2011	9:31:45 AM	Bypass valve closed
10/29/2011	9:31:45 AM	Bubbler valve closed
10/29/2011	9:31:45 AM	Main Vac valve opened
10/29/2011	9:31:45 AM	Helium MFC set to  0.000000
10/29/2011	9:31:45 AM	H2 MFC set to  0.000000
10/29/2011	9:31:45 AM	BCl3 MFC set to  0.000000
10/29/2011	9:31:45 AM	PHl3 MFC set to  0.000000
10/29/2011	9:31:45 AM	SiCl4 MFC set to  0.000000
10/29/2011	9:31:45 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	9:31:46 AM	Tube furnace set to 150
10/29/2011	9:32:16 AM	H2 valve closed
10/29/2011	9:32:16 AM	BCl3 valve closed
10/29/2011	9:32:16 AM	PH3 valve closed
10/29/2011	9:32:16 AM	SiCl4 pre valve closed
10/29/2011	9:32:16 AM	SiCl4 post valve closed
10/29/2011	9:32:16 AM	Bypass valve closed
10/29/2011	9:32:16 AM	Bubbler valve closed
10/29/2011	9:32:16 AM	Helium valve opened
10/29/2011	9:32:16 AM	Main Vac valve opened
10/29/2011	9:32:16 AM	Helium MFC set to  20.000000
10/29/2011	9:32:16 AM	H2 MFC set to  0.000000
10/29/2011	9:32:16 AM	BCl3 MFC set to  0.000000
10/29/2011	9:32:16 AM	PHl3 MFC set to  0.000000
10/29/2011	9:32:16 AM	SiCl4 MFC set to  0.000000
10/29/2011	9:32:16 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	9:32:16 AM	Tube furnace set to 150
10/29/2011	9:32:46 AM	Helium valve closed
10/29/2011	9:32:46 AM	H2 valve closed
10/29/2011	9:32:46 AM	BCl3 valve closed
10/29/2011	9:32:46 AM	PH3 valve closed
10/29/2011	9:32:46 AM	SiCl4 pre valve closed
10/29/2011	9:32:46 AM	SiCl4 post valve closed
10/29/2011	9:32:46 AM	Bypass valve closed
10/29/2011	9:32:46 AM	Bubbler valve closed
10/29/2011	9:32:46 AM	Main Vac valve opened
10/29/2011	9:32:46 AM	Helium MFC set to  0.000000
10/29/2011	9:32:46 AM	H2 MFC set to  0.000000
10/29/2011	9:32:46 AM	BCl3 MFC set to  0.000000
10/29/2011	9:32:46 AM	PHl3 MFC set to  0.000000
10/29/2011	9:32:46 AM	SiCl4 MFC set to  0.000000
10/29/2011	9:32:46 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	9:32:46 AM	Tube furnace set to 150
10/29/2011	9:33:16 AM	H2 valve closed
10/29/2011	9:33:16 AM	BCl3 valve closed
10/29/2011	9:33:16 AM	PH3 valve closed
10/29/2011	9:33:16 AM	SiCl4 pre valve closed
10/29/2011	9:33:16 AM	SiCl4 post valve closed
10/29/2011	9:33:16 AM	Bypass valve closed
10/29/2011	9:33:16 AM	Bubbler valve closed
10/29/2011	9:33:16 AM	Helium valve opened
10/29/2011	9:33:16 AM	Main Vac valve opened
10/29/2011	9:33:16 AM	Helium MFC set to  20.000000
10/29/2011	9:33:16 AM	H2 MFC set to  0.000000
10/29/2011	9:33:16 AM	BCl3 MFC set to  0.000000
10/29/2011	9:33:16 AM	PHl3 MFC set to  0.000000
10/29/2011	9:33:16 AM	SiCl4 MFC set to  0.000000
10/29/2011	9:33:16 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	9:33:16 AM	Tube furnace set to 150
10/29/2011	9:33:46 AM	Helium valve closed
10/29/2011	9:33:46 AM	H2 valve closed
10/29/2011	9:33:46 AM	BCl3 valve closed
10/29/2011	9:33:46 AM	PH3 valve closed
10/29/2011	9:33:46 AM	SiCl4 pre valve closed
10/29/2011	9:33:46 AM	SiCl4 post valve closed
10/29/2011	9:33:46 AM	Bypass valve closed
10/29/2011	9:33:46 AM	Bubbler valve closed
10/29/2011	9:33:46 AM	Main Vac valve opened
10/29/2011	9:33:46 AM	Helium MFC set to  0.000000
10/29/2011	9:33:46 AM	H2 MFC set to  0.000000
10/29/2011	9:33:46 AM	BCl3 MFC set to  0.000000
10/29/2011	9:33:46 AM	PHl3 MFC set to  0.000000
10/29/2011	9:33:46 AM	SiCl4 MFC set to  0.000000
10/29/2011	9:33:46 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	9:33:46 AM	Tube furnace set to 150
10/29/2011	9:34:16 AM	H2 valve closed
10/29/2011	9:34:16 AM	BCl3 valve closed
10/29/2011	9:34:16 AM	PH3 valve closed
10/29/2011	9:34:16 AM	SiCl4 pre valve closed
10/29/2011	9:34:16 AM	SiCl4 post valve closed
10/29/2011	9:34:16 AM	Bypass valve closed
10/29/2011	9:34:16 AM	Bubbler valve closed
10/29/2011	9:34:16 AM	Helium valve opened
10/29/2011	9:34:16 AM	Main Vac valve opened
10/29/2011	9:34:16 AM	Helium MFC set to  20.000000
10/29/2011	9:34:16 AM	H2 MFC set to  0.000000
10/29/2011	9:34:16 AM	BCl3 MFC set to  0.000000
10/29/2011	9:34:16 AM	PHl3 MFC set to  0.000000
10/29/2011	9:34:16 AM	SiCl4 MFC set to  0.000000
10/29/2011	9:34:16 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	9:34:17 AM	Tube furnace set to 150
10/29/2011	9:34:47 AM	Helium valve closed
10/29/2011	9:34:47 AM	H2 valve closed
10/29/2011	9:34:47 AM	BCl3 valve closed
10/29/2011	9:34:47 AM	PH3 valve closed
10/29/2011	9:34:47 AM	SiCl4 pre valve closed
10/29/2011	9:34:47 AM	SiCl4 post valve closed
10/29/2011	9:34:47 AM	Bypass valve closed
10/29/2011	9:34:47 AM	Bubbler valve closed
10/29/2011	9:34:47 AM	Main Vac valve opened
10/29/2011	9:34:47 AM	Helium MFC set to  0.000000
10/29/2011	9:34:47 AM	H2 MFC set to  0.000000
10/29/2011	9:34:47 AM	BCl3 MFC set to  0.000000
10/29/2011	9:34:47 AM	PHl3 MFC set to  0.000000
10/29/2011	9:34:47 AM	SiCl4 MFC set to  0.000000
10/29/2011	9:34:47 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	9:34:47 AM	Tube furnace set to 150
10/29/2011	9:34:48 AM	Run finished at 9:34 AM
10/29/2011	9:36:34 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/29/2011	9:36:52 AM	Recipe started at 9:36 AM
10/29/2011	9:36:52 AM	Helium valve closed
10/29/2011	9:36:52 AM	H2 valve closed
10/29/2011	9:36:52 AM	BCl3 valve closed
10/29/2011	9:36:52 AM	PH3 valve closed
10/29/2011	9:36:52 AM	SiCl4 pre valve closed
10/29/2011	9:36:52 AM	SiCl4 post valve closed
10/29/2011	9:36:52 AM	Main Vac valve closed
10/29/2011	9:36:52 AM	Bubbler valve closed
10/29/2011	9:36:52 AM	Bypass valve opened
10/29/2011	9:36:52 AM	Helium MFC set to  0.000000
10/29/2011	9:36:52 AM	H2 MFC set to  0.000000
10/29/2011	9:36:52 AM	BCl3 MFC set to  0.000000
10/29/2011	9:36:52 AM	PHl3 MFC set to  0.000000
10/29/2011	9:36:52 AM	SiCl4 MFC set to  0.000000
10/29/2011	9:36:52 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	9:36:52 AM	Tube furnace set to 0
10/29/2011	9:36:52 AM	Helium valve closed
10/29/2011	9:36:52 AM	H2 valve closed
10/29/2011	9:36:52 AM	BCl3 valve closed
10/29/2011	9:36:52 AM	PH3 valve closed
10/29/2011	9:36:52 AM	SiCl4 pre valve closed
10/29/2011	9:36:52 AM	SiCl4 post valve closed
10/29/2011	9:36:52 AM	Main Vac valve closed
10/29/2011	9:36:52 AM	Bubbler valve closed
10/29/2011	9:36:52 AM	Bypass valve opened
10/29/2011	9:36:52 AM	Helium MFC set to  0.000000
10/29/2011	9:36:52 AM	H2 MFC set to  0.000000
10/29/2011	9:36:52 AM	BCl3 MFC set to  0.000000
10/29/2011	9:36:52 AM	PHl3 MFC set to  0.000000
10/29/2011	9:36:52 AM	SiCl4 MFC set to  0.000000
10/29/2011	9:36:52 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	9:36:53 AM	Tube furnace set to 0
10/29/2011	9:36:55 AM	Helium valve closed
10/29/2011	9:36:55 AM	H2 valve closed
10/29/2011	9:36:55 AM	BCl3 valve closed
10/29/2011	9:36:55 AM	PH3 valve closed
10/29/2011	9:36:55 AM	SiCl4 pre valve closed
10/29/2011	9:36:55 AM	SiCl4 post valve closed
10/29/2011	9:36:55 AM	Bypass valve closed
10/29/2011	9:36:55 AM	Bubbler valve closed
10/29/2011	9:36:55 AM	Main Vac valve opened
10/29/2011	9:36:55 AM	Helium MFC set to  0.000000
10/29/2011	9:36:55 AM	H2 MFC set to  0.000000
10/29/2011	9:36:55 AM	BCl3 MFC set to  0.000000
10/29/2011	9:36:55 AM	PHl3 MFC set to  0.000000
10/29/2011	9:36:55 AM	SiCl4 MFC set to  0.000000
10/29/2011	9:36:55 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	9:36:55 AM	Tube furnace set to 0
10/29/2011	9:37:03 AM	H2 valve closed
10/29/2011	9:37:03 AM	BCl3 valve closed
10/29/2011	9:37:03 AM	PH3 valve closed
10/29/2011	9:37:03 AM	SiCl4 pre valve closed
10/29/2011	9:37:03 AM	SiCl4 post valve closed
10/29/2011	9:37:03 AM	Bypass valve closed
10/29/2011	9:37:03 AM	Bubbler valve closed
10/29/2011	9:37:03 AM	Helium valve opened
10/29/2011	9:37:03 AM	Main Vac valve opened
10/29/2011	9:37:03 AM	Helium MFC set to  20.000000
10/29/2011	9:37:03 AM	H2 MFC set to  0.000000
10/29/2011	9:37:03 AM	BCl3 MFC set to  0.000000
10/29/2011	9:37:03 AM	PHl3 MFC set to  0.000000
10/29/2011	9:37:03 AM	SiCl4 MFC set to  0.000000
10/29/2011	9:37:03 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	9:37:03 AM	Tube furnace set to 0
10/29/2011	9:37:33 AM	Helium valve closed
10/29/2011	9:37:33 AM	H2 valve closed
10/29/2011	9:37:33 AM	BCl3 valve closed
10/29/2011	9:37:33 AM	PH3 valve closed
10/29/2011	9:37:33 AM	SiCl4 pre valve closed
10/29/2011	9:37:33 AM	SiCl4 post valve closed
10/29/2011	9:37:33 AM	Bypass valve closed
10/29/2011	9:37:33 AM	Bubbler valve closed
10/29/2011	9:37:33 AM	Main Vac valve opened
10/29/2011	9:37:33 AM	Helium MFC set to  0.000000
10/29/2011	9:37:33 AM	H2 MFC set to  0.000000
10/29/2011	9:37:33 AM	BCl3 MFC set to  0.000000
10/29/2011	9:37:33 AM	PHl3 MFC set to  0.000000
10/29/2011	9:37:33 AM	SiCl4 MFC set to  0.000000
10/29/2011	9:37:33 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	9:37:34 AM	Tube furnace set to 0
10/29/2011	9:38:03 AM	H2 valve closed
10/29/2011	9:38:03 AM	BCl3 valve closed
10/29/2011	9:38:03 AM	PH3 valve closed
10/29/2011	9:38:03 AM	SiCl4 pre valve closed
10/29/2011	9:38:03 AM	SiCl4 post valve closed
10/29/2011	9:38:03 AM	Bypass valve closed
10/29/2011	9:38:03 AM	Bubbler valve closed
10/29/2011	9:38:03 AM	Helium valve opened
10/29/2011	9:38:03 AM	Main Vac valve opened
10/29/2011	9:38:03 AM	Helium MFC set to  20.000000
10/29/2011	9:38:03 AM	H2 MFC set to  0.000000
10/29/2011	9:38:03 AM	BCl3 MFC set to  0.000000
10/29/2011	9:38:03 AM	PHl3 MFC set to  0.000000
10/29/2011	9:38:03 AM	SiCl4 MFC set to  0.000000
10/29/2011	9:38:03 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	9:38:04 AM	Tube furnace set to 0
10/29/2011	9:38:34 AM	Helium valve closed
10/29/2011	9:38:34 AM	H2 valve closed
10/29/2011	9:38:34 AM	BCl3 valve closed
10/29/2011	9:38:34 AM	PH3 valve closed
10/29/2011	9:38:34 AM	SiCl4 pre valve closed
10/29/2011	9:38:34 AM	SiCl4 post valve closed
10/29/2011	9:38:34 AM	Bypass valve closed
10/29/2011	9:38:34 AM	Bubbler valve closed
10/29/2011	9:38:34 AM	Main Vac valve opened
10/29/2011	9:38:34 AM	Helium MFC set to  0.000000
10/29/2011	9:38:34 AM	H2 MFC set to  0.000000
10/29/2011	9:38:34 AM	BCl3 MFC set to  0.000000
10/29/2011	9:38:34 AM	PHl3 MFC set to  0.000000
10/29/2011	9:38:34 AM	SiCl4 MFC set to  0.000000
10/29/2011	9:38:34 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	9:38:34 AM	Tube furnace set to 0
10/29/2011	9:39:04 AM	H2 valve closed
10/29/2011	9:39:04 AM	BCl3 valve closed
10/29/2011	9:39:04 AM	PH3 valve closed
10/29/2011	9:39:04 AM	SiCl4 pre valve closed
10/29/2011	9:39:04 AM	SiCl4 post valve closed
10/29/2011	9:39:04 AM	Bypass valve closed
10/29/2011	9:39:04 AM	Bubbler valve closed
10/29/2011	9:39:04 AM	Helium valve opened
10/29/2011	9:39:04 AM	Main Vac valve opened
10/29/2011	9:39:04 AM	Helium MFC set to  20.000000
10/29/2011	9:39:04 AM	H2 MFC set to  0.000000
10/29/2011	9:39:04 AM	BCl3 MFC set to  0.000000
10/29/2011	9:39:04 AM	PHl3 MFC set to  0.000000
10/29/2011	9:39:04 AM	SiCl4 MFC set to  0.000000
10/29/2011	9:39:04 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	9:39:04 AM	Tube furnace set to 0
10/29/2011	9:39:34 AM	Helium valve closed
10/29/2011	9:39:34 AM	H2 valve closed
10/29/2011	9:39:34 AM	BCl3 valve closed
10/29/2011	9:39:34 AM	PH3 valve closed
10/29/2011	9:39:34 AM	SiCl4 pre valve closed
10/29/2011	9:39:34 AM	SiCl4 post valve closed
10/29/2011	9:39:34 AM	Bypass valve closed
10/29/2011	9:39:34 AM	Bubbler valve closed
10/29/2011	9:39:34 AM	Main Vac valve opened
10/29/2011	9:39:34 AM	Helium MFC set to  0.000000
10/29/2011	9:39:34 AM	H2 MFC set to  0.000000
10/29/2011	9:39:34 AM	BCl3 MFC set to  0.000000
10/29/2011	9:39:34 AM	PHl3 MFC set to  0.000000
10/29/2011	9:39:34 AM	SiCl4 MFC set to  0.000000
10/29/2011	9:39:34 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	9:39:34 AM	Tube furnace set to 0
10/29/2011	9:40:04 AM	H2 valve closed
10/29/2011	9:40:04 AM	BCl3 valve closed
10/29/2011	9:40:04 AM	PH3 valve closed
10/29/2011	9:40:04 AM	SiCl4 pre valve closed
10/29/2011	9:40:04 AM	SiCl4 post valve closed
10/29/2011	9:40:04 AM	Bypass valve closed
10/29/2011	9:40:04 AM	Bubbler valve closed
10/29/2011	9:40:04 AM	Helium valve opened
10/29/2011	9:40:04 AM	Main Vac valve opened
10/29/2011	9:40:04 AM	Helium MFC set to  20.000000
10/29/2011	9:40:04 AM	H2 MFC set to  0.000000
10/29/2011	9:40:04 AM	BCl3 MFC set to  0.000000
10/29/2011	9:40:04 AM	PHl3 MFC set to  0.000000
10/29/2011	9:40:04 AM	SiCl4 MFC set to  0.000000
10/29/2011	9:40:04 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	9:40:05 AM	Tube furnace set to 0
10/29/2011	9:40:35 AM	Helium valve closed
10/29/2011	9:40:35 AM	H2 valve closed
10/29/2011	9:40:35 AM	BCl3 valve closed
10/29/2011	9:40:35 AM	PH3 valve closed
10/29/2011	9:40:35 AM	SiCl4 pre valve closed
10/29/2011	9:40:35 AM	SiCl4 post valve closed
10/29/2011	9:40:35 AM	Bypass valve closed
10/29/2011	9:40:35 AM	Bubbler valve closed
10/29/2011	9:40:35 AM	Main Vac valve opened
10/29/2011	9:40:35 AM	Helium MFC set to  0.000000
10/29/2011	9:40:35 AM	H2 MFC set to  0.000000
10/29/2011	9:40:35 AM	BCl3 MFC set to  0.000000
10/29/2011	9:40:35 AM	PHl3 MFC set to  0.000000
10/29/2011	9:40:35 AM	SiCl4 MFC set to  0.000000
10/29/2011	9:40:35 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	9:40:35 AM	Tube furnace set to 0
10/29/2011	9:41:05 AM	H2 valve closed
10/29/2011	9:41:05 AM	BCl3 valve closed
10/29/2011	9:41:05 AM	PH3 valve closed
10/29/2011	9:41:05 AM	SiCl4 pre valve closed
10/29/2011	9:41:05 AM	SiCl4 post valve closed
10/29/2011	9:41:05 AM	Bypass valve closed
10/29/2011	9:41:05 AM	Bubbler valve closed
10/29/2011	9:41:05 AM	Helium valve opened
10/29/2011	9:41:05 AM	Main Vac valve opened
10/29/2011	9:41:05 AM	Helium MFC set to  20.000000
10/29/2011	9:41:05 AM	H2 MFC set to  0.000000
10/29/2011	9:41:05 AM	BCl3 MFC set to  0.000000
10/29/2011	9:41:05 AM	PHl3 MFC set to  0.000000
10/29/2011	9:41:05 AM	SiCl4 MFC set to  0.000000
10/29/2011	9:41:05 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	9:41:05 AM	Tube furnace set to 0
10/29/2011	9:41:35 AM	Helium valve closed
10/29/2011	9:41:35 AM	H2 valve closed
10/29/2011	9:41:35 AM	BCl3 valve closed
10/29/2011	9:41:35 AM	PH3 valve closed
10/29/2011	9:41:35 AM	SiCl4 pre valve closed
10/29/2011	9:41:35 AM	SiCl4 post valve closed
10/29/2011	9:41:35 AM	Bypass valve closed
10/29/2011	9:41:35 AM	Bubbler valve closed
10/29/2011	9:41:35 AM	Main Vac valve opened
10/29/2011	9:41:35 AM	Helium MFC set to  0.000000
10/29/2011	9:41:35 AM	H2 MFC set to  0.000000
10/29/2011	9:41:35 AM	BCl3 MFC set to  0.000000
10/29/2011	9:41:35 AM	PHl3 MFC set to  0.000000
10/29/2011	9:41:35 AM	SiCl4 MFC set to  0.000000
10/29/2011	9:41:35 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	9:41:35 AM	Tube furnace set to 0
10/29/2011	9:42:05 AM	H2 valve closed
10/29/2011	9:42:05 AM	BCl3 valve closed
10/29/2011	9:42:05 AM	PH3 valve closed
10/29/2011	9:42:05 AM	SiCl4 pre valve closed
10/29/2011	9:42:05 AM	SiCl4 post valve closed
10/29/2011	9:42:05 AM	Bypass valve closed
10/29/2011	9:42:05 AM	Bubbler valve closed
10/29/2011	9:42:05 AM	Helium valve opened
10/29/2011	9:42:05 AM	Main Vac valve opened
10/29/2011	9:42:05 AM	Helium MFC set to  20.000000
10/29/2011	9:42:05 AM	H2 MFC set to  0.000000
10/29/2011	9:42:05 AM	BCl3 MFC set to  0.000000
10/29/2011	9:42:05 AM	PHl3 MFC set to  0.000000
10/29/2011	9:42:05 AM	SiCl4 MFC set to  0.000000
10/29/2011	9:42:05 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	9:42:05 AM	Tube furnace set to 0
10/29/2011	9:42:36 AM	Helium valve closed
10/29/2011	9:42:36 AM	H2 valve closed
10/29/2011	9:42:36 AM	BCl3 valve closed
10/29/2011	9:42:36 AM	PH3 valve closed
10/29/2011	9:42:36 AM	SiCl4 pre valve closed
10/29/2011	9:42:36 AM	SiCl4 post valve closed
10/29/2011	9:42:36 AM	Bypass valve closed
10/29/2011	9:42:36 AM	Bubbler valve closed
10/29/2011	9:42:36 AM	Main Vac valve opened
10/29/2011	9:42:36 AM	Helium MFC set to  0.000000
10/29/2011	9:42:36 AM	H2 MFC set to  0.000000
10/29/2011	9:42:36 AM	BCl3 MFC set to  0.000000
10/29/2011	9:42:36 AM	PHl3 MFC set to  0.000000
10/29/2011	9:42:36 AM	SiCl4 MFC set to  0.000000
10/29/2011	9:42:36 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	9:42:36 AM	Tube furnace set to 0
10/29/2011	9:43:06 AM	H2 valve closed
10/29/2011	9:43:06 AM	BCl3 valve closed
10/29/2011	9:43:06 AM	PH3 valve closed
10/29/2011	9:43:06 AM	SiCl4 pre valve closed
10/29/2011	9:43:06 AM	SiCl4 post valve closed
10/29/2011	9:43:06 AM	Bypass valve closed
10/29/2011	9:43:06 AM	Bubbler valve closed
10/29/2011	9:43:06 AM	Helium valve opened
10/29/2011	9:43:06 AM	Main Vac valve opened
10/29/2011	9:43:06 AM	Helium MFC set to  20.000000
10/29/2011	9:43:06 AM	H2 MFC set to  0.000000
10/29/2011	9:43:06 AM	BCl3 MFC set to  0.000000
10/29/2011	9:43:06 AM	PHl3 MFC set to  0.000000
10/29/2011	9:43:06 AM	SiCl4 MFC set to  0.000000
10/29/2011	9:43:06 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	9:43:06 AM	Tube furnace set to 0
10/29/2011	9:43:36 AM	Helium valve closed
10/29/2011	9:43:36 AM	H2 valve closed
10/29/2011	9:43:36 AM	BCl3 valve closed
10/29/2011	9:43:36 AM	PH3 valve closed
10/29/2011	9:43:36 AM	SiCl4 pre valve closed
10/29/2011	9:43:36 AM	SiCl4 post valve closed
10/29/2011	9:43:36 AM	Bypass valve closed
10/29/2011	9:43:36 AM	Bubbler valve closed
10/29/2011	9:43:36 AM	Main Vac valve opened
10/29/2011	9:43:36 AM	Helium MFC set to  0.000000
10/29/2011	9:43:36 AM	H2 MFC set to  0.000000
10/29/2011	9:43:36 AM	BCl3 MFC set to  0.000000
10/29/2011	9:43:36 AM	PHl3 MFC set to  0.000000
10/29/2011	9:43:36 AM	SiCl4 MFC set to  0.000000
10/29/2011	9:43:36 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	9:43:36 AM	Tube furnace set to 0
10/29/2011	9:44:06 AM	H2 valve closed
10/29/2011	9:44:06 AM	BCl3 valve closed
10/29/2011	9:44:06 AM	PH3 valve closed
10/29/2011	9:44:06 AM	SiCl4 pre valve closed
10/29/2011	9:44:06 AM	SiCl4 post valve closed
10/29/2011	9:44:06 AM	Bypass valve closed
10/29/2011	9:44:06 AM	Bubbler valve closed
10/29/2011	9:44:06 AM	Helium valve opened
10/29/2011	9:44:06 AM	Main Vac valve opened
10/29/2011	9:44:06 AM	Helium MFC set to  20.000000
10/29/2011	9:44:06 AM	H2 MFC set to  0.000000
10/29/2011	9:44:06 AM	BCl3 MFC set to  0.000000
10/29/2011	9:44:06 AM	PHl3 MFC set to  0.000000
10/29/2011	9:44:06 AM	SiCl4 MFC set to  0.000000
10/29/2011	9:44:06 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	9:44:06 AM	Tube furnace set to 0
10/29/2011	9:44:36 AM	Helium valve closed
10/29/2011	9:44:36 AM	H2 valve closed
10/29/2011	9:44:36 AM	BCl3 valve closed
10/29/2011	9:44:36 AM	PH3 valve closed
10/29/2011	9:44:36 AM	SiCl4 pre valve closed
10/29/2011	9:44:36 AM	SiCl4 post valve closed
10/29/2011	9:44:36 AM	Bypass valve closed
10/29/2011	9:44:36 AM	Bubbler valve closed
10/29/2011	9:44:36 AM	Main Vac valve opened
10/29/2011	9:44:36 AM	Helium MFC set to  0.000000
10/29/2011	9:44:36 AM	H2 MFC set to  0.000000
10/29/2011	9:44:36 AM	BCl3 MFC set to  0.000000
10/29/2011	9:44:36 AM	PHl3 MFC set to  0.000000
10/29/2011	9:44:36 AM	SiCl4 MFC set to  0.000000
10/29/2011	9:44:36 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	9:44:37 AM	Tube furnace set to 0
10/29/2011	9:45:07 AM	H2 valve closed
10/29/2011	9:45:07 AM	BCl3 valve closed
10/29/2011	9:45:07 AM	PH3 valve closed
10/29/2011	9:45:07 AM	SiCl4 pre valve closed
10/29/2011	9:45:07 AM	SiCl4 post valve closed
10/29/2011	9:45:07 AM	Bypass valve closed
10/29/2011	9:45:07 AM	Bubbler valve closed
10/29/2011	9:45:07 AM	Helium valve opened
10/29/2011	9:45:07 AM	Main Vac valve opened
10/29/2011	9:45:07 AM	Helium MFC set to  20.000000
10/29/2011	9:45:07 AM	H2 MFC set to  0.000000
10/29/2011	9:45:07 AM	BCl3 MFC set to  0.000000
10/29/2011	9:45:07 AM	PHl3 MFC set to  0.000000
10/29/2011	9:45:07 AM	SiCl4 MFC set to  0.000000
10/29/2011	9:45:07 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	9:45:07 AM	Tube furnace set to 0
10/29/2011	9:45:37 AM	Helium valve closed
10/29/2011	9:45:37 AM	H2 valve closed
10/29/2011	9:45:37 AM	BCl3 valve closed
10/29/2011	9:45:37 AM	PH3 valve closed
10/29/2011	9:45:37 AM	SiCl4 pre valve closed
10/29/2011	9:45:37 AM	SiCl4 post valve closed
10/29/2011	9:45:37 AM	Bypass valve closed
10/29/2011	9:45:37 AM	Bubbler valve closed
10/29/2011	9:45:37 AM	Main Vac valve opened
10/29/2011	9:45:37 AM	Helium MFC set to  0.000000
10/29/2011	9:45:37 AM	H2 MFC set to  0.000000
10/29/2011	9:45:37 AM	BCl3 MFC set to  0.000000
10/29/2011	9:45:37 AM	PHl3 MFC set to  0.000000
10/29/2011	9:45:37 AM	SiCl4 MFC set to  0.000000
10/29/2011	9:45:37 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	9:45:37 AM	Tube furnace set to 0
10/29/2011	9:46:07 AM	H2 valve closed
10/29/2011	9:46:07 AM	BCl3 valve closed
10/29/2011	9:46:07 AM	PH3 valve closed
10/29/2011	9:46:07 AM	SiCl4 pre valve closed
10/29/2011	9:46:07 AM	SiCl4 post valve closed
10/29/2011	9:46:07 AM	Bypass valve closed
10/29/2011	9:46:07 AM	Bubbler valve closed
10/29/2011	9:46:07 AM	Helium valve opened
10/29/2011	9:46:07 AM	Main Vac valve opened
10/29/2011	9:46:07 AM	Helium MFC set to  20.000000
10/29/2011	9:46:07 AM	H2 MFC set to  0.000000
10/29/2011	9:46:07 AM	BCl3 MFC set to  0.000000
10/29/2011	9:46:07 AM	PHl3 MFC set to  0.000000
10/29/2011	9:46:07 AM	SiCl4 MFC set to  0.000000
10/29/2011	9:46:07 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	9:46:07 AM	Tube furnace set to 0
10/29/2011	9:46:37 AM	Helium valve closed
10/29/2011	9:46:37 AM	H2 valve closed
10/29/2011	9:46:37 AM	BCl3 valve closed
10/29/2011	9:46:37 AM	PH3 valve closed
10/29/2011	9:46:37 AM	SiCl4 pre valve closed
10/29/2011	9:46:37 AM	SiCl4 post valve closed
10/29/2011	9:46:37 AM	Bypass valve closed
10/29/2011	9:46:37 AM	Bubbler valve closed
10/29/2011	9:46:37 AM	Main Vac valve opened
10/29/2011	9:46:37 AM	Helium MFC set to  0.000000
10/29/2011	9:46:37 AM	H2 MFC set to  0.000000
10/29/2011	9:46:37 AM	BCl3 MFC set to  0.000000
10/29/2011	9:46:37 AM	PHl3 MFC set to  0.000000
10/29/2011	9:46:37 AM	SiCl4 MFC set to  0.000000
10/29/2011	9:46:37 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	9:46:37 AM	Tube furnace set to 0
10/29/2011	9:46:38 AM	Run finished at 9:46 AM
10/29/2011	9:46:38 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/29/2011	9:51:19 AM	Main Vac valve closed
10/29/2011	9:51:32 AM	Main Vac valve opened
10/29/2011	9:52:27 AM	Main Vac valve closed
10/29/2011	9:52:42 AM	Main Vac valve opened
10/29/2011	9:53:00 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/29/2011	9:53:17 AM	Recipe started at 9:53 AM
10/29/2011	9:53:17 AM	Helium valve closed
10/29/2011	9:53:17 AM	H2 valve closed
10/29/2011	9:53:17 AM	BCl3 valve closed
10/29/2011	9:53:17 AM	PH3 valve closed
10/29/2011	9:53:17 AM	SiCl4 pre valve closed
10/29/2011	9:53:17 AM	SiCl4 post valve closed
10/29/2011	9:53:17 AM	Main Vac valve closed
10/29/2011	9:53:17 AM	Bubbler valve closed
10/29/2011	9:53:17 AM	Bypass valve opened
10/29/2011	9:53:17 AM	Helium MFC set to  0.000000
10/29/2011	9:53:17 AM	H2 MFC set to  0.000000
10/29/2011	9:53:17 AM	BCl3 MFC set to  0.000000
10/29/2011	9:53:17 AM	PHl3 MFC set to  0.000000
10/29/2011	9:53:17 AM	SiCl4 MFC set to  0.000000
10/29/2011	9:53:17 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	9:53:17 AM	Tube furnace set to 0
10/29/2011	9:53:17 AM	Helium valve closed
10/29/2011	9:53:17 AM	H2 valve closed
10/29/2011	9:53:17 AM	BCl3 valve closed
10/29/2011	9:53:17 AM	PH3 valve closed
10/29/2011	9:53:17 AM	SiCl4 pre valve closed
10/29/2011	9:53:17 AM	SiCl4 post valve closed
10/29/2011	9:53:17 AM	Main Vac valve closed
10/29/2011	9:53:17 AM	Bubbler valve closed
10/29/2011	9:53:17 AM	Bypass valve opened
10/29/2011	9:53:17 AM	Helium MFC set to  0.000000
10/29/2011	9:53:17 AM	H2 MFC set to  0.000000
10/29/2011	9:53:17 AM	BCl3 MFC set to  0.000000
10/29/2011	9:53:17 AM	PHl3 MFC set to  0.000000
10/29/2011	9:53:17 AM	SiCl4 MFC set to  0.000000
10/29/2011	9:53:17 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	9:53:18 AM	Tube furnace set to 0
10/29/2011	9:53:18 AM	Helium valve closed
10/29/2011	9:53:18 AM	H2 valve closed
10/29/2011	9:53:18 AM	BCl3 valve closed
10/29/2011	9:53:18 AM	PH3 valve closed
10/29/2011	9:53:18 AM	SiCl4 pre valve closed
10/29/2011	9:53:18 AM	SiCl4 post valve closed
10/29/2011	9:53:18 AM	Bypass valve closed
10/29/2011	9:53:18 AM	Bubbler valve closed
10/29/2011	9:53:18 AM	Main Vac valve opened
10/29/2011	9:53:18 AM	Helium MFC set to  0.000000
10/29/2011	9:53:18 AM	H2 MFC set to  0.000000
10/29/2011	9:53:18 AM	BCl3 MFC set to  0.000000
10/29/2011	9:53:18 AM	PHl3 MFC set to  0.000000
10/29/2011	9:53:18 AM	SiCl4 MFC set to  0.000000
10/29/2011	9:53:18 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	9:53:18 AM	Tube furnace set to 0
10/29/2011	9:53:18 AM	H2 valve closed
10/29/2011	9:53:18 AM	BCl3 valve closed
10/29/2011	9:53:18 AM	PH3 valve closed
10/29/2011	9:53:18 AM	SiCl4 pre valve closed
10/29/2011	9:53:18 AM	SiCl4 post valve closed
10/29/2011	9:53:18 AM	Bypass valve closed
10/29/2011	9:53:18 AM	Bubbler valve closed
10/29/2011	9:53:18 AM	Helium valve opened
10/29/2011	9:53:18 AM	Main Vac valve opened
10/29/2011	9:53:18 AM	Helium MFC set to  20.000000
10/29/2011	9:53:18 AM	H2 MFC set to  0.000000
10/29/2011	9:53:18 AM	BCl3 MFC set to  0.000000
10/29/2011	9:53:18 AM	PHl3 MFC set to  0.000000
10/29/2011	9:53:18 AM	SiCl4 MFC set to  0.000000
10/29/2011	9:53:18 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	9:53:19 AM	Tube furnace set to 0
10/29/2011	9:53:49 AM	Helium valve closed
10/29/2011	9:53:49 AM	H2 valve closed
10/29/2011	9:53:49 AM	BCl3 valve closed
10/29/2011	9:53:49 AM	PH3 valve closed
10/29/2011	9:53:49 AM	SiCl4 pre valve closed
10/29/2011	9:53:49 AM	SiCl4 post valve closed
10/29/2011	9:53:49 AM	Bypass valve closed
10/29/2011	9:53:49 AM	Bubbler valve closed
10/29/2011	9:53:49 AM	Main Vac valve opened
10/29/2011	9:53:49 AM	Helium MFC set to  0.000000
10/29/2011	9:53:49 AM	H2 MFC set to  0.000000
10/29/2011	9:53:49 AM	BCl3 MFC set to  0.000000
10/29/2011	9:53:49 AM	PHl3 MFC set to  0.000000
10/29/2011	9:53:49 AM	SiCl4 MFC set to  0.000000
10/29/2011	9:53:49 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	9:53:49 AM	Tube furnace set to 0
10/29/2011	9:54:19 AM	H2 valve closed
10/29/2011	9:54:19 AM	BCl3 valve closed
10/29/2011	9:54:19 AM	PH3 valve closed
10/29/2011	9:54:19 AM	SiCl4 pre valve closed
10/29/2011	9:54:19 AM	SiCl4 post valve closed
10/29/2011	9:54:19 AM	Bypass valve closed
10/29/2011	9:54:19 AM	Bubbler valve closed
10/29/2011	9:54:19 AM	Helium valve opened
10/29/2011	9:54:19 AM	Main Vac valve opened
10/29/2011	9:54:19 AM	Helium MFC set to  20.000000
10/29/2011	9:54:19 AM	H2 MFC set to  0.000000
10/29/2011	9:54:19 AM	BCl3 MFC set to  0.000000
10/29/2011	9:54:19 AM	PHl3 MFC set to  0.000000
10/29/2011	9:54:19 AM	SiCl4 MFC set to  0.000000
10/29/2011	9:54:19 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	9:54:19 AM	Tube furnace set to 0
10/29/2011	9:54:49 AM	Helium valve closed
10/29/2011	9:54:49 AM	H2 valve closed
10/29/2011	9:54:49 AM	BCl3 valve closed
10/29/2011	9:54:49 AM	PH3 valve closed
10/29/2011	9:54:49 AM	SiCl4 pre valve closed
10/29/2011	9:54:49 AM	SiCl4 post valve closed
10/29/2011	9:54:49 AM	Bypass valve closed
10/29/2011	9:54:49 AM	Bubbler valve closed
10/29/2011	9:54:49 AM	Main Vac valve opened
10/29/2011	9:54:49 AM	Helium MFC set to  0.000000
10/29/2011	9:54:49 AM	H2 MFC set to  0.000000
10/29/2011	9:54:49 AM	BCl3 MFC set to  0.000000
10/29/2011	9:54:49 AM	PHl3 MFC set to  0.000000
10/29/2011	9:54:49 AM	SiCl4 MFC set to  0.000000
10/29/2011	9:54:49 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	9:54:49 AM	Tube furnace set to 0
10/29/2011	9:55:19 AM	H2 valve closed
10/29/2011	9:55:19 AM	BCl3 valve closed
10/29/2011	9:55:19 AM	PH3 valve closed
10/29/2011	9:55:19 AM	SiCl4 pre valve closed
10/29/2011	9:55:19 AM	SiCl4 post valve closed
10/29/2011	9:55:19 AM	Bypass valve closed
10/29/2011	9:55:19 AM	Bubbler valve closed
10/29/2011	9:55:19 AM	Helium valve opened
10/29/2011	9:55:19 AM	Main Vac valve opened
10/29/2011	9:55:19 AM	Helium MFC set to  20.000000
10/29/2011	9:55:19 AM	H2 MFC set to  0.000000
10/29/2011	9:55:19 AM	BCl3 MFC set to  0.000000
10/29/2011	9:55:19 AM	PHl3 MFC set to  0.000000
10/29/2011	9:55:19 AM	SiCl4 MFC set to  0.000000
10/29/2011	9:55:19 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	9:55:19 AM	Tube furnace set to 0
10/29/2011	9:55:49 AM	Helium valve closed
10/29/2011	9:55:49 AM	H2 valve closed
10/29/2011	9:55:49 AM	BCl3 valve closed
10/29/2011	9:55:49 AM	PH3 valve closed
10/29/2011	9:55:49 AM	SiCl4 pre valve closed
10/29/2011	9:55:49 AM	SiCl4 post valve closed
10/29/2011	9:55:49 AM	Bypass valve closed
10/29/2011	9:55:49 AM	Bubbler valve closed
10/29/2011	9:55:49 AM	Main Vac valve opened
10/29/2011	9:55:49 AM	Helium MFC set to  0.000000
10/29/2011	9:55:49 AM	H2 MFC set to  0.000000
10/29/2011	9:55:49 AM	BCl3 MFC set to  0.000000
10/29/2011	9:55:49 AM	PHl3 MFC set to  0.000000
10/29/2011	9:55:49 AM	SiCl4 MFC set to  0.000000
10/29/2011	9:55:49 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	9:55:50 AM	Tube furnace set to 0
10/29/2011	9:56:20 AM	H2 valve closed
10/29/2011	9:56:20 AM	BCl3 valve closed
10/29/2011	9:56:20 AM	PH3 valve closed
10/29/2011	9:56:20 AM	SiCl4 pre valve closed
10/29/2011	9:56:20 AM	SiCl4 post valve closed
10/29/2011	9:56:20 AM	Bypass valve closed
10/29/2011	9:56:20 AM	Bubbler valve closed
10/29/2011	9:56:20 AM	Helium valve opened
10/29/2011	9:56:20 AM	Main Vac valve opened
10/29/2011	9:56:20 AM	Helium MFC set to  20.000000
10/29/2011	9:56:20 AM	H2 MFC set to  0.000000
10/29/2011	9:56:20 AM	BCl3 MFC set to  0.000000
10/29/2011	9:56:20 AM	PHl3 MFC set to  0.000000
10/29/2011	9:56:20 AM	SiCl4 MFC set to  0.000000
10/29/2011	9:56:20 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	9:56:20 AM	Tube furnace set to 0
10/29/2011	9:56:50 AM	Helium valve closed
10/29/2011	9:56:50 AM	H2 valve closed
10/29/2011	9:56:50 AM	BCl3 valve closed
10/29/2011	9:56:50 AM	PH3 valve closed
10/29/2011	9:56:50 AM	SiCl4 pre valve closed
10/29/2011	9:56:50 AM	SiCl4 post valve closed
10/29/2011	9:56:50 AM	Bypass valve closed
10/29/2011	9:56:50 AM	Bubbler valve closed
10/29/2011	9:56:50 AM	Main Vac valve opened
10/29/2011	9:56:50 AM	Helium MFC set to  0.000000
10/29/2011	9:56:50 AM	H2 MFC set to  0.000000
10/29/2011	9:56:50 AM	BCl3 MFC set to  0.000000
10/29/2011	9:56:50 AM	PHl3 MFC set to  0.000000
10/29/2011	9:56:50 AM	SiCl4 MFC set to  0.000000
10/29/2011	9:56:50 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	9:56:50 AM	Tube furnace set to 0
10/29/2011	9:57:20 AM	H2 valve closed
10/29/2011	9:57:20 AM	BCl3 valve closed
10/29/2011	9:57:20 AM	PH3 valve closed
10/29/2011	9:57:20 AM	SiCl4 pre valve closed
10/29/2011	9:57:20 AM	SiCl4 post valve closed
10/29/2011	9:57:20 AM	Bypass valve closed
10/29/2011	9:57:20 AM	Bubbler valve closed
10/29/2011	9:57:20 AM	Helium valve opened
10/29/2011	9:57:20 AM	Main Vac valve opened
10/29/2011	9:57:20 AM	Helium MFC set to  20.000000
10/29/2011	9:57:20 AM	H2 MFC set to  0.000000
10/29/2011	9:57:20 AM	BCl3 MFC set to  0.000000
10/29/2011	9:57:20 AM	PHl3 MFC set to  0.000000
10/29/2011	9:57:20 AM	SiCl4 MFC set to  0.000000
10/29/2011	9:57:20 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	9:57:20 AM	Tube furnace set to 0
10/29/2011	9:57:50 AM	Helium valve closed
10/29/2011	9:57:50 AM	H2 valve closed
10/29/2011	9:57:50 AM	BCl3 valve closed
10/29/2011	9:57:50 AM	PH3 valve closed
10/29/2011	9:57:50 AM	SiCl4 pre valve closed
10/29/2011	9:57:50 AM	SiCl4 post valve closed
10/29/2011	9:57:50 AM	Bypass valve closed
10/29/2011	9:57:50 AM	Bubbler valve closed
10/29/2011	9:57:50 AM	Main Vac valve opened
10/29/2011	9:57:50 AM	Helium MFC set to  0.000000
10/29/2011	9:57:50 AM	H2 MFC set to  0.000000
10/29/2011	9:57:50 AM	BCl3 MFC set to  0.000000
10/29/2011	9:57:50 AM	PHl3 MFC set to  0.000000
10/29/2011	9:57:50 AM	SiCl4 MFC set to  0.000000
10/29/2011	9:57:50 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	9:57:50 AM	Tube furnace set to 0
10/29/2011	9:58:20 AM	H2 valve closed
10/29/2011	9:58:20 AM	BCl3 valve closed
10/29/2011	9:58:20 AM	PH3 valve closed
10/29/2011	9:58:20 AM	SiCl4 pre valve closed
10/29/2011	9:58:20 AM	SiCl4 post valve closed
10/29/2011	9:58:20 AM	Bypass valve closed
10/29/2011	9:58:20 AM	Bubbler valve closed
10/29/2011	9:58:20 AM	Helium valve opened
10/29/2011	9:58:20 AM	Main Vac valve opened
10/29/2011	9:58:20 AM	Helium MFC set to  20.000000
10/29/2011	9:58:20 AM	H2 MFC set to  0.000000
10/29/2011	9:58:20 AM	BCl3 MFC set to  0.000000
10/29/2011	9:58:20 AM	PHl3 MFC set to  0.000000
10/29/2011	9:58:20 AM	SiCl4 MFC set to  0.000000
10/29/2011	9:58:20 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	9:58:21 AM	Tube furnace set to 0
10/29/2011	9:58:51 AM	Helium valve closed
10/29/2011	9:58:51 AM	H2 valve closed
10/29/2011	9:58:51 AM	BCl3 valve closed
10/29/2011	9:58:51 AM	PH3 valve closed
10/29/2011	9:58:51 AM	SiCl4 pre valve closed
10/29/2011	9:58:51 AM	SiCl4 post valve closed
10/29/2011	9:58:51 AM	Bypass valve closed
10/29/2011	9:58:51 AM	Bubbler valve closed
10/29/2011	9:58:51 AM	Main Vac valve opened
10/29/2011	9:58:51 AM	Helium MFC set to  0.000000
10/29/2011	9:58:51 AM	H2 MFC set to  0.000000
10/29/2011	9:58:51 AM	BCl3 MFC set to  0.000000
10/29/2011	9:58:51 AM	PHl3 MFC set to  0.000000
10/29/2011	9:58:51 AM	SiCl4 MFC set to  0.000000
10/29/2011	9:58:51 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	9:58:51 AM	Tube furnace set to 0
10/29/2011	9:59:21 AM	H2 valve closed
10/29/2011	9:59:21 AM	BCl3 valve closed
10/29/2011	9:59:21 AM	PH3 valve closed
10/29/2011	9:59:21 AM	SiCl4 pre valve closed
10/29/2011	9:59:21 AM	SiCl4 post valve closed
10/29/2011	9:59:21 AM	Bypass valve closed
10/29/2011	9:59:21 AM	Bubbler valve closed
10/29/2011	9:59:21 AM	Helium valve opened
10/29/2011	9:59:21 AM	Main Vac valve opened
10/29/2011	9:59:21 AM	Helium MFC set to  20.000000
10/29/2011	9:59:21 AM	H2 MFC set to  0.000000
10/29/2011	9:59:21 AM	BCl3 MFC set to  0.000000
10/29/2011	9:59:21 AM	PHl3 MFC set to  0.000000
10/29/2011	9:59:21 AM	SiCl4 MFC set to  0.000000
10/29/2011	9:59:21 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	9:59:21 AM	Tube furnace set to 0
10/29/2011	9:59:51 AM	Helium valve closed
10/29/2011	9:59:51 AM	H2 valve closed
10/29/2011	9:59:51 AM	BCl3 valve closed
10/29/2011	9:59:51 AM	PH3 valve closed
10/29/2011	9:59:51 AM	SiCl4 pre valve closed
10/29/2011	9:59:51 AM	SiCl4 post valve closed
10/29/2011	9:59:51 AM	Bypass valve closed
10/29/2011	9:59:51 AM	Bubbler valve closed
10/29/2011	9:59:51 AM	Main Vac valve opened
10/29/2011	9:59:51 AM	Helium MFC set to  0.000000
10/29/2011	9:59:51 AM	H2 MFC set to  0.000000
10/29/2011	9:59:51 AM	BCl3 MFC set to  0.000000
10/29/2011	9:59:51 AM	PHl3 MFC set to  0.000000
10/29/2011	9:59:51 AM	SiCl4 MFC set to  0.000000
10/29/2011	9:59:51 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	9:59:51 AM	Tube furnace set to 0
10/29/2011	10:00:21 AM	H2 valve closed
10/29/2011	10:00:21 AM	BCl3 valve closed
10/29/2011	10:00:21 AM	PH3 valve closed
10/29/2011	10:00:21 AM	SiCl4 pre valve closed
10/29/2011	10:00:21 AM	SiCl4 post valve closed
10/29/2011	10:00:21 AM	Bypass valve closed
10/29/2011	10:00:21 AM	Bubbler valve closed
10/29/2011	10:00:21 AM	Helium valve opened
10/29/2011	10:00:21 AM	Main Vac valve opened
10/29/2011	10:00:21 AM	Helium MFC set to  20.000000
10/29/2011	10:00:21 AM	H2 MFC set to  0.000000
10/29/2011	10:00:21 AM	BCl3 MFC set to  0.000000
10/29/2011	10:00:21 AM	PHl3 MFC set to  0.000000
10/29/2011	10:00:21 AM	SiCl4 MFC set to  0.000000
10/29/2011	10:00:21 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	10:00:21 AM	Tube furnace set to 0
10/29/2011	10:00:51 AM	Helium valve closed
10/29/2011	10:00:51 AM	H2 valve closed
10/29/2011	10:00:51 AM	BCl3 valve closed
10/29/2011	10:00:51 AM	PH3 valve closed
10/29/2011	10:00:51 AM	SiCl4 pre valve closed
10/29/2011	10:00:51 AM	SiCl4 post valve closed
10/29/2011	10:00:51 AM	Bypass valve closed
10/29/2011	10:00:51 AM	Bubbler valve closed
10/29/2011	10:00:51 AM	Main Vac valve opened
10/29/2011	10:00:51 AM	Helium MFC set to  0.000000
10/29/2011	10:00:51 AM	H2 MFC set to  0.000000
10/29/2011	10:00:51 AM	BCl3 MFC set to  0.000000
10/29/2011	10:00:51 AM	PHl3 MFC set to  0.000000
10/29/2011	10:00:51 AM	SiCl4 MFC set to  0.000000
10/29/2011	10:00:51 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	10:00:52 AM	Tube furnace set to 0
10/29/2011	10:01:22 AM	H2 valve closed
10/29/2011	10:01:22 AM	BCl3 valve closed
10/29/2011	10:01:22 AM	PH3 valve closed
10/29/2011	10:01:22 AM	SiCl4 pre valve closed
10/29/2011	10:01:22 AM	SiCl4 post valve closed
10/29/2011	10:01:22 AM	Bypass valve closed
10/29/2011	10:01:22 AM	Bubbler valve closed
10/29/2011	10:01:22 AM	Helium valve opened
10/29/2011	10:01:22 AM	Main Vac valve opened
10/29/2011	10:01:22 AM	Helium MFC set to  20.000000
10/29/2011	10:01:22 AM	H2 MFC set to  0.000000
10/29/2011	10:01:22 AM	BCl3 MFC set to  0.000000
10/29/2011	10:01:22 AM	PHl3 MFC set to  0.000000
10/29/2011	10:01:22 AM	SiCl4 MFC set to  0.000000
10/29/2011	10:01:22 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	10:01:22 AM	Tube furnace set to 0
10/29/2011	10:01:52 AM	Helium valve closed
10/29/2011	10:01:52 AM	H2 valve closed
10/29/2011	10:01:52 AM	BCl3 valve closed
10/29/2011	10:01:52 AM	PH3 valve closed
10/29/2011	10:01:52 AM	SiCl4 pre valve closed
10/29/2011	10:01:52 AM	SiCl4 post valve closed
10/29/2011	10:01:52 AM	Bypass valve closed
10/29/2011	10:01:52 AM	Bubbler valve closed
10/29/2011	10:01:52 AM	Main Vac valve opened
10/29/2011	10:01:52 AM	Helium MFC set to  0.000000
10/29/2011	10:01:52 AM	H2 MFC set to  0.000000
10/29/2011	10:01:52 AM	BCl3 MFC set to  0.000000
10/29/2011	10:01:52 AM	PHl3 MFC set to  0.000000
10/29/2011	10:01:52 AM	SiCl4 MFC set to  0.000000
10/29/2011	10:01:52 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	10:01:52 AM	Tube furnace set to 0
10/29/2011	10:02:22 AM	H2 valve closed
10/29/2011	10:02:22 AM	BCl3 valve closed
10/29/2011	10:02:22 AM	PH3 valve closed
10/29/2011	10:02:22 AM	SiCl4 pre valve closed
10/29/2011	10:02:22 AM	SiCl4 post valve closed
10/29/2011	10:02:22 AM	Bypass valve closed
10/29/2011	10:02:22 AM	Bubbler valve closed
10/29/2011	10:02:22 AM	Helium valve opened
10/29/2011	10:02:22 AM	Main Vac valve opened
10/29/2011	10:02:22 AM	Helium MFC set to  20.000000
10/29/2011	10:02:22 AM	H2 MFC set to  0.000000
10/29/2011	10:02:22 AM	BCl3 MFC set to  0.000000
10/29/2011	10:02:22 AM	PHl3 MFC set to  0.000000
10/29/2011	10:02:22 AM	SiCl4 MFC set to  0.000000
10/29/2011	10:02:22 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	10:02:22 AM	Tube furnace set to 0
10/29/2011	10:02:52 AM	Helium valve closed
10/29/2011	10:02:52 AM	H2 valve closed
10/29/2011	10:02:52 AM	BCl3 valve closed
10/29/2011	10:02:52 AM	PH3 valve closed
10/29/2011	10:02:52 AM	SiCl4 pre valve closed
10/29/2011	10:02:52 AM	SiCl4 post valve closed
10/29/2011	10:02:52 AM	Bypass valve closed
10/29/2011	10:02:52 AM	Bubbler valve closed
10/29/2011	10:02:52 AM	Main Vac valve opened
10/29/2011	10:02:52 AM	Helium MFC set to  0.000000
10/29/2011	10:02:52 AM	H2 MFC set to  0.000000
10/29/2011	10:02:52 AM	BCl3 MFC set to  0.000000
10/29/2011	10:02:52 AM	PHl3 MFC set to  0.000000
10/29/2011	10:02:52 AM	SiCl4 MFC set to  0.000000
10/29/2011	10:02:52 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	10:02:52 AM	Tube furnace set to 0
10/29/2011	10:02:53 AM	Run finished at 10:02 AM
10/29/2011	10:02:53 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/29/2011	10:09:06 AM	Main Vac valve closed
10/29/2011	10:09:24 AM	Main Vac valve opened
10/29/2011	10:11:18 AM	Recipe started at 10:11 AM
10/29/2011	10:11:18 AM	Helium valve closed
10/29/2011	10:11:18 AM	H2 valve closed
10/29/2011	10:11:18 AM	BCl3 valve closed
10/29/2011	10:11:18 AM	PH3 valve closed
10/29/2011	10:11:18 AM	SiCl4 pre valve closed
10/29/2011	10:11:18 AM	SiCl4 post valve closed
10/29/2011	10:11:18 AM	Main Vac valve closed
10/29/2011	10:11:18 AM	Bypass valve closed
10/29/2011	10:11:18 AM	Bubbler valve closed
10/29/2011	10:11:18 AM	Helium MFC set to  0.000000
10/29/2011	10:11:18 AM	H2 MFC set to  0.000000
10/29/2011	10:11:18 AM	BCl3 MFC set to  0.000000
10/29/2011	10:11:18 AM	PHl3 MFC set to  0.000000
10/29/2011	10:11:18 AM	SiCl4 MFC set to  0.000000
10/29/2011	10:11:18 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	10:11:18 AM	Tube furnace set to 0
10/29/2011	10:11:21 AM	Helium valve closed
10/29/2011	10:11:21 AM	BCl3 valve closed
10/29/2011	10:11:21 AM	PH3 valve closed
10/29/2011	10:11:21 AM	SiCl4 pre valve closed
10/29/2011	10:11:21 AM	SiCl4 post valve closed
10/29/2011	10:11:21 AM	Main Vac valve closed
10/29/2011	10:11:21 AM	Bypass valve closed
10/29/2011	10:11:21 AM	Bubbler valve closed
10/29/2011	10:11:21 AM	H2 valve opened
10/29/2011	10:11:21 AM	Helium MFC set to  0.000000
10/29/2011	10:11:21 AM	H2 MFC set to  500.000000
10/29/2011	10:11:21 AM	BCl3 MFC set to  0.000000
10/29/2011	10:11:21 AM	PHl3 MFC set to  0.000000
10/29/2011	10:11:21 AM	SiCl4 MFC set to  0.000000
10/29/2011	10:11:21 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	10:11:22 AM	Tube furnace set to 0
10/29/2011	10:12:29 AM	Helium valve closed
10/29/2011	10:12:29 AM	BCl3 valve closed
10/29/2011	10:12:29 AM	PH3 valve closed
10/29/2011	10:12:29 AM	SiCl4 pre valve closed
10/29/2011	10:12:29 AM	SiCl4 post valve closed
10/29/2011	10:12:29 AM	Main Vac valve closed
10/29/2011	10:12:29 AM	Bypass valve closed
10/29/2011	10:12:29 AM	H2 valve opened
10/29/2011	10:12:29 AM	Bubbler valve opened
10/29/2011	10:12:29 AM	Helium MFC set to  0.000000
10/29/2011	10:12:29 AM	H2 MFC set to  500.000000
10/29/2011	10:12:29 AM	BCl3 MFC set to  0.000000
10/29/2011	10:12:29 AM	PHl3 MFC set to  0.000000
10/29/2011	10:12:29 AM	SiCl4 MFC set to  0.000000
10/29/2011	10:12:29 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	10:12:29 AM	Tube furnace set to 0
10/29/2011	10:12:30 AM	Helium valve closed
10/29/2011	10:12:30 AM	BCl3 valve closed
10/29/2011	10:12:30 AM	PH3 valve closed
10/29/2011	10:12:30 AM	SiCl4 pre valve closed
10/29/2011	10:12:30 AM	SiCl4 post valve closed
10/29/2011	10:12:30 AM	Main Vac valve closed
10/29/2011	10:12:30 AM	Bypass valve closed
10/29/2011	10:12:30 AM	H2 valve opened
10/29/2011	10:12:30 AM	Bubbler valve opened
10/29/2011	10:12:30 AM	Helium MFC set to  0.000000
10/29/2011	10:12:30 AM	H2 MFC set to  500.000000
10/29/2011	10:12:30 AM	BCl3 MFC set to  0.000000
10/29/2011	10:12:30 AM	PHl3 MFC set to  0.000000
10/29/2011	10:12:30 AM	SiCl4 MFC set to  0.000000
10/29/2011	10:12:30 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	10:12:30 AM	Tube furnace set to 1048
10/29/2011	10:32:30 AM	Helium valve closed
10/29/2011	10:32:30 AM	BCl3 valve closed
10/29/2011	10:32:30 AM	PH3 valve closed
10/29/2011	10:32:30 AM	Main Vac valve closed
10/29/2011	10:32:30 AM	Bypass valve closed
10/29/2011	10:32:30 AM	H2 valve opened
10/29/2011	10:32:30 AM	SiCl4 pre valve opened
10/29/2011	10:32:30 AM	SiCl4 post valve opened
10/29/2011	10:32:30 AM	Bubbler valve opened
10/29/2011	10:32:30 AM	Helium MFC set to  0.000000
10/29/2011	10:32:30 AM	H2 MFC set to  500.000000
10/29/2011	10:32:30 AM	BCl3 MFC set to  0.000000
10/29/2011	10:32:30 AM	PHl3 MFC set to  0.000000
10/29/2011	10:32:30 AM	SiCl4 MFC set to  50.000000
10/29/2011	10:32:30 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	10:32:30 AM	Tube furnace set to 1048
10/29/2011	10:47:30 AM	Helium valve closed
10/29/2011	10:47:30 AM	BCl3 valve closed
10/29/2011	10:47:30 AM	PH3 valve closed
10/29/2011	10:47:30 AM	SiCl4 pre valve closed
10/29/2011	10:47:30 AM	SiCl4 post valve closed
10/29/2011	10:47:30 AM	Main Vac valve closed
10/29/2011	10:47:30 AM	Bypass valve closed
10/29/2011	10:47:30 AM	H2 valve opened
10/29/2011	10:47:30 AM	Bubbler valve opened
10/29/2011	10:47:30 AM	Helium MFC set to  0.000000
10/29/2011	10:47:30 AM	H2 MFC set to  500.000000
10/29/2011	10:47:30 AM	BCl3 MFC set to  0.000000
10/29/2011	10:47:30 AM	PHl3 MFC set to  0.000000
10/29/2011	10:47:30 AM	SiCl4 MFC set to  0.000000
10/29/2011	10:47:30 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	10:47:30 AM	Tube furnace set to 750
10/29/2011	10:52:30 AM	H2 valve closed
10/29/2011	10:52:30 AM	BCl3 valve closed
10/29/2011	10:52:30 AM	PH3 valve closed
10/29/2011	10:52:30 AM	SiCl4 pre valve closed
10/29/2011	10:52:30 AM	SiCl4 post valve closed
10/29/2011	10:52:30 AM	Main Vac valve closed
10/29/2011	10:52:30 AM	Bypass valve closed
10/29/2011	10:52:30 AM	Helium valve opened
10/29/2011	10:52:30 AM	Bubbler valve opened
10/29/2011	10:52:30 AM	Helium MFC set to  500.000000
10/29/2011	10:52:30 AM	H2 MFC set to  0.000000
10/29/2011	10:52:30 AM	BCl3 MFC set to  0.000000
10/29/2011	10:52:30 AM	PHl3 MFC set to  0.000000
10/29/2011	10:52:30 AM	SiCl4 MFC set to  0.000000
10/29/2011	10:52:30 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	10:52:31 AM	Tube furnace set to 0
10/29/2011	11:12:31 AM	Helium valve closed
10/29/2011	11:12:31 AM	H2 valve closed
10/29/2011	11:12:31 AM	BCl3 valve closed
10/29/2011	11:12:31 AM	PH3 valve closed
10/29/2011	11:12:31 AM	SiCl4 pre valve closed
10/29/2011	11:12:31 AM	SiCl4 post valve closed
10/29/2011	11:12:31 AM	Main Vac valve closed
10/29/2011	11:12:31 AM	Bypass valve closed
10/29/2011	11:12:31 AM	Bubbler valve closed
10/29/2011	11:12:31 AM	Helium MFC set to  0.000000
10/29/2011	11:12:31 AM	H2 MFC set to  0.000000
10/29/2011	11:12:31 AM	BCl3 MFC set to  0.000000
10/29/2011	11:12:31 AM	PHl3 MFC set to  0.000000
10/29/2011	11:12:31 AM	SiCl4 MFC set to  0.000000
10/29/2011	11:12:31 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	11:12:31 AM	Tube furnace set to 0
10/29/2011	11:12:32 AM	Run finished at 11:12 AM
10/29/2011	11:30:56 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/29/2011	11:30:57 AM	Recipe started at 11:30 AM
10/29/2011	11:30:57 AM	Helium valve closed
10/29/2011	11:30:57 AM	H2 valve closed
10/29/2011	11:30:57 AM	BCl3 valve closed
10/29/2011	11:30:57 AM	PH3 valve closed
10/29/2011	11:30:57 AM	SiCl4 pre valve closed
10/29/2011	11:30:57 AM	SiCl4 post valve closed
10/29/2011	11:30:57 AM	Main Vac valve closed
10/29/2011	11:30:57 AM	Bypass valve closed
10/29/2011	11:30:57 AM	Bubbler valve closed
10/29/2011	11:30:57 AM	Helium MFC set to  0.000000
10/29/2011	11:30:57 AM	H2 MFC set to  0.000000
10/29/2011	11:30:57 AM	BCl3 MFC set to  0.000000
10/29/2011	11:30:57 AM	PHl3 MFC set to  0.000000
10/29/2011	11:30:57 AM	SiCl4 MFC set to  0.000000
10/29/2011	11:30:57 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	11:30:57 AM	Tube furnace set to 0
10/29/2011	11:31:00 AM	H2 valve closed
10/29/2011	11:31:00 AM	BCl3 valve closed
10/29/2011	11:31:00 AM	PH3 valve closed
10/29/2011	11:31:00 AM	SiCl4 pre valve closed
10/29/2011	11:31:00 AM	SiCl4 post valve closed
10/29/2011	11:31:00 AM	Main Vac valve closed
10/29/2011	11:31:00 AM	Bypass valve closed
10/29/2011	11:31:00 AM	Bubbler valve closed
10/29/2011	11:31:00 AM	Helium valve opened
10/29/2011	11:31:00 AM	Helium MFC set to  500.000000
10/29/2011	11:31:00 AM	H2 MFC set to  0.000000
10/29/2011	11:31:00 AM	BCl3 MFC set to  0.000000
10/29/2011	11:31:00 AM	PHl3 MFC set to  0.000000
10/29/2011	11:31:00 AM	SiCl4 MFC set to  0.000000
10/29/2011	11:31:00 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	11:31:00 AM	Tube furnace set to 0
10/29/2011	11:31:05 AM	Helium valve closed
10/29/2011	11:31:05 AM	H2 valve closed
10/29/2011	11:31:05 AM	BCl3 valve closed
10/29/2011	11:31:05 AM	PH3 valve closed
10/29/2011	11:31:05 AM	SiCl4 pre valve closed
10/29/2011	11:31:05 AM	SiCl4 post valve closed
10/29/2011	11:31:05 AM	Main Vac valve closed
10/29/2011	11:31:05 AM	Bypass valve closed
10/29/2011	11:31:05 AM	Bubbler valve closed
10/29/2011	11:31:05 AM	Helium MFC set to  0.000000
10/29/2011	11:31:05 AM	H2 MFC set to  0.000000
10/29/2011	11:31:05 AM	BCl3 MFC set to  0.000000
10/29/2011	11:31:05 AM	PHl3 MFC set to  0.000000
10/29/2011	11:31:05 AM	SiCl4 MFC set to  0.000000
10/29/2011	11:31:05 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	11:31:05 AM	Tube furnace set to 0
10/29/2011	11:31:06 AM	Run finished at 11:31 AM
10/29/2011	11:31:06 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/29/2011	11:35:07 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/29/2011	11:35:08 AM	Recipe started at 11:35 AM
10/29/2011	11:35:08 AM	Helium valve closed
10/29/2011	11:35:08 AM	H2 valve closed
10/29/2011	11:35:08 AM	BCl3 valve closed
10/29/2011	11:35:08 AM	PH3 valve closed
10/29/2011	11:35:08 AM	SiCl4 pre valve closed
10/29/2011	11:35:08 AM	SiCl4 post valve closed
10/29/2011	11:35:08 AM	Main Vac valve closed
10/29/2011	11:35:08 AM	Bubbler valve closed
10/29/2011	11:35:08 AM	Bypass valve opened
10/29/2011	11:35:08 AM	Helium MFC set to  0.000000
10/29/2011	11:35:08 AM	H2 MFC set to  0.000000
10/29/2011	11:35:08 AM	BCl3 MFC set to  0.000000
10/29/2011	11:35:08 AM	PHl3 MFC set to  0.000000
10/29/2011	11:35:08 AM	SiCl4 MFC set to  0.000000
10/29/2011	11:35:08 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	11:35:08 AM	Tube furnace set to 0
10/29/2011	11:36:11 AM	Helium valve closed
10/29/2011	11:36:11 AM	H2 valve closed
10/29/2011	11:36:11 AM	BCl3 valve closed
10/29/2011	11:36:11 AM	PH3 valve closed
10/29/2011	11:36:11 AM	SiCl4 pre valve closed
10/29/2011	11:36:11 AM	SiCl4 post valve closed
10/29/2011	11:36:11 AM	Main Vac valve closed
10/29/2011	11:36:11 AM	Bubbler valve closed
10/29/2011	11:36:11 AM	Bypass valve opened
10/29/2011	11:36:11 AM	Helium MFC set to  0.000000
10/29/2011	11:36:11 AM	H2 MFC set to  0.000000
10/29/2011	11:36:11 AM	BCl3 MFC set to  0.000000
10/29/2011	11:36:11 AM	PHl3 MFC set to  0.000000
10/29/2011	11:36:11 AM	SiCl4 MFC set to  0.000000
10/29/2011	11:36:11 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	11:36:11 AM	Tube furnace set to 0
10/29/2011	11:37:11 AM	Helium valve closed
10/29/2011	11:37:11 AM	H2 valve closed
10/29/2011	11:37:11 AM	BCl3 valve closed
10/29/2011	11:37:11 AM	PH3 valve closed
10/29/2011	11:37:11 AM	SiCl4 pre valve closed
10/29/2011	11:37:11 AM	SiCl4 post valve closed
10/29/2011	11:37:11 AM	Bypass valve closed
10/29/2011	11:37:11 AM	Bubbler valve closed
10/29/2011	11:37:11 AM	Main Vac valve opened
10/29/2011	11:37:11 AM	Helium MFC set to  0.000000
10/29/2011	11:37:11 AM	H2 MFC set to  0.000000
10/29/2011	11:37:11 AM	BCl3 MFC set to  0.000000
10/29/2011	11:37:11 AM	PHl3 MFC set to  0.000000
10/29/2011	11:37:11 AM	SiCl4 MFC set to  0.000000
10/29/2011	11:37:11 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	11:37:11 AM	Tube furnace set to 0
10/29/2011	11:37:12 AM	Run finished at 11:37 AM
10/29/2011	11:37:12 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/29/2011	11:44:53 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/29/2011	11:45:06 AM	Recipe started at 11:45 AM
10/29/2011	11:45:06 AM	Helium valve closed
10/29/2011	11:45:06 AM	H2 valve closed
10/29/2011	11:45:06 AM	BCl3 valve closed
10/29/2011	11:45:06 AM	PH3 valve closed
10/29/2011	11:45:06 AM	SiCl4 pre valve closed
10/29/2011	11:45:06 AM	SiCl4 post valve closed
10/29/2011	11:45:06 AM	Main Vac valve closed
10/29/2011	11:45:06 AM	Bubbler valve closed
10/29/2011	11:45:06 AM	Bypass valve opened
10/29/2011	11:45:06 AM	Helium MFC set to  0.000000
10/29/2011	11:45:06 AM	H2 MFC set to  0.000000
10/29/2011	11:45:06 AM	BCl3 MFC set to  0.000000
10/29/2011	11:45:06 AM	PHl3 MFC set to  0.000000
10/29/2011	11:45:06 AM	SiCl4 MFC set to  0.000000
10/29/2011	11:45:06 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	11:45:06 AM	Tube furnace set to 0
10/29/2011	11:45:06 AM	Helium valve closed
10/29/2011	11:45:06 AM	H2 valve closed
10/29/2011	11:45:06 AM	BCl3 valve closed
10/29/2011	11:45:06 AM	PH3 valve closed
10/29/2011	11:45:06 AM	SiCl4 pre valve closed
10/29/2011	11:45:06 AM	SiCl4 post valve closed
10/29/2011	11:45:06 AM	Main Vac valve closed
10/29/2011	11:45:06 AM	Bubbler valve closed
10/29/2011	11:45:06 AM	Bypass valve opened
10/29/2011	11:45:06 AM	Helium MFC set to  0.000000
10/29/2011	11:45:06 AM	H2 MFC set to  0.000000
10/29/2011	11:45:06 AM	BCl3 MFC set to  0.000000
10/29/2011	11:45:06 AM	PHl3 MFC set to  0.000000
10/29/2011	11:45:06 AM	SiCl4 MFC set to  0.000000
10/29/2011	11:45:06 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	11:45:06 AM	Tube furnace set to 0
10/29/2011	11:45:07 AM	Helium valve closed
10/29/2011	11:45:07 AM	H2 valve closed
10/29/2011	11:45:07 AM	BCl3 valve closed
10/29/2011	11:45:07 AM	PH3 valve closed
10/29/2011	11:45:07 AM	SiCl4 pre valve closed
10/29/2011	11:45:07 AM	SiCl4 post valve closed
10/29/2011	11:45:07 AM	Bypass valve closed
10/29/2011	11:45:07 AM	Bubbler valve closed
10/29/2011	11:45:07 AM	Main Vac valve opened
10/29/2011	11:45:07 AM	Helium MFC set to  0.000000
10/29/2011	11:45:07 AM	H2 MFC set to  0.000000
10/29/2011	11:45:07 AM	BCl3 MFC set to  0.000000
10/29/2011	11:45:07 AM	PHl3 MFC set to  0.000000
10/29/2011	11:45:07 AM	SiCl4 MFC set to  0.000000
10/29/2011	11:45:07 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	11:45:07 AM	Tube furnace set to 0
10/29/2011	11:45:10 AM	H2 valve closed
10/29/2011	11:45:10 AM	BCl3 valve closed
10/29/2011	11:45:10 AM	PH3 valve closed
10/29/2011	11:45:10 AM	SiCl4 pre valve closed
10/29/2011	11:45:10 AM	SiCl4 post valve closed
10/29/2011	11:45:10 AM	Bypass valve closed
10/29/2011	11:45:10 AM	Bubbler valve closed
10/29/2011	11:45:10 AM	Helium valve opened
10/29/2011	11:45:10 AM	Main Vac valve opened
10/29/2011	11:45:10 AM	Helium MFC set to  20.000000
10/29/2011	11:45:10 AM	H2 MFC set to  0.000000
10/29/2011	11:45:10 AM	BCl3 MFC set to  0.000000
10/29/2011	11:45:10 AM	PHl3 MFC set to  0.000000
10/29/2011	11:45:10 AM	SiCl4 MFC set to  0.000000
10/29/2011	11:45:10 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	11:45:10 AM	Tube furnace set to 0
10/29/2011	11:45:40 AM	Helium valve closed
10/29/2011	11:45:40 AM	H2 valve closed
10/29/2011	11:45:40 AM	BCl3 valve closed
10/29/2011	11:45:40 AM	PH3 valve closed
10/29/2011	11:45:40 AM	SiCl4 pre valve closed
10/29/2011	11:45:40 AM	SiCl4 post valve closed
10/29/2011	11:45:40 AM	Bypass valve closed
10/29/2011	11:45:40 AM	Bubbler valve closed
10/29/2011	11:45:40 AM	Main Vac valve opened
10/29/2011	11:45:40 AM	Helium MFC set to  0.000000
10/29/2011	11:45:40 AM	H2 MFC set to  0.000000
10/29/2011	11:45:40 AM	BCl3 MFC set to  0.000000
10/29/2011	11:45:40 AM	PHl3 MFC set to  0.000000
10/29/2011	11:45:40 AM	SiCl4 MFC set to  0.000000
10/29/2011	11:45:40 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	11:45:40 AM	Tube furnace set to 0
10/29/2011	11:46:10 AM	H2 valve closed
10/29/2011	11:46:10 AM	BCl3 valve closed
10/29/2011	11:46:10 AM	PH3 valve closed
10/29/2011	11:46:10 AM	SiCl4 pre valve closed
10/29/2011	11:46:10 AM	SiCl4 post valve closed
10/29/2011	11:46:10 AM	Bypass valve closed
10/29/2011	11:46:10 AM	Bubbler valve closed
10/29/2011	11:46:10 AM	Helium valve opened
10/29/2011	11:46:10 AM	Main Vac valve opened
10/29/2011	11:46:10 AM	Helium MFC set to  20.000000
10/29/2011	11:46:10 AM	H2 MFC set to  0.000000
10/29/2011	11:46:10 AM	BCl3 MFC set to  0.000000
10/29/2011	11:46:10 AM	PHl3 MFC set to  0.000000
10/29/2011	11:46:10 AM	SiCl4 MFC set to  0.000000
10/29/2011	11:46:10 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	11:46:10 AM	Tube furnace set to 0
10/29/2011	11:46:40 AM	Helium valve closed
10/29/2011	11:46:40 AM	H2 valve closed
10/29/2011	11:46:40 AM	BCl3 valve closed
10/29/2011	11:46:40 AM	PH3 valve closed
10/29/2011	11:46:40 AM	SiCl4 pre valve closed
10/29/2011	11:46:40 AM	SiCl4 post valve closed
10/29/2011	11:46:40 AM	Bypass valve closed
10/29/2011	11:46:40 AM	Bubbler valve closed
10/29/2011	11:46:40 AM	Main Vac valve opened
10/29/2011	11:46:40 AM	Helium MFC set to  0.000000
10/29/2011	11:46:40 AM	H2 MFC set to  0.000000
10/29/2011	11:46:40 AM	BCl3 MFC set to  0.000000
10/29/2011	11:46:40 AM	PHl3 MFC set to  0.000000
10/29/2011	11:46:40 AM	SiCl4 MFC set to  0.000000
10/29/2011	11:46:40 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	11:46:40 AM	Tube furnace set to 0
10/29/2011	11:47:10 AM	H2 valve closed
10/29/2011	11:47:10 AM	BCl3 valve closed
10/29/2011	11:47:11 AM	PH3 valve closed
10/29/2011	11:47:11 AM	SiCl4 pre valve closed
10/29/2011	11:47:11 AM	SiCl4 post valve closed
10/29/2011	11:47:11 AM	Bypass valve closed
10/29/2011	11:47:11 AM	Bubbler valve closed
10/29/2011	11:47:11 AM	Helium valve opened
10/29/2011	11:47:11 AM	Main Vac valve opened
10/29/2011	11:47:11 AM	Helium MFC set to  20.000000
10/29/2011	11:47:11 AM	H2 MFC set to  0.000000
10/29/2011	11:47:11 AM	BCl3 MFC set to  0.000000
10/29/2011	11:47:11 AM	PHl3 MFC set to  0.000000
10/29/2011	11:47:11 AM	SiCl4 MFC set to  0.000000
10/29/2011	11:47:11 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	11:47:11 AM	Tube furnace set to 0
10/29/2011	11:47:41 AM	Helium valve closed
10/29/2011	11:47:41 AM	H2 valve closed
10/29/2011	11:47:41 AM	BCl3 valve closed
10/29/2011	11:47:41 AM	PH3 valve closed
10/29/2011	11:47:41 AM	SiCl4 pre valve closed
10/29/2011	11:47:41 AM	SiCl4 post valve closed
10/29/2011	11:47:41 AM	Bypass valve closed
10/29/2011	11:47:41 AM	Bubbler valve closed
10/29/2011	11:47:41 AM	Main Vac valve opened
10/29/2011	11:47:41 AM	Helium MFC set to  0.000000
10/29/2011	11:47:41 AM	H2 MFC set to  0.000000
10/29/2011	11:47:41 AM	BCl3 MFC set to  0.000000
10/29/2011	11:47:41 AM	PHl3 MFC set to  0.000000
10/29/2011	11:47:41 AM	SiCl4 MFC set to  0.000000
10/29/2011	11:47:41 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	11:47:41 AM	Tube furnace set to 0
10/29/2011	11:48:11 AM	H2 valve closed
10/29/2011	11:48:11 AM	BCl3 valve closed
10/29/2011	11:48:11 AM	PH3 valve closed
10/29/2011	11:48:11 AM	SiCl4 pre valve closed
10/29/2011	11:48:11 AM	SiCl4 post valve closed
10/29/2011	11:48:11 AM	Bypass valve closed
10/29/2011	11:48:11 AM	Bubbler valve closed
10/29/2011	11:48:11 AM	Helium valve opened
10/29/2011	11:48:11 AM	Main Vac valve opened
10/29/2011	11:48:11 AM	Helium MFC set to  20.000000
10/29/2011	11:48:11 AM	H2 MFC set to  0.000000
10/29/2011	11:48:11 AM	BCl3 MFC set to  0.000000
10/29/2011	11:48:11 AM	PHl3 MFC set to  0.000000
10/29/2011	11:48:11 AM	SiCl4 MFC set to  0.000000
10/29/2011	11:48:11 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	11:48:11 AM	Tube furnace set to 0
10/29/2011	11:48:41 AM	Helium valve closed
10/29/2011	11:48:41 AM	H2 valve closed
10/29/2011	11:48:41 AM	BCl3 valve closed
10/29/2011	11:48:41 AM	PH3 valve closed
10/29/2011	11:48:41 AM	SiCl4 pre valve closed
10/29/2011	11:48:41 AM	SiCl4 post valve closed
10/29/2011	11:48:41 AM	Bypass valve closed
10/29/2011	11:48:41 AM	Bubbler valve closed
10/29/2011	11:48:41 AM	Main Vac valve opened
10/29/2011	11:48:41 AM	Helium MFC set to  0.000000
10/29/2011	11:48:41 AM	H2 MFC set to  0.000000
10/29/2011	11:48:41 AM	BCl3 MFC set to  0.000000
10/29/2011	11:48:41 AM	PHl3 MFC set to  0.000000
10/29/2011	11:48:41 AM	SiCl4 MFC set to  0.000000
10/29/2011	11:48:41 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	11:48:41 AM	Tube furnace set to 0
10/29/2011	11:49:11 AM	H2 valve closed
10/29/2011	11:49:11 AM	BCl3 valve closed
10/29/2011	11:49:11 AM	PH3 valve closed
10/29/2011	11:49:11 AM	SiCl4 pre valve closed
10/29/2011	11:49:11 AM	SiCl4 post valve closed
10/29/2011	11:49:11 AM	Bypass valve closed
10/29/2011	11:49:11 AM	Bubbler valve closed
10/29/2011	11:49:11 AM	Helium valve opened
10/29/2011	11:49:11 AM	Main Vac valve opened
10/29/2011	11:49:11 AM	Helium MFC set to  20.000000
10/29/2011	11:49:11 AM	H2 MFC set to  0.000000
10/29/2011	11:49:11 AM	BCl3 MFC set to  0.000000
10/29/2011	11:49:11 AM	PHl3 MFC set to  0.000000
10/29/2011	11:49:11 AM	SiCl4 MFC set to  0.000000
10/29/2011	11:49:11 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	11:49:11 AM	Tube furnace set to 0
10/29/2011	11:49:41 AM	Helium valve closed
10/29/2011	11:49:41 AM	H2 valve closed
10/29/2011	11:49:41 AM	BCl3 valve closed
10/29/2011	11:49:41 AM	PH3 valve closed
10/29/2011	11:49:41 AM	SiCl4 pre valve closed
10/29/2011	11:49:41 AM	SiCl4 post valve closed
10/29/2011	11:49:41 AM	Bypass valve closed
10/29/2011	11:49:41 AM	Bubbler valve closed
10/29/2011	11:49:42 AM	Main Vac valve opened
10/29/2011	11:49:42 AM	Helium MFC set to  0.000000
10/29/2011	11:49:42 AM	H2 MFC set to  0.000000
10/29/2011	11:49:42 AM	BCl3 MFC set to  0.000000
10/29/2011	11:49:42 AM	PHl3 MFC set to  0.000000
10/29/2011	11:49:42 AM	SiCl4 MFC set to  0.000000
10/29/2011	11:49:42 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	11:49:42 AM	Tube furnace set to 0
10/29/2011	11:50:12 AM	H2 valve closed
10/29/2011	11:50:12 AM	BCl3 valve closed
10/29/2011	11:50:12 AM	PH3 valve closed
10/29/2011	11:50:12 AM	SiCl4 pre valve closed
10/29/2011	11:50:12 AM	SiCl4 post valve closed
10/29/2011	11:50:12 AM	Bypass valve closed
10/29/2011	11:50:12 AM	Bubbler valve closed
10/29/2011	11:50:12 AM	Helium valve opened
10/29/2011	11:50:12 AM	Main Vac valve opened
10/29/2011	11:50:12 AM	Helium MFC set to  20.000000
10/29/2011	11:50:12 AM	H2 MFC set to  0.000000
10/29/2011	11:50:12 AM	BCl3 MFC set to  0.000000
10/29/2011	11:50:12 AM	PHl3 MFC set to  0.000000
10/29/2011	11:50:12 AM	SiCl4 MFC set to  0.000000
10/29/2011	11:50:12 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	11:50:12 AM	Tube furnace set to 0
10/29/2011	11:50:42 AM	Helium valve closed
10/29/2011	11:50:42 AM	H2 valve closed
10/29/2011	11:50:42 AM	BCl3 valve closed
10/29/2011	11:50:42 AM	PH3 valve closed
10/29/2011	11:50:42 AM	SiCl4 pre valve closed
10/29/2011	11:50:42 AM	SiCl4 post valve closed
10/29/2011	11:50:42 AM	Bypass valve closed
10/29/2011	11:50:42 AM	Bubbler valve closed
10/29/2011	11:50:42 AM	Main Vac valve opened
10/29/2011	11:50:42 AM	Helium MFC set to  0.000000
10/29/2011	11:50:42 AM	H2 MFC set to  0.000000
10/29/2011	11:50:42 AM	BCl3 MFC set to  0.000000
10/29/2011	11:50:42 AM	PHl3 MFC set to  0.000000
10/29/2011	11:50:42 AM	SiCl4 MFC set to  0.000000
10/29/2011	11:50:42 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	11:50:42 AM	Tube furnace set to 0
10/29/2011	11:51:12 AM	H2 valve closed
10/29/2011	11:51:12 AM	BCl3 valve closed
10/29/2011	11:51:12 AM	PH3 valve closed
10/29/2011	11:51:12 AM	SiCl4 pre valve closed
10/29/2011	11:51:12 AM	SiCl4 post valve closed
10/29/2011	11:51:12 AM	Bypass valve closed
10/29/2011	11:51:12 AM	Bubbler valve closed
10/29/2011	11:51:12 AM	Helium valve opened
10/29/2011	11:51:12 AM	Main Vac valve opened
10/29/2011	11:51:12 AM	Helium MFC set to  20.000000
10/29/2011	11:51:12 AM	H2 MFC set to  0.000000
10/29/2011	11:51:12 AM	BCl3 MFC set to  0.000000
10/29/2011	11:51:12 AM	PHl3 MFC set to  0.000000
10/29/2011	11:51:12 AM	SiCl4 MFC set to  0.000000
10/29/2011	11:51:12 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	11:51:12 AM	Tube furnace set to 0
10/29/2011	11:51:42 AM	Helium valve closed
10/29/2011	11:51:42 AM	H2 valve closed
10/29/2011	11:51:42 AM	BCl3 valve closed
10/29/2011	11:51:42 AM	PH3 valve closed
10/29/2011	11:51:42 AM	SiCl4 pre valve closed
10/29/2011	11:51:42 AM	SiCl4 post valve closed
10/29/2011	11:51:42 AM	Bypass valve closed
10/29/2011	11:51:42 AM	Bubbler valve closed
10/29/2011	11:51:42 AM	Main Vac valve opened
10/29/2011	11:51:42 AM	Helium MFC set to  0.000000
10/29/2011	11:51:42 AM	H2 MFC set to  0.000000
10/29/2011	11:51:42 AM	BCl3 MFC set to  0.000000
10/29/2011	11:51:42 AM	PHl3 MFC set to  0.000000
10/29/2011	11:51:42 AM	SiCl4 MFC set to  0.000000
10/29/2011	11:51:42 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	11:51:42 AM	Tube furnace set to 0
10/29/2011	11:52:12 AM	H2 valve closed
10/29/2011	11:52:12 AM	BCl3 valve closed
10/29/2011	11:52:12 AM	PH3 valve closed
10/29/2011	11:52:12 AM	SiCl4 pre valve closed
10/29/2011	11:52:12 AM	SiCl4 post valve closed
10/29/2011	11:52:12 AM	Bypass valve closed
10/29/2011	11:52:12 AM	Bubbler valve closed
10/29/2011	11:52:12 AM	Helium valve opened
10/29/2011	11:52:12 AM	Main Vac valve opened
10/29/2011	11:52:12 AM	Helium MFC set to  20.000000
10/29/2011	11:52:12 AM	H2 MFC set to  0.000000
10/29/2011	11:52:12 AM	BCl3 MFC set to  0.000000
10/29/2011	11:52:12 AM	PHl3 MFC set to  0.000000
10/29/2011	11:52:12 AM	SiCl4 MFC set to  0.000000
10/29/2011	11:52:12 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	11:52:13 AM	Tube furnace set to 0
10/29/2011	11:52:43 AM	Helium valve closed
10/29/2011	11:52:43 AM	H2 valve closed
10/29/2011	11:52:43 AM	BCl3 valve closed
10/29/2011	11:52:43 AM	PH3 valve closed
10/29/2011	11:52:43 AM	SiCl4 pre valve closed
10/29/2011	11:52:43 AM	SiCl4 post valve closed
10/29/2011	11:52:43 AM	Bypass valve closed
10/29/2011	11:52:43 AM	Bubbler valve closed
10/29/2011	11:52:43 AM	Main Vac valve opened
10/29/2011	11:52:43 AM	Helium MFC set to  0.000000
10/29/2011	11:52:43 AM	H2 MFC set to  0.000000
10/29/2011	11:52:43 AM	BCl3 MFC set to  0.000000
10/29/2011	11:52:43 AM	PHl3 MFC set to  0.000000
10/29/2011	11:52:43 AM	SiCl4 MFC set to  0.000000
10/29/2011	11:52:43 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	11:52:43 AM	Tube furnace set to 0
10/29/2011	11:53:13 AM	H2 valve closed
10/29/2011	11:53:13 AM	BCl3 valve closed
10/29/2011	11:53:13 AM	PH3 valve closed
10/29/2011	11:53:13 AM	SiCl4 pre valve closed
10/29/2011	11:53:13 AM	SiCl4 post valve closed
10/29/2011	11:53:13 AM	Bypass valve closed
10/29/2011	11:53:13 AM	Bubbler valve closed
10/29/2011	11:53:13 AM	Helium valve opened
10/29/2011	11:53:13 AM	Main Vac valve opened
10/29/2011	11:53:13 AM	Helium MFC set to  20.000000
10/29/2011	11:53:13 AM	H2 MFC set to  0.000000
10/29/2011	11:53:13 AM	BCl3 MFC set to  0.000000
10/29/2011	11:53:13 AM	PHl3 MFC set to  0.000000
10/29/2011	11:53:13 AM	SiCl4 MFC set to  0.000000
10/29/2011	11:53:13 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	11:53:13 AM	Tube furnace set to 0
10/29/2011	11:53:43 AM	Helium valve closed
10/29/2011	11:53:43 AM	H2 valve closed
10/29/2011	11:53:43 AM	BCl3 valve closed
10/29/2011	11:53:43 AM	PH3 valve closed
10/29/2011	11:53:43 AM	SiCl4 pre valve closed
10/29/2011	11:53:43 AM	SiCl4 post valve closed
10/29/2011	11:53:43 AM	Bypass valve closed
10/29/2011	11:53:43 AM	Bubbler valve closed
10/29/2011	11:53:43 AM	Main Vac valve opened
10/29/2011	11:53:43 AM	Helium MFC set to  0.000000
10/29/2011	11:53:43 AM	H2 MFC set to  0.000000
10/29/2011	11:53:43 AM	BCl3 MFC set to  0.000000
10/29/2011	11:53:43 AM	PHl3 MFC set to  0.000000
10/29/2011	11:53:43 AM	SiCl4 MFC set to  0.000000
10/29/2011	11:53:43 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	11:53:43 AM	Tube furnace set to 0
10/29/2011	11:54:13 AM	H2 valve closed
10/29/2011	11:54:13 AM	BCl3 valve closed
10/29/2011	11:54:13 AM	PH3 valve closed
10/29/2011	11:54:13 AM	SiCl4 pre valve closed
10/29/2011	11:54:13 AM	SiCl4 post valve closed
10/29/2011	11:54:13 AM	Bypass valve closed
10/29/2011	11:54:13 AM	Bubbler valve closed
10/29/2011	11:54:13 AM	Helium valve opened
10/29/2011	11:54:13 AM	Main Vac valve opened
10/29/2011	11:54:13 AM	Helium MFC set to  20.000000
10/29/2011	11:54:13 AM	H2 MFC set to  0.000000
10/29/2011	11:54:13 AM	BCl3 MFC set to  0.000000
10/29/2011	11:54:13 AM	PHl3 MFC set to  0.000000
10/29/2011	11:54:13 AM	SiCl4 MFC set to  0.000000
10/29/2011	11:54:13 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	11:54:13 AM	Tube furnace set to 0
10/29/2011	11:54:43 AM	Helium valve closed
10/29/2011	11:54:43 AM	H2 valve closed
10/29/2011	11:54:43 AM	BCl3 valve closed
10/29/2011	11:54:43 AM	PH3 valve closed
10/29/2011	11:54:43 AM	SiCl4 pre valve closed
10/29/2011	11:54:43 AM	SiCl4 post valve closed
10/29/2011	11:54:43 AM	Bypass valve closed
10/29/2011	11:54:43 AM	Bubbler valve closed
10/29/2011	11:54:43 AM	Main Vac valve opened
10/29/2011	11:54:43 AM	Helium MFC set to  0.000000
10/29/2011	11:54:43 AM	H2 MFC set to  0.000000
10/29/2011	11:54:43 AM	BCl3 MFC set to  0.000000
10/29/2011	11:54:43 AM	PHl3 MFC set to  0.000000
10/29/2011	11:54:43 AM	SiCl4 MFC set to  0.000000
10/29/2011	11:54:43 AM	Bypass solenoid MFC set to  0.000000
10/29/2011	11:54:44 AM	Tube furnace set to 0
10/29/2011	11:54:45 AM	Run finished at 11:54 AM
10/29/2011	11:54:45 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/29/2011	12:06:02 PM	Recipe started at 12:05 PM
10/29/2011	12:06:02 PM	Helium valve closed
10/29/2011	12:06:02 PM	H2 valve closed
10/29/2011	12:06:02 PM	BCl3 valve closed
10/29/2011	12:06:02 PM	PH3 valve closed
10/29/2011	12:06:02 PM	SiCl4 pre valve closed
10/29/2011	12:06:02 PM	SiCl4 post valve closed
10/29/2011	12:06:02 PM	Bypass valve closed
10/29/2011	12:06:02 PM	Bubbler valve closed
10/29/2011	12:06:02 PM	Main Vac valve opened
10/29/2011	12:06:02 PM	Helium MFC set to  0.000000
10/29/2011	12:06:02 PM	H2 MFC set to  0.000000
10/29/2011	12:06:02 PM	BCl3 MFC set to  0.000000
10/29/2011	12:06:02 PM	PHl3 MFC set to  0.000000
10/29/2011	12:06:02 PM	SiCl4 MFC set to  0.000000
10/29/2011	12:06:02 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	12:06:03 PM	Tube furnace set to 150
10/29/2011	12:06:09 PM	H2 valve closed
10/29/2011	12:06:09 PM	BCl3 valve closed
10/29/2011	12:06:09 PM	PH3 valve closed
10/29/2011	12:06:09 PM	SiCl4 pre valve closed
10/29/2011	12:06:09 PM	SiCl4 post valve closed
10/29/2011	12:06:09 PM	Bypass valve closed
10/29/2011	12:06:09 PM	Bubbler valve closed
10/29/2011	12:06:09 PM	Helium valve opened
10/29/2011	12:06:09 PM	Main Vac valve opened
10/29/2011	12:06:09 PM	Helium MFC set to  20.000000
10/29/2011	12:06:09 PM	H2 MFC set to  0.000000
10/29/2011	12:06:09 PM	BCl3 MFC set to  0.000000
10/29/2011	12:06:09 PM	PHl3 MFC set to  0.000000
10/29/2011	12:06:09 PM	SiCl4 MFC set to  0.000000
10/29/2011	12:06:09 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	12:06:09 PM	Tube furnace set to 150
10/29/2011	12:06:39 PM	Helium valve closed
10/29/2011	12:06:39 PM	H2 valve closed
10/29/2011	12:06:39 PM	BCl3 valve closed
10/29/2011	12:06:39 PM	PH3 valve closed
10/29/2011	12:06:39 PM	SiCl4 pre valve closed
10/29/2011	12:06:39 PM	SiCl4 post valve closed
10/29/2011	12:06:39 PM	Bypass valve closed
10/29/2011	12:06:39 PM	Bubbler valve closed
10/29/2011	12:06:39 PM	Main Vac valve opened
10/29/2011	12:06:39 PM	Helium MFC set to  0.000000
10/29/2011	12:06:39 PM	H2 MFC set to  0.000000
10/29/2011	12:06:39 PM	BCl3 MFC set to  0.000000
10/29/2011	12:06:39 PM	PHl3 MFC set to  0.000000
10/29/2011	12:06:39 PM	SiCl4 MFC set to  0.000000
10/29/2011	12:06:39 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	12:06:39 PM	Tube furnace set to 150
10/29/2011	12:07:09 PM	H2 valve closed
10/29/2011	12:07:09 PM	BCl3 valve closed
10/29/2011	12:07:09 PM	PH3 valve closed
10/29/2011	12:07:09 PM	SiCl4 pre valve closed
10/29/2011	12:07:09 PM	SiCl4 post valve closed
10/29/2011	12:07:09 PM	Bypass valve closed
10/29/2011	12:07:09 PM	Bubbler valve closed
10/29/2011	12:07:09 PM	Helium valve opened
10/29/2011	12:07:09 PM	Main Vac valve opened
10/29/2011	12:07:09 PM	Helium MFC set to  20.000000
10/29/2011	12:07:09 PM	H2 MFC set to  0.000000
10/29/2011	12:07:09 PM	BCl3 MFC set to  0.000000
10/29/2011	12:07:09 PM	PHl3 MFC set to  0.000000
10/29/2011	12:07:09 PM	SiCl4 MFC set to  0.000000
10/29/2011	12:07:09 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	12:07:09 PM	Tube furnace set to 150
10/29/2011	12:07:39 PM	Helium valve closed
10/29/2011	12:07:39 PM	H2 valve closed
10/29/2011	12:07:39 PM	BCl3 valve closed
10/29/2011	12:07:39 PM	PH3 valve closed
10/29/2011	12:07:39 PM	SiCl4 pre valve closed
10/29/2011	12:07:39 PM	SiCl4 post valve closed
10/29/2011	12:07:39 PM	Bypass valve closed
10/29/2011	12:07:39 PM	Bubbler valve closed
10/29/2011	12:07:39 PM	Main Vac valve opened
10/29/2011	12:07:39 PM	Helium MFC set to  0.000000
10/29/2011	12:07:39 PM	H2 MFC set to  0.000000
10/29/2011	12:07:39 PM	BCl3 MFC set to  0.000000
10/29/2011	12:07:39 PM	PHl3 MFC set to  0.000000
10/29/2011	12:07:39 PM	SiCl4 MFC set to  0.000000
10/29/2011	12:07:39 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	12:07:39 PM	Tube furnace set to 150
10/29/2011	12:08:09 PM	H2 valve closed
10/29/2011	12:08:09 PM	BCl3 valve closed
10/29/2011	12:08:09 PM	PH3 valve closed
10/29/2011	12:08:09 PM	SiCl4 pre valve closed
10/29/2011	12:08:09 PM	SiCl4 post valve closed
10/29/2011	12:08:09 PM	Bypass valve closed
10/29/2011	12:08:09 PM	Bubbler valve closed
10/29/2011	12:08:09 PM	Helium valve opened
10/29/2011	12:08:09 PM	Main Vac valve opened
10/29/2011	12:08:09 PM	Helium MFC set to  20.000000
10/29/2011	12:08:09 PM	H2 MFC set to  0.000000
10/29/2011	12:08:09 PM	BCl3 MFC set to  0.000000
10/29/2011	12:08:09 PM	PHl3 MFC set to  0.000000
10/29/2011	12:08:09 PM	SiCl4 MFC set to  0.000000
10/29/2011	12:08:09 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	12:08:10 PM	Tube furnace set to 150
10/29/2011	12:08:40 PM	Helium valve closed
10/29/2011	12:08:40 PM	H2 valve closed
10/29/2011	12:08:40 PM	BCl3 valve closed
10/29/2011	12:08:40 PM	PH3 valve closed
10/29/2011	12:08:40 PM	SiCl4 pre valve closed
10/29/2011	12:08:40 PM	SiCl4 post valve closed
10/29/2011	12:08:40 PM	Bypass valve closed
10/29/2011	12:08:40 PM	Bubbler valve closed
10/29/2011	12:08:40 PM	Main Vac valve opened
10/29/2011	12:08:40 PM	Helium MFC set to  0.000000
10/29/2011	12:08:40 PM	H2 MFC set to  0.000000
10/29/2011	12:08:40 PM	BCl3 MFC set to  0.000000
10/29/2011	12:08:40 PM	PHl3 MFC set to  0.000000
10/29/2011	12:08:40 PM	SiCl4 MFC set to  0.000000
10/29/2011	12:08:40 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	12:08:40 PM	Tube furnace set to 150
10/29/2011	12:09:10 PM	H2 valve closed
10/29/2011	12:09:10 PM	BCl3 valve closed
10/29/2011	12:09:10 PM	PH3 valve closed
10/29/2011	12:09:10 PM	SiCl4 pre valve closed
10/29/2011	12:09:10 PM	SiCl4 post valve closed
10/29/2011	12:09:10 PM	Bypass valve closed
10/29/2011	12:09:10 PM	Bubbler valve closed
10/29/2011	12:09:10 PM	Helium valve opened
10/29/2011	12:09:10 PM	Main Vac valve opened
10/29/2011	12:09:10 PM	Helium MFC set to  20.000000
10/29/2011	12:09:10 PM	H2 MFC set to  0.000000
10/29/2011	12:09:10 PM	BCl3 MFC set to  0.000000
10/29/2011	12:09:10 PM	PHl3 MFC set to  0.000000
10/29/2011	12:09:10 PM	SiCl4 MFC set to  0.000000
10/29/2011	12:09:10 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	12:09:10 PM	Tube furnace set to 150
10/29/2011	12:09:40 PM	Helium valve closed
10/29/2011	12:09:40 PM	H2 valve closed
10/29/2011	12:09:40 PM	BCl3 valve closed
10/29/2011	12:09:40 PM	PH3 valve closed
10/29/2011	12:09:40 PM	SiCl4 pre valve closed
10/29/2011	12:09:40 PM	SiCl4 post valve closed
10/29/2011	12:09:40 PM	Bypass valve closed
10/29/2011	12:09:40 PM	Bubbler valve closed
10/29/2011	12:09:40 PM	Main Vac valve opened
10/29/2011	12:09:40 PM	Helium MFC set to  0.000000
10/29/2011	12:09:40 PM	H2 MFC set to  0.000000
10/29/2011	12:09:40 PM	BCl3 MFC set to  0.000000
10/29/2011	12:09:40 PM	PHl3 MFC set to  0.000000
10/29/2011	12:09:40 PM	SiCl4 MFC set to  0.000000
10/29/2011	12:09:40 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	12:09:40 PM	Tube furnace set to 150
10/29/2011	12:10:10 PM	H2 valve closed
10/29/2011	12:10:10 PM	BCl3 valve closed
10/29/2011	12:10:10 PM	PH3 valve closed
10/29/2011	12:10:10 PM	SiCl4 pre valve closed
10/29/2011	12:10:10 PM	SiCl4 post valve closed
10/29/2011	12:10:10 PM	Bypass valve closed
10/29/2011	12:10:10 PM	Bubbler valve closed
10/29/2011	12:10:10 PM	Helium valve opened
10/29/2011	12:10:10 PM	Main Vac valve opened
10/29/2011	12:10:10 PM	Helium MFC set to  20.000000
10/29/2011	12:10:10 PM	H2 MFC set to  0.000000
10/29/2011	12:10:10 PM	BCl3 MFC set to  0.000000
10/29/2011	12:10:10 PM	PHl3 MFC set to  0.000000
10/29/2011	12:10:10 PM	SiCl4 MFC set to  0.000000
10/29/2011	12:10:10 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	12:10:10 PM	Tube furnace set to 150
10/29/2011	12:10:40 PM	Helium valve closed
10/29/2011	12:10:40 PM	H2 valve closed
10/29/2011	12:10:40 PM	BCl3 valve closed
10/29/2011	12:10:40 PM	PH3 valve closed
10/29/2011	12:10:40 PM	SiCl4 pre valve closed
10/29/2011	12:10:40 PM	SiCl4 post valve closed
10/29/2011	12:10:40 PM	Bypass valve closed
10/29/2011	12:10:40 PM	Bubbler valve closed
10/29/2011	12:10:40 PM	Main Vac valve opened
10/29/2011	12:10:40 PM	Helium MFC set to  0.000000
10/29/2011	12:10:40 PM	H2 MFC set to  0.000000
10/29/2011	12:10:40 PM	BCl3 MFC set to  0.000000
10/29/2011	12:10:40 PM	PHl3 MFC set to  0.000000
10/29/2011	12:10:40 PM	SiCl4 MFC set to  0.000000
10/29/2011	12:10:40 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	12:10:41 PM	Tube furnace set to 150
10/29/2011	12:11:11 PM	H2 valve closed
10/29/2011	12:11:11 PM	BCl3 valve closed
10/29/2011	12:11:11 PM	PH3 valve closed
10/29/2011	12:11:11 PM	SiCl4 pre valve closed
10/29/2011	12:11:11 PM	SiCl4 post valve closed
10/29/2011	12:11:11 PM	Bypass valve closed
10/29/2011	12:11:11 PM	Bubbler valve closed
10/29/2011	12:11:11 PM	Helium valve opened
10/29/2011	12:11:11 PM	Main Vac valve opened
10/29/2011	12:11:11 PM	Helium MFC set to  20.000000
10/29/2011	12:11:11 PM	H2 MFC set to  0.000000
10/29/2011	12:11:11 PM	BCl3 MFC set to  0.000000
10/29/2011	12:11:11 PM	PHl3 MFC set to  0.000000
10/29/2011	12:11:11 PM	SiCl4 MFC set to  0.000000
10/29/2011	12:11:11 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	12:11:11 PM	Tube furnace set to 150
10/29/2011	12:11:41 PM	Helium valve closed
10/29/2011	12:11:41 PM	H2 valve closed
10/29/2011	12:11:41 PM	BCl3 valve closed
10/29/2011	12:11:41 PM	PH3 valve closed
10/29/2011	12:11:41 PM	SiCl4 pre valve closed
10/29/2011	12:11:41 PM	SiCl4 post valve closed
10/29/2011	12:11:41 PM	Bypass valve closed
10/29/2011	12:11:41 PM	Bubbler valve closed
10/29/2011	12:11:41 PM	Main Vac valve opened
10/29/2011	12:11:41 PM	Helium MFC set to  0.000000
10/29/2011	12:11:41 PM	H2 MFC set to  0.000000
10/29/2011	12:11:41 PM	BCl3 MFC set to  0.000000
10/29/2011	12:11:41 PM	PHl3 MFC set to  0.000000
10/29/2011	12:11:41 PM	SiCl4 MFC set to  0.000000
10/29/2011	12:11:41 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	12:11:41 PM	Tube furnace set to 150
10/29/2011	12:12:11 PM	H2 valve closed
10/29/2011	12:12:11 PM	BCl3 valve closed
10/29/2011	12:12:11 PM	PH3 valve closed
10/29/2011	12:12:11 PM	SiCl4 pre valve closed
10/29/2011	12:12:11 PM	SiCl4 post valve closed
10/29/2011	12:12:11 PM	Bypass valve closed
10/29/2011	12:12:11 PM	Bubbler valve closed
10/29/2011	12:12:11 PM	Helium valve opened
10/29/2011	12:12:11 PM	Main Vac valve opened
10/29/2011	12:12:11 PM	Helium MFC set to  20.000000
10/29/2011	12:12:11 PM	H2 MFC set to  0.000000
10/29/2011	12:12:11 PM	BCl3 MFC set to  0.000000
10/29/2011	12:12:11 PM	PHl3 MFC set to  0.000000
10/29/2011	12:12:11 PM	SiCl4 MFC set to  0.000000
10/29/2011	12:12:11 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	12:12:11 PM	Tube furnace set to 150
10/29/2011	12:12:41 PM	Helium valve closed
10/29/2011	12:12:41 PM	H2 valve closed
10/29/2011	12:12:41 PM	BCl3 valve closed
10/29/2011	12:12:41 PM	PH3 valve closed
10/29/2011	12:12:41 PM	SiCl4 pre valve closed
10/29/2011	12:12:41 PM	SiCl4 post valve closed
10/29/2011	12:12:41 PM	Bypass valve closed
10/29/2011	12:12:41 PM	Bubbler valve closed
10/29/2011	12:12:41 PM	Main Vac valve opened
10/29/2011	12:12:41 PM	Helium MFC set to  0.000000
10/29/2011	12:12:41 PM	H2 MFC set to  0.000000
10/29/2011	12:12:41 PM	BCl3 MFC set to  0.000000
10/29/2011	12:12:41 PM	PHl3 MFC set to  0.000000
10/29/2011	12:12:41 PM	SiCl4 MFC set to  0.000000
10/29/2011	12:12:41 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	12:12:41 PM	Tube furnace set to 150
10/29/2011	12:13:11 PM	H2 valve closed
10/29/2011	12:13:11 PM	BCl3 valve closed
10/29/2011	12:13:11 PM	PH3 valve closed
10/29/2011	12:13:11 PM	SiCl4 pre valve closed
10/29/2011	12:13:11 PM	SiCl4 post valve closed
10/29/2011	12:13:11 PM	Bypass valve closed
10/29/2011	12:13:11 PM	Bubbler valve closed
10/29/2011	12:13:11 PM	Helium valve opened
10/29/2011	12:13:11 PM	Main Vac valve opened
10/29/2011	12:13:11 PM	Helium MFC set to  20.000000
10/29/2011	12:13:11 PM	H2 MFC set to  0.000000
10/29/2011	12:13:11 PM	BCl3 MFC set to  0.000000
10/29/2011	12:13:11 PM	PHl3 MFC set to  0.000000
10/29/2011	12:13:11 PM	SiCl4 MFC set to  0.000000
10/29/2011	12:13:11 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	12:13:12 PM	Tube furnace set to 150
10/29/2011	12:13:42 PM	Helium valve closed
10/29/2011	12:13:42 PM	H2 valve closed
10/29/2011	12:13:42 PM	BCl3 valve closed
10/29/2011	12:13:42 PM	PH3 valve closed
10/29/2011	12:13:42 PM	SiCl4 pre valve closed
10/29/2011	12:13:42 PM	SiCl4 post valve closed
10/29/2011	12:13:42 PM	Bypass valve closed
10/29/2011	12:13:42 PM	Bubbler valve closed
10/29/2011	12:13:42 PM	Main Vac valve opened
10/29/2011	12:13:42 PM	Helium MFC set to  0.000000
10/29/2011	12:13:42 PM	H2 MFC set to  0.000000
10/29/2011	12:13:42 PM	BCl3 MFC set to  0.000000
10/29/2011	12:13:42 PM	PHl3 MFC set to  0.000000
10/29/2011	12:13:42 PM	SiCl4 MFC set to  0.000000
10/29/2011	12:13:42 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	12:13:42 PM	Tube furnace set to 150
10/29/2011	12:14:12 PM	H2 valve closed
10/29/2011	12:14:12 PM	BCl3 valve closed
10/29/2011	12:14:12 PM	PH3 valve closed
10/29/2011	12:14:12 PM	SiCl4 pre valve closed
10/29/2011	12:14:12 PM	SiCl4 post valve closed
10/29/2011	12:14:12 PM	Bypass valve closed
10/29/2011	12:14:12 PM	Bubbler valve closed
10/29/2011	12:14:12 PM	Helium valve opened
10/29/2011	12:14:12 PM	Main Vac valve opened
10/29/2011	12:14:12 PM	Helium MFC set to  20.000000
10/29/2011	12:14:12 PM	H2 MFC set to  0.000000
10/29/2011	12:14:12 PM	BCl3 MFC set to  0.000000
10/29/2011	12:14:12 PM	PHl3 MFC set to  0.000000
10/29/2011	12:14:12 PM	SiCl4 MFC set to  0.000000
10/29/2011	12:14:12 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	12:14:12 PM	Tube furnace set to 150
10/29/2011	12:14:42 PM	Helium valve closed
10/29/2011	12:14:42 PM	H2 valve closed
10/29/2011	12:14:42 PM	BCl3 valve closed
10/29/2011	12:14:42 PM	PH3 valve closed
10/29/2011	12:14:42 PM	SiCl4 pre valve closed
10/29/2011	12:14:42 PM	SiCl4 post valve closed
10/29/2011	12:14:42 PM	Bypass valve closed
10/29/2011	12:14:42 PM	Bubbler valve closed
10/29/2011	12:14:42 PM	Main Vac valve opened
10/29/2011	12:14:42 PM	Helium MFC set to  0.000000
10/29/2011	12:14:42 PM	H2 MFC set to  0.000000
10/29/2011	12:14:42 PM	BCl3 MFC set to  0.000000
10/29/2011	12:14:42 PM	PHl3 MFC set to  0.000000
10/29/2011	12:14:42 PM	SiCl4 MFC set to  0.000000
10/29/2011	12:14:42 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	12:14:42 PM	Tube furnace set to 150
10/29/2011	12:15:12 PM	H2 valve closed
10/29/2011	12:15:12 PM	BCl3 valve closed
10/29/2011	12:15:12 PM	PH3 valve closed
10/29/2011	12:15:12 PM	SiCl4 pre valve closed
10/29/2011	12:15:12 PM	SiCl4 post valve closed
10/29/2011	12:15:12 PM	Bypass valve closed
10/29/2011	12:15:12 PM	Bubbler valve closed
10/29/2011	12:15:12 PM	Helium valve opened
10/29/2011	12:15:12 PM	Main Vac valve opened
10/29/2011	12:15:12 PM	Helium MFC set to  20.000000
10/29/2011	12:15:12 PM	H2 MFC set to  0.000000
10/29/2011	12:15:12 PM	BCl3 MFC set to  0.000000
10/29/2011	12:15:12 PM	PHl3 MFC set to  0.000000
10/29/2011	12:15:12 PM	SiCl4 MFC set to  0.000000
10/29/2011	12:15:12 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	12:15:13 PM	Tube furnace set to 150
10/29/2011	12:15:43 PM	Helium valve closed
10/29/2011	12:15:43 PM	H2 valve closed
10/29/2011	12:15:43 PM	BCl3 valve closed
10/29/2011	12:15:43 PM	PH3 valve closed
10/29/2011	12:15:43 PM	SiCl4 pre valve closed
10/29/2011	12:15:43 PM	SiCl4 post valve closed
10/29/2011	12:15:43 PM	Bypass valve closed
10/29/2011	12:15:43 PM	Bubbler valve closed
10/29/2011	12:15:43 PM	Main Vac valve opened
10/29/2011	12:15:43 PM	Helium MFC set to  0.000000
10/29/2011	12:15:43 PM	H2 MFC set to  0.000000
10/29/2011	12:15:43 PM	BCl3 MFC set to  0.000000
10/29/2011	12:15:43 PM	PHl3 MFC set to  0.000000
10/29/2011	12:15:43 PM	SiCl4 MFC set to  0.000000
10/29/2011	12:15:43 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	12:15:43 PM	Tube furnace set to 150
10/29/2011	12:15:44 PM	Run finished at 12:15 PM
10/29/2011	12:22:27 PM	Main Vac valve closed
10/29/2011	12:22:43 PM	Main Vac valve opened
10/29/2011	12:24:47 PM	Recipe started at 12:24 PM
10/29/2011	12:24:47 PM	Helium valve closed
10/29/2011	12:24:47 PM	H2 valve closed
10/29/2011	12:24:47 PM	BCl3 valve closed
10/29/2011	12:24:47 PM	PH3 valve closed
10/29/2011	12:24:47 PM	SiCl4 pre valve closed
10/29/2011	12:24:47 PM	SiCl4 post valve closed
10/29/2011	12:24:47 PM	Main Vac valve closed
10/29/2011	12:24:47 PM	Bypass valve closed
10/29/2011	12:24:47 PM	Bubbler valve closed
10/29/2011	12:24:47 PM	Helium MFC set to  0.000000
10/29/2011	12:24:47 PM	H2 MFC set to  0.000000
10/29/2011	12:24:47 PM	BCl3 MFC set to  0.000000
10/29/2011	12:24:47 PM	PHl3 MFC set to  0.000000
10/29/2011	12:24:47 PM	SiCl4 MFC set to  0.000000
10/29/2011	12:24:47 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	12:24:48 PM	Tube furnace set to 0
10/29/2011	12:24:51 PM	Helium valve closed
10/29/2011	12:24:51 PM	BCl3 valve closed
10/29/2011	12:24:51 PM	PH3 valve closed
10/29/2011	12:24:51 PM	SiCl4 pre valve closed
10/29/2011	12:24:51 PM	SiCl4 post valve closed
10/29/2011	12:24:51 PM	Main Vac valve closed
10/29/2011	12:24:51 PM	Bypass valve closed
10/29/2011	12:24:51 PM	Bubbler valve closed
10/29/2011	12:24:51 PM	H2 valve opened
10/29/2011	12:24:51 PM	Helium MFC set to  0.000000
10/29/2011	12:24:51 PM	H2 MFC set to  500.000000
10/29/2011	12:24:51 PM	BCl3 MFC set to  0.000000
10/29/2011	12:24:51 PM	PHl3 MFC set to  0.000000
10/29/2011	12:24:51 PM	SiCl4 MFC set to  0.000000
10/29/2011	12:24:51 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	12:24:51 PM	Tube furnace set to 0
10/29/2011	12:25:55 PM	Helium valve closed
10/29/2011	12:25:55 PM	BCl3 valve closed
10/29/2011	12:25:55 PM	PH3 valve closed
10/29/2011	12:25:55 PM	SiCl4 pre valve closed
10/29/2011	12:25:55 PM	SiCl4 post valve closed
10/29/2011	12:25:55 PM	Main Vac valve closed
10/29/2011	12:25:55 PM	Bypass valve closed
10/29/2011	12:25:55 PM	H2 valve opened
10/29/2011	12:25:55 PM	Bubbler valve opened
10/29/2011	12:25:55 PM	Helium MFC set to  0.000000
10/29/2011	12:25:55 PM	H2 MFC set to  500.000000
10/29/2011	12:25:55 PM	BCl3 MFC set to  0.000000
10/29/2011	12:25:55 PM	PHl3 MFC set to  0.000000
10/29/2011	12:25:55 PM	SiCl4 MFC set to  0.000000
10/29/2011	12:25:55 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	12:25:55 PM	Tube furnace set to 0
10/29/2011	12:25:56 PM	Helium valve closed
10/29/2011	12:25:56 PM	BCl3 valve closed
10/29/2011	12:25:56 PM	PH3 valve closed
10/29/2011	12:25:56 PM	SiCl4 pre valve closed
10/29/2011	12:25:56 PM	SiCl4 post valve closed
10/29/2011	12:25:56 PM	Main Vac valve closed
10/29/2011	12:25:56 PM	Bypass valve closed
10/29/2011	12:25:56 PM	H2 valve opened
10/29/2011	12:25:56 PM	Bubbler valve opened
10/29/2011	12:25:56 PM	Helium MFC set to  0.000000
10/29/2011	12:25:56 PM	H2 MFC set to  500.000000
10/29/2011	12:25:56 PM	BCl3 MFC set to  0.000000
10/29/2011	12:25:56 PM	PHl3 MFC set to  0.000000
10/29/2011	12:25:56 PM	SiCl4 MFC set to  0.000000
10/29/2011	12:25:56 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	12:25:56 PM	Tube furnace set to 1050
10/29/2011	12:45:56 PM	Helium valve closed
10/29/2011	12:45:56 PM	PH3 valve closed
10/29/2011	12:45:56 PM	Main Vac valve closed
10/29/2011	12:45:56 PM	Bypass valve closed
10/29/2011	12:45:56 PM	H2 valve opened
10/29/2011	12:45:56 PM	BCl3 valve opened
10/29/2011	12:45:56 PM	SiCl4 pre valve opened
10/29/2011	12:45:56 PM	SiCl4 post valve opened
10/29/2011	12:45:56 PM	Bubbler valve opened
10/29/2011	12:45:56 PM	Helium MFC set to  0.000000
10/29/2011	12:45:56 PM	H2 MFC set to  500.000000
10/29/2011	12:45:56 PM	BCl3 MFC set to  2.500000
10/29/2011	12:45:56 PM	PHl3 MFC set to  0.000000
10/29/2011	12:45:56 PM	SiCl4 MFC set to  50.000000
10/29/2011	12:45:56 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	12:45:57 PM	Tube furnace set to 1050
10/29/2011	1:00:57 PM	Helium valve closed
10/29/2011	1:00:57 PM	BCl3 valve closed
10/29/2011	1:00:57 PM	PH3 valve closed
10/29/2011	1:00:57 PM	SiCl4 pre valve closed
10/29/2011	1:00:57 PM	SiCl4 post valve closed
10/29/2011	1:00:57 PM	Main Vac valve closed
10/29/2011	1:00:57 PM	Bypass valve closed
10/29/2011	1:00:57 PM	H2 valve opened
10/29/2011	1:00:57 PM	Bubbler valve opened
10/29/2011	1:00:57 PM	Helium MFC set to  0.000000
10/29/2011	1:00:57 PM	H2 MFC set to  500.000000
10/29/2011	1:00:57 PM	BCl3 MFC set to  0.000000
10/29/2011	1:00:57 PM	PHl3 MFC set to  0.000000
10/29/2011	1:00:57 PM	SiCl4 MFC set to  0.000000
10/29/2011	1:00:57 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	1:00:57 PM	Tube furnace set to 750
10/29/2011	1:05:57 PM	H2 valve closed
10/29/2011	1:05:57 PM	BCl3 valve closed
10/29/2011	1:05:57 PM	PH3 valve closed
10/29/2011	1:05:57 PM	SiCl4 pre valve closed
10/29/2011	1:05:57 PM	SiCl4 post valve closed
10/29/2011	1:05:57 PM	Main Vac valve closed
10/29/2011	1:05:57 PM	Bypass valve closed
10/29/2011	1:05:57 PM	Helium valve opened
10/29/2011	1:05:57 PM	Bubbler valve opened
10/29/2011	1:05:57 PM	Helium MFC set to  500.000000
10/29/2011	1:05:57 PM	H2 MFC set to  0.000000
10/29/2011	1:05:57 PM	BCl3 MFC set to  0.000000
10/29/2011	1:05:57 PM	PHl3 MFC set to  0.000000
10/29/2011	1:05:57 PM	SiCl4 MFC set to  0.000000
10/29/2011	1:05:57 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	1:05:57 PM	Tube furnace set to 0
10/29/2011	1:22:10 PM	Helium valve closed
10/29/2011	1:22:10 PM	H2 valve closed
10/29/2011	1:22:10 PM	BCl3 valve closed
10/29/2011	1:22:10 PM	PH3 valve closed
10/29/2011	1:22:10 PM	SiCl4 pre valve closed
10/29/2011	1:22:10 PM	SiCl4 post valve closed
10/29/2011	1:22:10 PM	Main Vac valve closed
10/29/2011	1:22:10 PM	Bypass valve closed
10/29/2011	1:22:10 PM	Bubbler valve closed
10/29/2011	1:22:10 PM	Helium MFC set to  0.000000
10/29/2011	1:22:10 PM	H2 MFC set to  0.000000
10/29/2011	1:22:10 PM	BCl3 MFC set to  0.000000
10/29/2011	1:22:10 PM	PHl3 MFC set to  0.000000
10/29/2011	1:22:10 PM	SiCl4 MFC set to  0.000000
10/29/2011	1:22:10 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	1:22:10 PM	Tube furnace set to 0
10/29/2011	1:22:11 PM	Run finished at 1:22 PM
10/29/2011	1:27:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/29/2011	1:27:07 PM	Recipe started at 1:27 PM
10/29/2011	1:27:07 PM	Helium valve closed
10/29/2011	1:27:07 PM	H2 valve closed
10/29/2011	1:27:07 PM	BCl3 valve closed
10/29/2011	1:27:07 PM	PH3 valve closed
10/29/2011	1:27:07 PM	SiCl4 pre valve closed
10/29/2011	1:27:07 PM	SiCl4 post valve closed
10/29/2011	1:27:07 PM	Main Vac valve closed
10/29/2011	1:27:07 PM	Bubbler valve closed
10/29/2011	1:27:07 PM	Bypass valve opened
10/29/2011	1:27:07 PM	Helium MFC set to  0.000000
10/29/2011	1:27:07 PM	H2 MFC set to  0.000000
10/29/2011	1:27:07 PM	BCl3 MFC set to  0.000000
10/29/2011	1:27:07 PM	PHl3 MFC set to  0.000000
10/29/2011	1:27:07 PM	SiCl4 MFC set to  0.000000
10/29/2011	1:27:07 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	1:27:07 PM	Tube furnace set to 0
10/29/2011	1:28:09 PM	Helium valve closed
10/29/2011	1:28:09 PM	H2 valve closed
10/29/2011	1:28:09 PM	BCl3 valve closed
10/29/2011	1:28:09 PM	PH3 valve closed
10/29/2011	1:28:09 PM	SiCl4 pre valve closed
10/29/2011	1:28:09 PM	SiCl4 post valve closed
10/29/2011	1:28:09 PM	Main Vac valve closed
10/29/2011	1:28:09 PM	Bubbler valve closed
10/29/2011	1:28:09 PM	Bypass valve opened
10/29/2011	1:28:09 PM	Helium MFC set to  0.000000
10/29/2011	1:28:09 PM	H2 MFC set to  0.000000
10/29/2011	1:28:09 PM	BCl3 MFC set to  0.000000
10/29/2011	1:28:09 PM	PHl3 MFC set to  0.000000
10/29/2011	1:28:09 PM	SiCl4 MFC set to  0.000000
10/29/2011	1:28:09 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	1:28:10 PM	Tube furnace set to 0
10/29/2011	1:29:10 PM	Helium valve closed
10/29/2011	1:29:10 PM	H2 valve closed
10/29/2011	1:29:10 PM	BCl3 valve closed
10/29/2011	1:29:10 PM	PH3 valve closed
10/29/2011	1:29:10 PM	SiCl4 pre valve closed
10/29/2011	1:29:10 PM	SiCl4 post valve closed
10/29/2011	1:29:10 PM	Bypass valve closed
10/29/2011	1:29:10 PM	Bubbler valve closed
10/29/2011	1:29:10 PM	Main Vac valve opened
10/29/2011	1:29:10 PM	Helium MFC set to  0.000000
10/29/2011	1:29:10 PM	H2 MFC set to  0.000000
10/29/2011	1:29:10 PM	BCl3 MFC set to  0.000000
10/29/2011	1:29:10 PM	PHl3 MFC set to  0.000000
10/29/2011	1:29:10 PM	SiCl4 MFC set to  0.000000
10/29/2011	1:29:10 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	1:29:10 PM	Tube furnace set to 0
10/29/2011	1:29:11 PM	Run finished at 1:29 PM
10/29/2011	1:29:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/29/2011	1:33:17 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/29/2011	1:33:18 PM	Recipe started at 1:33 PM
10/29/2011	1:33:18 PM	Helium valve closed
10/29/2011	1:33:18 PM	H2 valve closed
10/29/2011	1:33:18 PM	BCl3 valve closed
10/29/2011	1:33:18 PM	PH3 valve closed
10/29/2011	1:33:18 PM	SiCl4 pre valve closed
10/29/2011	1:33:18 PM	SiCl4 post valve closed
10/29/2011	1:33:18 PM	Main Vac valve closed
10/29/2011	1:33:18 PM	Bypass valve closed
10/29/2011	1:33:18 PM	Bubbler valve closed
10/29/2011	1:33:18 PM	Helium MFC set to  0.000000
10/29/2011	1:33:18 PM	H2 MFC set to  0.000000
10/29/2011	1:33:18 PM	BCl3 MFC set to  0.000000
10/29/2011	1:33:18 PM	PHl3 MFC set to  0.000000
10/29/2011	1:33:18 PM	SiCl4 MFC set to  0.000000
10/29/2011	1:33:18 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	1:33:18 PM	Tube furnace set to 0
10/29/2011	1:33:21 PM	H2 valve closed
10/29/2011	1:33:21 PM	BCl3 valve closed
10/29/2011	1:33:21 PM	PH3 valve closed
10/29/2011	1:33:21 PM	SiCl4 pre valve closed
10/29/2011	1:33:21 PM	SiCl4 post valve closed
10/29/2011	1:33:21 PM	Main Vac valve closed
10/29/2011	1:33:21 PM	Bypass valve closed
10/29/2011	1:33:21 PM	Bubbler valve closed
10/29/2011	1:33:21 PM	Helium valve opened
10/29/2011	1:33:21 PM	Helium MFC set to  500.000000
10/29/2011	1:33:21 PM	H2 MFC set to  0.000000
10/29/2011	1:33:21 PM	BCl3 MFC set to  0.000000
10/29/2011	1:33:21 PM	PHl3 MFC set to  0.000000
10/29/2011	1:33:21 PM	SiCl4 MFC set to  0.000000
10/29/2011	1:33:21 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	1:33:21 PM	Tube furnace set to 0
10/29/2011	1:34:25 PM	Helium valve closed
10/29/2011	1:34:25 PM	H2 valve closed
10/29/2011	1:34:25 PM	BCl3 valve closed
10/29/2011	1:34:25 PM	PH3 valve closed
10/29/2011	1:34:25 PM	SiCl4 pre valve closed
10/29/2011	1:34:25 PM	SiCl4 post valve closed
10/29/2011	1:34:25 PM	Main Vac valve closed
10/29/2011	1:34:25 PM	Bypass valve closed
10/29/2011	1:34:25 PM	Bubbler valve closed
10/29/2011	1:34:25 PM	Helium MFC set to  0.000000
10/29/2011	1:34:25 PM	H2 MFC set to  0.000000
10/29/2011	1:34:25 PM	BCl3 MFC set to  0.000000
10/29/2011	1:34:25 PM	PHl3 MFC set to  0.000000
10/29/2011	1:34:25 PM	SiCl4 MFC set to  0.000000
10/29/2011	1:34:25 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	1:34:25 PM	Tube furnace set to 0
10/29/2011	1:34:26 PM	Run finished at 1:34 PM
10/29/2011	1:34:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/29/2011	1:36:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/29/2011	1:36:29 PM	Recipe started at 1:36 PM
10/29/2011	1:36:29 PM	Helium valve closed
10/29/2011	1:36:29 PM	H2 valve closed
10/29/2011	1:36:29 PM	BCl3 valve closed
10/29/2011	1:36:29 PM	PH3 valve closed
10/29/2011	1:36:29 PM	SiCl4 pre valve closed
10/29/2011	1:36:29 PM	SiCl4 post valve closed
10/29/2011	1:36:29 PM	Main Vac valve closed
10/29/2011	1:36:29 PM	Bubbler valve closed
10/29/2011	1:36:29 PM	Bypass valve opened
10/29/2011	1:36:29 PM	Helium MFC set to  0.000000
10/29/2011	1:36:29 PM	H2 MFC set to  0.000000
10/29/2011	1:36:29 PM	BCl3 MFC set to  0.000000
10/29/2011	1:36:29 PM	PHl3 MFC set to  0.000000
10/29/2011	1:36:29 PM	SiCl4 MFC set to  0.000000
10/29/2011	1:36:29 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	1:36:30 PM	Tube furnace set to 0
10/29/2011	1:37:29 PM	Helium valve closed
10/29/2011	1:37:29 PM	H2 valve closed
10/29/2011	1:37:29 PM	BCl3 valve closed
10/29/2011	1:37:29 PM	PH3 valve closed
10/29/2011	1:37:29 PM	SiCl4 pre valve closed
10/29/2011	1:37:29 PM	SiCl4 post valve closed
10/29/2011	1:37:29 PM	Main Vac valve closed
10/29/2011	1:37:29 PM	Bubbler valve closed
10/29/2011	1:37:29 PM	Bypass valve opened
10/29/2011	1:37:29 PM	Helium MFC set to  0.000000
10/29/2011	1:37:29 PM	H2 MFC set to  0.000000
10/29/2011	1:37:29 PM	BCl3 MFC set to  0.000000
10/29/2011	1:37:29 PM	PHl3 MFC set to  0.000000
10/29/2011	1:37:29 PM	SiCl4 MFC set to  0.000000
10/29/2011	1:37:29 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	1:37:29 PM	Tube furnace set to 0
10/29/2011	1:37:38 PM	Helium valve closed
10/29/2011	1:37:38 PM	H2 valve closed
10/29/2011	1:37:38 PM	BCl3 valve closed
10/29/2011	1:37:38 PM	PH3 valve closed
10/29/2011	1:37:38 PM	SiCl4 pre valve closed
10/29/2011	1:37:38 PM	SiCl4 post valve closed
10/29/2011	1:37:38 PM	Bypass valve closed
10/29/2011	1:37:38 PM	Bubbler valve closed
10/29/2011	1:37:38 PM	Main Vac valve opened
10/29/2011	1:37:38 PM	Helium MFC set to  0.000000
10/29/2011	1:37:38 PM	H2 MFC set to  0.000000
10/29/2011	1:37:38 PM	BCl3 MFC set to  0.000000
10/29/2011	1:37:38 PM	PHl3 MFC set to  0.000000
10/29/2011	1:37:38 PM	SiCl4 MFC set to  0.000000
10/29/2011	1:37:38 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	1:37:38 PM	Tube furnace set to 0
10/29/2011	1:37:39 PM	Run finished at 1:37 PM
10/29/2011	1:37:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/29/2011	1:40:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/29/2011	1:40:52 PM	Recipe started at 1:40 PM
10/29/2011	1:40:52 PM	Helium valve closed
10/29/2011	1:40:52 PM	H2 valve closed
10/29/2011	1:40:52 PM	BCl3 valve closed
10/29/2011	1:40:52 PM	PH3 valve closed
10/29/2011	1:40:52 PM	SiCl4 pre valve closed
10/29/2011	1:40:52 PM	SiCl4 post valve closed
10/29/2011	1:40:52 PM	Main Vac valve closed
10/29/2011	1:40:52 PM	Bubbler valve closed
10/29/2011	1:40:52 PM	Bypass valve opened
10/29/2011	1:40:52 PM	Helium MFC set to  0.000000
10/29/2011	1:40:52 PM	H2 MFC set to  0.000000
10/29/2011	1:40:52 PM	BCl3 MFC set to  0.000000
10/29/2011	1:40:52 PM	PHl3 MFC set to  0.000000
10/29/2011	1:40:52 PM	SiCl4 MFC set to  0.000000
10/29/2011	1:40:52 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	1:40:52 PM	Tube furnace set to 0
10/29/2011	1:40:52 PM	Helium valve closed
10/29/2011	1:40:52 PM	H2 valve closed
10/29/2011	1:40:52 PM	BCl3 valve closed
10/29/2011	1:40:52 PM	PH3 valve closed
10/29/2011	1:40:52 PM	SiCl4 pre valve closed
10/29/2011	1:40:52 PM	SiCl4 post valve closed
10/29/2011	1:40:52 PM	Main Vac valve closed
10/29/2011	1:40:52 PM	Bubbler valve closed
10/29/2011	1:40:52 PM	Bypass valve opened
10/29/2011	1:40:52 PM	Helium MFC set to  0.000000
10/29/2011	1:40:52 PM	H2 MFC set to  0.000000
10/29/2011	1:40:52 PM	BCl3 MFC set to  0.000000
10/29/2011	1:40:52 PM	PHl3 MFC set to  0.000000
10/29/2011	1:40:52 PM	SiCl4 MFC set to  0.000000
10/29/2011	1:40:52 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	1:40:53 PM	Tube furnace set to 0
10/29/2011	1:40:53 PM	Helium valve closed
10/29/2011	1:40:53 PM	H2 valve closed
10/29/2011	1:40:53 PM	BCl3 valve closed
10/29/2011	1:40:53 PM	PH3 valve closed
10/29/2011	1:40:53 PM	SiCl4 pre valve closed
10/29/2011	1:40:53 PM	SiCl4 post valve closed
10/29/2011	1:40:53 PM	Bypass valve closed
10/29/2011	1:40:53 PM	Bubbler valve closed
10/29/2011	1:40:53 PM	Main Vac valve opened
10/29/2011	1:40:53 PM	Helium MFC set to  0.000000
10/29/2011	1:40:53 PM	H2 MFC set to  0.000000
10/29/2011	1:40:53 PM	BCl3 MFC set to  0.000000
10/29/2011	1:40:53 PM	PHl3 MFC set to  0.000000
10/29/2011	1:40:53 PM	SiCl4 MFC set to  0.000000
10/29/2011	1:40:53 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	1:40:54 PM	Tube furnace set to 0
10/29/2011	1:41:00 PM	H2 valve closed
10/29/2011	1:41:00 PM	BCl3 valve closed
10/29/2011	1:41:00 PM	PH3 valve closed
10/29/2011	1:41:00 PM	SiCl4 pre valve closed
10/29/2011	1:41:00 PM	SiCl4 post valve closed
10/29/2011	1:41:00 PM	Bypass valve closed
10/29/2011	1:41:00 PM	Bubbler valve closed
10/29/2011	1:41:00 PM	Helium valve opened
10/29/2011	1:41:00 PM	Main Vac valve opened
10/29/2011	1:41:00 PM	Helium MFC set to  20.000000
10/29/2011	1:41:00 PM	H2 MFC set to  0.000000
10/29/2011	1:41:00 PM	BCl3 MFC set to  0.000000
10/29/2011	1:41:00 PM	PHl3 MFC set to  0.000000
10/29/2011	1:41:00 PM	SiCl4 MFC set to  0.000000
10/29/2011	1:41:00 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	1:41:00 PM	Tube furnace set to 0
10/29/2011	1:41:30 PM	Helium valve closed
10/29/2011	1:41:30 PM	H2 valve closed
10/29/2011	1:41:30 PM	BCl3 valve closed
10/29/2011	1:41:30 PM	PH3 valve closed
10/29/2011	1:41:30 PM	SiCl4 pre valve closed
10/29/2011	1:41:30 PM	SiCl4 post valve closed
10/29/2011	1:41:30 PM	Bypass valve closed
10/29/2011	1:41:30 PM	Bubbler valve closed
10/29/2011	1:41:30 PM	Main Vac valve opened
10/29/2011	1:41:30 PM	Helium MFC set to  0.000000
10/29/2011	1:41:30 PM	H2 MFC set to  0.000000
10/29/2011	1:41:30 PM	BCl3 MFC set to  0.000000
10/29/2011	1:41:30 PM	PHl3 MFC set to  0.000000
10/29/2011	1:41:30 PM	SiCl4 MFC set to  0.000000
10/29/2011	1:41:30 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	1:41:30 PM	Tube furnace set to 0
10/29/2011	1:42:00 PM	H2 valve closed
10/29/2011	1:42:00 PM	BCl3 valve closed
10/29/2011	1:42:00 PM	PH3 valve closed
10/29/2011	1:42:00 PM	SiCl4 pre valve closed
10/29/2011	1:42:00 PM	SiCl4 post valve closed
10/29/2011	1:42:00 PM	Bypass valve closed
10/29/2011	1:42:00 PM	Bubbler valve closed
10/29/2011	1:42:00 PM	Helium valve opened
10/29/2011	1:42:00 PM	Main Vac valve opened
10/29/2011	1:42:00 PM	Helium MFC set to  20.000000
10/29/2011	1:42:00 PM	H2 MFC set to  0.000000
10/29/2011	1:42:00 PM	BCl3 MFC set to  0.000000
10/29/2011	1:42:00 PM	PHl3 MFC set to  0.000000
10/29/2011	1:42:00 PM	SiCl4 MFC set to  0.000000
10/29/2011	1:42:00 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	1:42:00 PM	Tube furnace set to 0
10/29/2011	1:42:30 PM	Helium valve closed
10/29/2011	1:42:30 PM	H2 valve closed
10/29/2011	1:42:30 PM	BCl3 valve closed
10/29/2011	1:42:30 PM	PH3 valve closed
10/29/2011	1:42:30 PM	SiCl4 pre valve closed
10/29/2011	1:42:30 PM	SiCl4 post valve closed
10/29/2011	1:42:30 PM	Bypass valve closed
10/29/2011	1:42:30 PM	Bubbler valve closed
10/29/2011	1:42:30 PM	Main Vac valve opened
10/29/2011	1:42:30 PM	Helium MFC set to  0.000000
10/29/2011	1:42:30 PM	H2 MFC set to  0.000000
10/29/2011	1:42:30 PM	BCl3 MFC set to  0.000000
10/29/2011	1:42:30 PM	PHl3 MFC set to  0.000000
10/29/2011	1:42:30 PM	SiCl4 MFC set to  0.000000
10/29/2011	1:42:30 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	1:42:31 PM	Tube furnace set to 0
10/29/2011	1:43:01 PM	H2 valve closed
10/29/2011	1:43:01 PM	BCl3 valve closed
10/29/2011	1:43:01 PM	PH3 valve closed
10/29/2011	1:43:01 PM	SiCl4 pre valve closed
10/29/2011	1:43:01 PM	SiCl4 post valve closed
10/29/2011	1:43:01 PM	Bypass valve closed
10/29/2011	1:43:01 PM	Bubbler valve closed
10/29/2011	1:43:01 PM	Helium valve opened
10/29/2011	1:43:01 PM	Main Vac valve opened
10/29/2011	1:43:01 PM	Helium MFC set to  20.000000
10/29/2011	1:43:01 PM	H2 MFC set to  0.000000
10/29/2011	1:43:01 PM	BCl3 MFC set to  0.000000
10/29/2011	1:43:01 PM	PHl3 MFC set to  0.000000
10/29/2011	1:43:01 PM	SiCl4 MFC set to  0.000000
10/29/2011	1:43:01 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	1:43:01 PM	Tube furnace set to 0
10/29/2011	1:43:31 PM	Helium valve closed
10/29/2011	1:43:31 PM	H2 valve closed
10/29/2011	1:43:31 PM	BCl3 valve closed
10/29/2011	1:43:31 PM	PH3 valve closed
10/29/2011	1:43:31 PM	SiCl4 pre valve closed
10/29/2011	1:43:31 PM	SiCl4 post valve closed
10/29/2011	1:43:31 PM	Bypass valve closed
10/29/2011	1:43:31 PM	Bubbler valve closed
10/29/2011	1:43:31 PM	Main Vac valve opened
10/29/2011	1:43:31 PM	Helium MFC set to  0.000000
10/29/2011	1:43:31 PM	H2 MFC set to  0.000000
10/29/2011	1:43:31 PM	BCl3 MFC set to  0.000000
10/29/2011	1:43:31 PM	PHl3 MFC set to  0.000000
10/29/2011	1:43:31 PM	SiCl4 MFC set to  0.000000
10/29/2011	1:43:31 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	1:43:31 PM	Tube furnace set to 0
10/29/2011	1:44:01 PM	H2 valve closed
10/29/2011	1:44:01 PM	BCl3 valve closed
10/29/2011	1:44:01 PM	PH3 valve closed
10/29/2011	1:44:01 PM	SiCl4 pre valve closed
10/29/2011	1:44:01 PM	SiCl4 post valve closed
10/29/2011	1:44:01 PM	Bypass valve closed
10/29/2011	1:44:01 PM	Bubbler valve closed
10/29/2011	1:44:01 PM	Helium valve opened
10/29/2011	1:44:01 PM	Main Vac valve opened
10/29/2011	1:44:01 PM	Helium MFC set to  20.000000
10/29/2011	1:44:01 PM	H2 MFC set to  0.000000
10/29/2011	1:44:01 PM	BCl3 MFC set to  0.000000
10/29/2011	1:44:01 PM	PHl3 MFC set to  0.000000
10/29/2011	1:44:01 PM	SiCl4 MFC set to  0.000000
10/29/2011	1:44:01 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	1:44:01 PM	Tube furnace set to 0
10/29/2011	1:44:31 PM	Helium valve closed
10/29/2011	1:44:31 PM	H2 valve closed
10/29/2011	1:44:31 PM	BCl3 valve closed
10/29/2011	1:44:31 PM	PH3 valve closed
10/29/2011	1:44:31 PM	SiCl4 pre valve closed
10/29/2011	1:44:31 PM	SiCl4 post valve closed
10/29/2011	1:44:31 PM	Bypass valve closed
10/29/2011	1:44:31 PM	Bubbler valve closed
10/29/2011	1:44:31 PM	Main Vac valve opened
10/29/2011	1:44:31 PM	Helium MFC set to  0.000000
10/29/2011	1:44:31 PM	H2 MFC set to  0.000000
10/29/2011	1:44:31 PM	BCl3 MFC set to  0.000000
10/29/2011	1:44:31 PM	PHl3 MFC set to  0.000000
10/29/2011	1:44:31 PM	SiCl4 MFC set to  0.000000
10/29/2011	1:44:31 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	1:44:31 PM	Tube furnace set to 0
10/29/2011	1:45:01 PM	H2 valve closed
10/29/2011	1:45:01 PM	BCl3 valve closed
10/29/2011	1:45:01 PM	PH3 valve closed
10/29/2011	1:45:01 PM	SiCl4 pre valve closed
10/29/2011	1:45:01 PM	SiCl4 post valve closed
10/29/2011	1:45:01 PM	Bypass valve closed
10/29/2011	1:45:02 PM	Bubbler valve closed
10/29/2011	1:45:02 PM	Helium valve opened
10/29/2011	1:45:02 PM	Main Vac valve opened
10/29/2011	1:45:02 PM	Helium MFC set to  20.000000
10/29/2011	1:45:02 PM	H2 MFC set to  0.000000
10/29/2011	1:45:02 PM	BCl3 MFC set to  0.000000
10/29/2011	1:45:02 PM	PHl3 MFC set to  0.000000
10/29/2011	1:45:02 PM	SiCl4 MFC set to  0.000000
10/29/2011	1:45:02 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	1:45:02 PM	Tube furnace set to 0
10/29/2011	1:45:32 PM	Helium valve closed
10/29/2011	1:45:32 PM	H2 valve closed
10/29/2011	1:45:32 PM	BCl3 valve closed
10/29/2011	1:45:32 PM	PH3 valve closed
10/29/2011	1:45:32 PM	SiCl4 pre valve closed
10/29/2011	1:45:32 PM	SiCl4 post valve closed
10/29/2011	1:45:32 PM	Bypass valve closed
10/29/2011	1:45:32 PM	Bubbler valve closed
10/29/2011	1:45:32 PM	Main Vac valve opened
10/29/2011	1:45:32 PM	Helium MFC set to  0.000000
10/29/2011	1:45:32 PM	H2 MFC set to  0.000000
10/29/2011	1:45:32 PM	BCl3 MFC set to  0.000000
10/29/2011	1:45:32 PM	PHl3 MFC set to  0.000000
10/29/2011	1:45:32 PM	SiCl4 MFC set to  0.000000
10/29/2011	1:45:32 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	1:45:32 PM	Tube furnace set to 0
10/29/2011	1:46:02 PM	H2 valve closed
10/29/2011	1:46:02 PM	BCl3 valve closed
10/29/2011	1:46:02 PM	PH3 valve closed
10/29/2011	1:46:02 PM	SiCl4 pre valve closed
10/29/2011	1:46:02 PM	SiCl4 post valve closed
10/29/2011	1:46:02 PM	Bypass valve closed
10/29/2011	1:46:02 PM	Bubbler valve closed
10/29/2011	1:46:02 PM	Helium valve opened
10/29/2011	1:46:02 PM	Main Vac valve opened
10/29/2011	1:46:02 PM	Helium MFC set to  20.000000
10/29/2011	1:46:02 PM	H2 MFC set to  0.000000
10/29/2011	1:46:02 PM	BCl3 MFC set to  0.000000
10/29/2011	1:46:02 PM	PHl3 MFC set to  0.000000
10/29/2011	1:46:02 PM	SiCl4 MFC set to  0.000000
10/29/2011	1:46:02 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	1:46:02 PM	Tube furnace set to 0
10/29/2011	1:46:32 PM	Helium valve closed
10/29/2011	1:46:32 PM	H2 valve closed
10/29/2011	1:46:32 PM	BCl3 valve closed
10/29/2011	1:46:32 PM	PH3 valve closed
10/29/2011	1:46:32 PM	SiCl4 pre valve closed
10/29/2011	1:46:32 PM	SiCl4 post valve closed
10/29/2011	1:46:32 PM	Bypass valve closed
10/29/2011	1:46:32 PM	Bubbler valve closed
10/29/2011	1:46:32 PM	Main Vac valve opened
10/29/2011	1:46:32 PM	Helium MFC set to  0.000000
10/29/2011	1:46:32 PM	H2 MFC set to  0.000000
10/29/2011	1:46:32 PM	BCl3 MFC set to  0.000000
10/29/2011	1:46:32 PM	PHl3 MFC set to  0.000000
10/29/2011	1:46:32 PM	SiCl4 MFC set to  0.000000
10/29/2011	1:46:32 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	1:46:32 PM	Tube furnace set to 0
10/29/2011	1:47:02 PM	H2 valve closed
10/29/2011	1:47:02 PM	BCl3 valve closed
10/29/2011	1:47:02 PM	PH3 valve closed
10/29/2011	1:47:02 PM	SiCl4 pre valve closed
10/29/2011	1:47:02 PM	SiCl4 post valve closed
10/29/2011	1:47:02 PM	Bypass valve closed
10/29/2011	1:47:02 PM	Bubbler valve closed
10/29/2011	1:47:02 PM	Helium valve opened
10/29/2011	1:47:02 PM	Main Vac valve opened
10/29/2011	1:47:02 PM	Helium MFC set to  20.000000
10/29/2011	1:47:02 PM	H2 MFC set to  0.000000
10/29/2011	1:47:02 PM	BCl3 MFC set to  0.000000
10/29/2011	1:47:02 PM	PHl3 MFC set to  0.000000
10/29/2011	1:47:02 PM	SiCl4 MFC set to  0.000000
10/29/2011	1:47:02 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	1:47:03 PM	Tube furnace set to 0
10/29/2011	1:47:33 PM	Helium valve closed
10/29/2011	1:47:33 PM	H2 valve closed
10/29/2011	1:47:33 PM	BCl3 valve closed
10/29/2011	1:47:33 PM	PH3 valve closed
10/29/2011	1:47:33 PM	SiCl4 pre valve closed
10/29/2011	1:47:33 PM	SiCl4 post valve closed
10/29/2011	1:47:33 PM	Bypass valve closed
10/29/2011	1:47:33 PM	Bubbler valve closed
10/29/2011	1:47:33 PM	Main Vac valve opened
10/29/2011	1:47:33 PM	Helium MFC set to  0.000000
10/29/2011	1:47:33 PM	H2 MFC set to  0.000000
10/29/2011	1:47:33 PM	BCl3 MFC set to  0.000000
10/29/2011	1:47:33 PM	PHl3 MFC set to  0.000000
10/29/2011	1:47:33 PM	SiCl4 MFC set to  0.000000
10/29/2011	1:47:33 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	1:47:33 PM	Tube furnace set to 0
10/29/2011	1:48:03 PM	H2 valve closed
10/29/2011	1:48:03 PM	BCl3 valve closed
10/29/2011	1:48:03 PM	PH3 valve closed
10/29/2011	1:48:03 PM	SiCl4 pre valve closed
10/29/2011	1:48:03 PM	SiCl4 post valve closed
10/29/2011	1:48:03 PM	Bypass valve closed
10/29/2011	1:48:03 PM	Bubbler valve closed
10/29/2011	1:48:03 PM	Helium valve opened
10/29/2011	1:48:03 PM	Main Vac valve opened
10/29/2011	1:48:03 PM	Helium MFC set to  20.000000
10/29/2011	1:48:03 PM	H2 MFC set to  0.000000
10/29/2011	1:48:03 PM	BCl3 MFC set to  0.000000
10/29/2011	1:48:03 PM	PHl3 MFC set to  0.000000
10/29/2011	1:48:03 PM	SiCl4 MFC set to  0.000000
10/29/2011	1:48:03 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	1:48:03 PM	Tube furnace set to 0
10/29/2011	1:48:33 PM	Helium valve closed
10/29/2011	1:48:33 PM	H2 valve closed
10/29/2011	1:48:33 PM	BCl3 valve closed
10/29/2011	1:48:33 PM	PH3 valve closed
10/29/2011	1:48:33 PM	SiCl4 pre valve closed
10/29/2011	1:48:33 PM	SiCl4 post valve closed
10/29/2011	1:48:33 PM	Bypass valve closed
10/29/2011	1:48:33 PM	Bubbler valve closed
10/29/2011	1:48:33 PM	Main Vac valve opened
10/29/2011	1:48:33 PM	Helium MFC set to  0.000000
10/29/2011	1:48:33 PM	H2 MFC set to  0.000000
10/29/2011	1:48:33 PM	BCl3 MFC set to  0.000000
10/29/2011	1:48:33 PM	PHl3 MFC set to  0.000000
10/29/2011	1:48:33 PM	SiCl4 MFC set to  0.000000
10/29/2011	1:48:33 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	1:48:33 PM	Tube furnace set to 0
10/29/2011	1:49:03 PM	H2 valve closed
10/29/2011	1:49:03 PM	BCl3 valve closed
10/29/2011	1:49:03 PM	PH3 valve closed
10/29/2011	1:49:03 PM	SiCl4 pre valve closed
10/29/2011	1:49:03 PM	SiCl4 post valve closed
10/29/2011	1:49:03 PM	Bypass valve closed
10/29/2011	1:49:03 PM	Bubbler valve closed
10/29/2011	1:49:03 PM	Helium valve opened
10/29/2011	1:49:03 PM	Main Vac valve opened
10/29/2011	1:49:03 PM	Helium MFC set to  20.000000
10/29/2011	1:49:03 PM	H2 MFC set to  0.000000
10/29/2011	1:49:03 PM	BCl3 MFC set to  0.000000
10/29/2011	1:49:03 PM	PHl3 MFC set to  0.000000
10/29/2011	1:49:03 PM	SiCl4 MFC set to  0.000000
10/29/2011	1:49:03 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	1:49:03 PM	Tube furnace set to 0
10/29/2011	1:49:33 PM	Helium valve closed
10/29/2011	1:49:33 PM	H2 valve closed
10/29/2011	1:49:33 PM	BCl3 valve closed
10/29/2011	1:49:33 PM	PH3 valve closed
10/29/2011	1:49:33 PM	SiCl4 pre valve closed
10/29/2011	1:49:33 PM	SiCl4 post valve closed
10/29/2011	1:49:33 PM	Bypass valve closed
10/29/2011	1:49:33 PM	Bubbler valve closed
10/29/2011	1:49:33 PM	Main Vac valve opened
10/29/2011	1:49:33 PM	Helium MFC set to  0.000000
10/29/2011	1:49:33 PM	H2 MFC set to  0.000000
10/29/2011	1:49:33 PM	BCl3 MFC set to  0.000000
10/29/2011	1:49:33 PM	PHl3 MFC set to  0.000000
10/29/2011	1:49:33 PM	SiCl4 MFC set to  0.000000
10/29/2011	1:49:33 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	1:49:34 PM	Tube furnace set to 0
10/29/2011	1:50:04 PM	H2 valve closed
10/29/2011	1:50:04 PM	BCl3 valve closed
10/29/2011	1:50:04 PM	PH3 valve closed
10/29/2011	1:50:04 PM	SiCl4 pre valve closed
10/29/2011	1:50:04 PM	SiCl4 post valve closed
10/29/2011	1:50:04 PM	Bypass valve closed
10/29/2011	1:50:04 PM	Bubbler valve closed
10/29/2011	1:50:04 PM	Helium valve opened
10/29/2011	1:50:04 PM	Main Vac valve opened
10/29/2011	1:50:04 PM	Helium MFC set to  20.000000
10/29/2011	1:50:04 PM	H2 MFC set to  0.000000
10/29/2011	1:50:04 PM	BCl3 MFC set to  0.000000
10/29/2011	1:50:04 PM	PHl3 MFC set to  0.000000
10/29/2011	1:50:04 PM	SiCl4 MFC set to  0.000000
10/29/2011	1:50:04 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	1:50:04 PM	Tube furnace set to 0
10/29/2011	1:50:34 PM	Helium valve closed
10/29/2011	1:50:34 PM	H2 valve closed
10/29/2011	1:50:34 PM	BCl3 valve closed
10/29/2011	1:50:34 PM	PH3 valve closed
10/29/2011	1:50:34 PM	SiCl4 pre valve closed
10/29/2011	1:50:34 PM	SiCl4 post valve closed
10/29/2011	1:50:34 PM	Bypass valve closed
10/29/2011	1:50:34 PM	Bubbler valve closed
10/29/2011	1:50:34 PM	Main Vac valve opened
10/29/2011	1:50:34 PM	Helium MFC set to  0.000000
10/29/2011	1:50:34 PM	H2 MFC set to  0.000000
10/29/2011	1:50:34 PM	BCl3 MFC set to  0.000000
10/29/2011	1:50:34 PM	PHl3 MFC set to  0.000000
10/29/2011	1:50:34 PM	SiCl4 MFC set to  0.000000
10/29/2011	1:50:34 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	1:50:34 PM	Tube furnace set to 0
10/29/2011	1:50:35 PM	Run finished at 1:50 PM
10/29/2011	1:50:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/29/2011	1:51:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/29/2011	1:51:44 PM	Recipe started at 1:51 PM
10/29/2011	1:51:44 PM	Helium valve closed
10/29/2011	1:51:44 PM	H2 valve closed
10/29/2011	1:51:44 PM	BCl3 valve closed
10/29/2011	1:51:44 PM	PH3 valve closed
10/29/2011	1:51:44 PM	SiCl4 pre valve closed
10/29/2011	1:51:44 PM	SiCl4 post valve closed
10/29/2011	1:51:44 PM	Main Vac valve closed
10/29/2011	1:51:44 PM	Bubbler valve closed
10/29/2011	1:51:44 PM	Bypass valve opened
10/29/2011	1:51:44 PM	Helium MFC set to  0.000000
10/29/2011	1:51:44 PM	H2 MFC set to  0.000000
10/29/2011	1:51:44 PM	BCl3 MFC set to  0.000000
10/29/2011	1:51:44 PM	PHl3 MFC set to  0.000000
10/29/2011	1:51:44 PM	SiCl4 MFC set to  0.000000
10/29/2011	1:51:44 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	1:51:44 PM	Tube furnace set to 0
10/29/2011	1:51:44 PM	Helium valve closed
10/29/2011	1:51:44 PM	H2 valve closed
10/29/2011	1:51:44 PM	BCl3 valve closed
10/29/2011	1:51:44 PM	PH3 valve closed
10/29/2011	1:51:44 PM	SiCl4 pre valve closed
10/29/2011	1:51:44 PM	SiCl4 post valve closed
10/29/2011	1:51:44 PM	Main Vac valve closed
10/29/2011	1:51:44 PM	Bubbler valve closed
10/29/2011	1:51:44 PM	Bypass valve opened
10/29/2011	1:51:44 PM	Helium MFC set to  0.000000
10/29/2011	1:51:44 PM	H2 MFC set to  0.000000
10/29/2011	1:51:44 PM	BCl3 MFC set to  0.000000
10/29/2011	1:51:44 PM	PHl3 MFC set to  0.000000
10/29/2011	1:51:44 PM	SiCl4 MFC set to  0.000000
10/29/2011	1:51:44 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	1:51:45 PM	Tube furnace set to 0
10/29/2011	1:51:45 PM	Helium valve closed
10/29/2011	1:51:45 PM	H2 valve closed
10/29/2011	1:51:45 PM	BCl3 valve closed
10/29/2011	1:51:45 PM	PH3 valve closed
10/29/2011	1:51:45 PM	SiCl4 pre valve closed
10/29/2011	1:51:45 PM	SiCl4 post valve closed
10/29/2011	1:51:45 PM	Bypass valve closed
10/29/2011	1:51:45 PM	Bubbler valve closed
10/29/2011	1:51:45 PM	Main Vac valve opened
10/29/2011	1:51:45 PM	Helium MFC set to  0.000000
10/29/2011	1:51:45 PM	H2 MFC set to  0.000000
10/29/2011	1:51:45 PM	BCl3 MFC set to  0.000000
10/29/2011	1:51:45 PM	PHl3 MFC set to  0.000000
10/29/2011	1:51:45 PM	SiCl4 MFC set to  0.000000
10/29/2011	1:51:45 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	1:51:45 PM	Tube furnace set to 0
10/29/2011	1:51:52 PM	H2 valve closed
10/29/2011	1:51:52 PM	BCl3 valve closed
10/29/2011	1:51:52 PM	PH3 valve closed
10/29/2011	1:51:52 PM	SiCl4 pre valve closed
10/29/2011	1:51:52 PM	SiCl4 post valve closed
10/29/2011	1:51:52 PM	Bypass valve closed
10/29/2011	1:51:52 PM	Bubbler valve closed
10/29/2011	1:51:52 PM	Helium valve opened
10/29/2011	1:51:52 PM	Main Vac valve opened
10/29/2011	1:51:52 PM	Helium MFC set to  20.000000
10/29/2011	1:51:52 PM	H2 MFC set to  0.000000
10/29/2011	1:51:52 PM	BCl3 MFC set to  0.000000
10/29/2011	1:51:52 PM	PHl3 MFC set to  0.000000
10/29/2011	1:51:52 PM	SiCl4 MFC set to  0.000000
10/29/2011	1:51:52 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	1:51:52 PM	Tube furnace set to 0
10/29/2011	1:52:22 PM	Helium valve closed
10/29/2011	1:52:22 PM	H2 valve closed
10/29/2011	1:52:22 PM	BCl3 valve closed
10/29/2011	1:52:22 PM	PH3 valve closed
10/29/2011	1:52:22 PM	SiCl4 pre valve closed
10/29/2011	1:52:22 PM	SiCl4 post valve closed
10/29/2011	1:52:22 PM	Bypass valve closed
10/29/2011	1:52:22 PM	Bubbler valve closed
10/29/2011	1:52:22 PM	Main Vac valve opened
10/29/2011	1:52:22 PM	Helium MFC set to  0.000000
10/29/2011	1:52:22 PM	H2 MFC set to  0.000000
10/29/2011	1:52:22 PM	BCl3 MFC set to  0.000000
10/29/2011	1:52:22 PM	PHl3 MFC set to  0.000000
10/29/2011	1:52:22 PM	SiCl4 MFC set to  0.000000
10/29/2011	1:52:22 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	1:52:22 PM	Tube furnace set to 0
10/29/2011	1:52:52 PM	H2 valve closed
10/29/2011	1:52:52 PM	BCl3 valve closed
10/29/2011	1:52:52 PM	PH3 valve closed
10/29/2011	1:52:52 PM	SiCl4 pre valve closed
10/29/2011	1:52:52 PM	SiCl4 post valve closed
10/29/2011	1:52:53 PM	Bypass valve closed
10/29/2011	1:52:53 PM	Bubbler valve closed
10/29/2011	1:52:53 PM	Helium valve opened
10/29/2011	1:52:53 PM	Main Vac valve opened
10/29/2011	1:52:53 PM	Helium MFC set to  20.000000
10/29/2011	1:52:53 PM	H2 MFC set to  0.000000
10/29/2011	1:52:53 PM	BCl3 MFC set to  0.000000
10/29/2011	1:52:53 PM	PHl3 MFC set to  0.000000
10/29/2011	1:52:53 PM	SiCl4 MFC set to  0.000000
10/29/2011	1:52:53 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	1:52:53 PM	Tube furnace set to 0
10/29/2011	1:53:23 PM	Helium valve closed
10/29/2011	1:53:23 PM	H2 valve closed
10/29/2011	1:53:23 PM	BCl3 valve closed
10/29/2011	1:53:23 PM	PH3 valve closed
10/29/2011	1:53:23 PM	SiCl4 pre valve closed
10/29/2011	1:53:23 PM	SiCl4 post valve closed
10/29/2011	1:53:23 PM	Bypass valve closed
10/29/2011	1:53:23 PM	Bubbler valve closed
10/29/2011	1:53:23 PM	Main Vac valve opened
10/29/2011	1:53:23 PM	Helium MFC set to  0.000000
10/29/2011	1:53:23 PM	H2 MFC set to  0.000000
10/29/2011	1:53:23 PM	BCl3 MFC set to  0.000000
10/29/2011	1:53:23 PM	PHl3 MFC set to  0.000000
10/29/2011	1:53:23 PM	SiCl4 MFC set to  0.000000
10/29/2011	1:53:23 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	1:53:23 PM	Tube furnace set to 0
10/29/2011	1:53:53 PM	H2 valve closed
10/29/2011	1:53:53 PM	BCl3 valve closed
10/29/2011	1:53:53 PM	PH3 valve closed
10/29/2011	1:53:53 PM	SiCl4 pre valve closed
10/29/2011	1:53:53 PM	SiCl4 post valve closed
10/29/2011	1:53:53 PM	Bypass valve closed
10/29/2011	1:53:53 PM	Bubbler valve closed
10/29/2011	1:53:53 PM	Helium valve opened
10/29/2011	1:53:53 PM	Main Vac valve opened
10/29/2011	1:53:53 PM	Helium MFC set to  20.000000
10/29/2011	1:53:53 PM	H2 MFC set to  0.000000
10/29/2011	1:53:53 PM	BCl3 MFC set to  0.000000
10/29/2011	1:53:53 PM	PHl3 MFC set to  0.000000
10/29/2011	1:53:53 PM	SiCl4 MFC set to  0.000000
10/29/2011	1:53:53 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	1:53:53 PM	Tube furnace set to 0
10/29/2011	1:54:23 PM	Helium valve closed
10/29/2011	1:54:23 PM	H2 valve closed
10/29/2011	1:54:23 PM	BCl3 valve closed
10/29/2011	1:54:23 PM	PH3 valve closed
10/29/2011	1:54:23 PM	SiCl4 pre valve closed
10/29/2011	1:54:23 PM	SiCl4 post valve closed
10/29/2011	1:54:23 PM	Bypass valve closed
10/29/2011	1:54:23 PM	Bubbler valve closed
10/29/2011	1:54:23 PM	Main Vac valve opened
10/29/2011	1:54:23 PM	Helium MFC set to  0.000000
10/29/2011	1:54:23 PM	H2 MFC set to  0.000000
10/29/2011	1:54:23 PM	BCl3 MFC set to  0.000000
10/29/2011	1:54:23 PM	PHl3 MFC set to  0.000000
10/29/2011	1:54:23 PM	SiCl4 MFC set to  0.000000
10/29/2011	1:54:23 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	1:54:23 PM	Tube furnace set to 0
10/29/2011	1:54:53 PM	H2 valve closed
10/29/2011	1:54:53 PM	BCl3 valve closed
10/29/2011	1:54:53 PM	PH3 valve closed
10/29/2011	1:54:53 PM	SiCl4 pre valve closed
10/29/2011	1:54:53 PM	SiCl4 post valve closed
10/29/2011	1:54:53 PM	Bypass valve closed
10/29/2011	1:54:53 PM	Bubbler valve closed
10/29/2011	1:54:53 PM	Helium valve opened
10/29/2011	1:54:53 PM	Main Vac valve opened
10/29/2011	1:54:53 PM	Helium MFC set to  20.000000
10/29/2011	1:54:53 PM	H2 MFC set to  0.000000
10/29/2011	1:54:53 PM	BCl3 MFC set to  0.000000
10/29/2011	1:54:53 PM	PHl3 MFC set to  0.000000
10/29/2011	1:54:53 PM	SiCl4 MFC set to  0.000000
10/29/2011	1:54:53 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	1:54:53 PM	Tube furnace set to 0
10/29/2011	1:55:23 PM	Helium valve closed
10/29/2011	1:55:23 PM	H2 valve closed
10/29/2011	1:55:23 PM	BCl3 valve closed
10/29/2011	1:55:23 PM	PH3 valve closed
10/29/2011	1:55:23 PM	SiCl4 pre valve closed
10/29/2011	1:55:23 PM	SiCl4 post valve closed
10/29/2011	1:55:23 PM	Bypass valve closed
10/29/2011	1:55:23 PM	Bubbler valve closed
10/29/2011	1:55:23 PM	Main Vac valve opened
10/29/2011	1:55:23 PM	Helium MFC set to  0.000000
10/29/2011	1:55:23 PM	H2 MFC set to  0.000000
10/29/2011	1:55:23 PM	BCl3 MFC set to  0.000000
10/29/2011	1:55:23 PM	PHl3 MFC set to  0.000000
10/29/2011	1:55:23 PM	SiCl4 MFC set to  0.000000
10/29/2011	1:55:23 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	1:55:24 PM	Tube furnace set to 0
10/29/2011	1:55:54 PM	H2 valve closed
10/29/2011	1:55:54 PM	BCl3 valve closed
10/29/2011	1:55:54 PM	PH3 valve closed
10/29/2011	1:55:54 PM	SiCl4 pre valve closed
10/29/2011	1:55:54 PM	SiCl4 post valve closed
10/29/2011	1:55:54 PM	Bypass valve closed
10/29/2011	1:55:54 PM	Bubbler valve closed
10/29/2011	1:55:54 PM	Helium valve opened
10/29/2011	1:55:54 PM	Main Vac valve opened
10/29/2011	1:55:54 PM	Helium MFC set to  20.000000
10/29/2011	1:55:54 PM	H2 MFC set to  0.000000
10/29/2011	1:55:54 PM	BCl3 MFC set to  0.000000
10/29/2011	1:55:54 PM	PHl3 MFC set to  0.000000
10/29/2011	1:55:54 PM	SiCl4 MFC set to  0.000000
10/29/2011	1:55:54 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	1:55:54 PM	Tube furnace set to 0
10/29/2011	1:56:24 PM	Helium valve closed
10/29/2011	1:56:24 PM	H2 valve closed
10/29/2011	1:56:24 PM	BCl3 valve closed
10/29/2011	1:56:24 PM	PH3 valve closed
10/29/2011	1:56:24 PM	SiCl4 pre valve closed
10/29/2011	1:56:24 PM	SiCl4 post valve closed
10/29/2011	1:56:24 PM	Bypass valve closed
10/29/2011	1:56:24 PM	Bubbler valve closed
10/29/2011	1:56:24 PM	Main Vac valve opened
10/29/2011	1:56:24 PM	Helium MFC set to  0.000000
10/29/2011	1:56:24 PM	H2 MFC set to  0.000000
10/29/2011	1:56:24 PM	BCl3 MFC set to  0.000000
10/29/2011	1:56:24 PM	PHl3 MFC set to  0.000000
10/29/2011	1:56:24 PM	SiCl4 MFC set to  0.000000
10/29/2011	1:56:24 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	1:56:24 PM	Tube furnace set to 0
10/29/2011	1:56:54 PM	H2 valve closed
10/29/2011	1:56:54 PM	BCl3 valve closed
10/29/2011	1:56:54 PM	PH3 valve closed
10/29/2011	1:56:54 PM	SiCl4 pre valve closed
10/29/2011	1:56:54 PM	SiCl4 post valve closed
10/29/2011	1:56:54 PM	Bypass valve closed
10/29/2011	1:56:54 PM	Bubbler valve closed
10/29/2011	1:56:54 PM	Helium valve opened
10/29/2011	1:56:54 PM	Main Vac valve opened
10/29/2011	1:56:54 PM	Helium MFC set to  20.000000
10/29/2011	1:56:54 PM	H2 MFC set to  0.000000
10/29/2011	1:56:54 PM	BCl3 MFC set to  0.000000
10/29/2011	1:56:54 PM	PHl3 MFC set to  0.000000
10/29/2011	1:56:54 PM	SiCl4 MFC set to  0.000000
10/29/2011	1:56:54 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	1:56:54 PM	Tube furnace set to 0
10/29/2011	1:57:24 PM	Helium valve closed
10/29/2011	1:57:24 PM	H2 valve closed
10/29/2011	1:57:24 PM	BCl3 valve closed
10/29/2011	1:57:24 PM	PH3 valve closed
10/29/2011	1:57:24 PM	SiCl4 pre valve closed
10/29/2011	1:57:24 PM	SiCl4 post valve closed
10/29/2011	1:57:24 PM	Bypass valve closed
10/29/2011	1:57:24 PM	Bubbler valve closed
10/29/2011	1:57:24 PM	Main Vac valve opened
10/29/2011	1:57:24 PM	Helium MFC set to  0.000000
10/29/2011	1:57:24 PM	H2 MFC set to  0.000000
10/29/2011	1:57:24 PM	BCl3 MFC set to  0.000000
10/29/2011	1:57:24 PM	PHl3 MFC set to  0.000000
10/29/2011	1:57:24 PM	SiCl4 MFC set to  0.000000
10/29/2011	1:57:24 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	1:57:24 PM	Tube furnace set to 0
10/29/2011	1:57:54 PM	H2 valve closed
10/29/2011	1:57:54 PM	BCl3 valve closed
10/29/2011	1:57:54 PM	PH3 valve closed
10/29/2011	1:57:54 PM	SiCl4 pre valve closed
10/29/2011	1:57:54 PM	SiCl4 post valve closed
10/29/2011	1:57:54 PM	Bypass valve closed
10/29/2011	1:57:54 PM	Bubbler valve closed
10/29/2011	1:57:54 PM	Helium valve opened
10/29/2011	1:57:54 PM	Main Vac valve opened
10/29/2011	1:57:54 PM	Helium MFC set to  20.000000
10/29/2011	1:57:54 PM	H2 MFC set to  0.000000
10/29/2011	1:57:54 PM	BCl3 MFC set to  0.000000
10/29/2011	1:57:54 PM	PHl3 MFC set to  0.000000
10/29/2011	1:57:54 PM	SiCl4 MFC set to  0.000000
10/29/2011	1:57:54 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	1:57:55 PM	Tube furnace set to 0
10/29/2011	1:58:25 PM	Helium valve closed
10/29/2011	1:58:25 PM	H2 valve closed
10/29/2011	1:58:25 PM	BCl3 valve closed
10/29/2011	1:58:25 PM	PH3 valve closed
10/29/2011	1:58:25 PM	SiCl4 pre valve closed
10/29/2011	1:58:25 PM	SiCl4 post valve closed
10/29/2011	1:58:25 PM	Bypass valve closed
10/29/2011	1:58:25 PM	Bubbler valve closed
10/29/2011	1:58:25 PM	Main Vac valve opened
10/29/2011	1:58:25 PM	Helium MFC set to  0.000000
10/29/2011	1:58:25 PM	H2 MFC set to  0.000000
10/29/2011	1:58:25 PM	BCl3 MFC set to  0.000000
10/29/2011	1:58:25 PM	PHl3 MFC set to  0.000000
10/29/2011	1:58:25 PM	SiCl4 MFC set to  0.000000
10/29/2011	1:58:25 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	1:58:25 PM	Tube furnace set to 0
10/29/2011	1:58:55 PM	H2 valve closed
10/29/2011	1:58:55 PM	BCl3 valve closed
10/29/2011	1:58:55 PM	PH3 valve closed
10/29/2011	1:58:55 PM	SiCl4 pre valve closed
10/29/2011	1:58:55 PM	SiCl4 post valve closed
10/29/2011	1:58:55 PM	Bypass valve closed
10/29/2011	1:58:55 PM	Bubbler valve closed
10/29/2011	1:58:55 PM	Helium valve opened
10/29/2011	1:58:55 PM	Main Vac valve opened
10/29/2011	1:58:55 PM	Helium MFC set to  20.000000
10/29/2011	1:58:55 PM	H2 MFC set to  0.000000
10/29/2011	1:58:55 PM	BCl3 MFC set to  0.000000
10/29/2011	1:58:55 PM	PHl3 MFC set to  0.000000
10/29/2011	1:58:55 PM	SiCl4 MFC set to  0.000000
10/29/2011	1:58:55 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	1:58:55 PM	Tube furnace set to 0
10/29/2011	1:59:25 PM	Helium valve closed
10/29/2011	1:59:25 PM	H2 valve closed
10/29/2011	1:59:25 PM	BCl3 valve closed
10/29/2011	1:59:25 PM	PH3 valve closed
10/29/2011	1:59:25 PM	SiCl4 pre valve closed
10/29/2011	1:59:25 PM	SiCl4 post valve closed
10/29/2011	1:59:25 PM	Bypass valve closed
10/29/2011	1:59:25 PM	Bubbler valve closed
10/29/2011	1:59:25 PM	Main Vac valve opened
10/29/2011	1:59:25 PM	Helium MFC set to  0.000000
10/29/2011	1:59:25 PM	H2 MFC set to  0.000000
10/29/2011	1:59:25 PM	BCl3 MFC set to  0.000000
10/29/2011	1:59:25 PM	PHl3 MFC set to  0.000000
10/29/2011	1:59:25 PM	SiCl4 MFC set to  0.000000
10/29/2011	1:59:25 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	1:59:25 PM	Tube furnace set to 0
10/29/2011	1:59:55 PM	H2 valve closed
10/29/2011	1:59:55 PM	BCl3 valve closed
10/29/2011	1:59:55 PM	PH3 valve closed
10/29/2011	1:59:55 PM	SiCl4 pre valve closed
10/29/2011	1:59:55 PM	SiCl4 post valve closed
10/29/2011	1:59:55 PM	Bypass valve closed
10/29/2011	1:59:55 PM	Bubbler valve closed
10/29/2011	1:59:55 PM	Helium valve opened
10/29/2011	1:59:55 PM	Main Vac valve opened
10/29/2011	1:59:55 PM	Helium MFC set to  20.000000
10/29/2011	1:59:55 PM	H2 MFC set to  0.000000
10/29/2011	1:59:55 PM	BCl3 MFC set to  0.000000
10/29/2011	1:59:55 PM	PHl3 MFC set to  0.000000
10/29/2011	1:59:55 PM	SiCl4 MFC set to  0.000000
10/29/2011	1:59:55 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	1:59:55 PM	Tube furnace set to 0
10/29/2011	2:00:25 PM	Helium valve closed
10/29/2011	2:00:25 PM	H2 valve closed
10/29/2011	2:00:25 PM	BCl3 valve closed
10/29/2011	2:00:25 PM	PH3 valve closed
10/29/2011	2:00:25 PM	SiCl4 pre valve closed
10/29/2011	2:00:25 PM	SiCl4 post valve closed
10/29/2011	2:00:25 PM	Bypass valve closed
10/29/2011	2:00:25 PM	Bubbler valve closed
10/29/2011	2:00:25 PM	Main Vac valve opened
10/29/2011	2:00:25 PM	Helium MFC set to  0.000000
10/29/2011	2:00:25 PM	H2 MFC set to  0.000000
10/29/2011	2:00:25 PM	BCl3 MFC set to  0.000000
10/29/2011	2:00:25 PM	PHl3 MFC set to  0.000000
10/29/2011	2:00:25 PM	SiCl4 MFC set to  0.000000
10/29/2011	2:00:25 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	2:00:26 PM	Tube furnace set to 0
10/29/2011	2:00:56 PM	H2 valve closed
10/29/2011	2:00:56 PM	BCl3 valve closed
10/29/2011	2:00:56 PM	PH3 valve closed
10/29/2011	2:00:56 PM	SiCl4 pre valve closed
10/29/2011	2:00:56 PM	SiCl4 post valve closed
10/29/2011	2:00:56 PM	Bypass valve closed
10/29/2011	2:00:56 PM	Bubbler valve closed
10/29/2011	2:00:56 PM	Helium valve opened
10/29/2011	2:00:56 PM	Main Vac valve opened
10/29/2011	2:00:56 PM	Helium MFC set to  20.000000
10/29/2011	2:00:56 PM	H2 MFC set to  0.000000
10/29/2011	2:00:56 PM	BCl3 MFC set to  0.000000
10/29/2011	2:00:56 PM	PHl3 MFC set to  0.000000
10/29/2011	2:00:56 PM	SiCl4 MFC set to  0.000000
10/29/2011	2:00:56 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	2:00:56 PM	Tube furnace set to 0
10/29/2011	2:01:26 PM	Helium valve closed
10/29/2011	2:01:26 PM	H2 valve closed
10/29/2011	2:01:26 PM	BCl3 valve closed
10/29/2011	2:01:26 PM	PH3 valve closed
10/29/2011	2:01:26 PM	SiCl4 pre valve closed
10/29/2011	2:01:26 PM	SiCl4 post valve closed
10/29/2011	2:01:26 PM	Bypass valve closed
10/29/2011	2:01:26 PM	Bubbler valve closed
10/29/2011	2:01:26 PM	Main Vac valve opened
10/29/2011	2:01:26 PM	Helium MFC set to  0.000000
10/29/2011	2:01:26 PM	H2 MFC set to  0.000000
10/29/2011	2:01:26 PM	BCl3 MFC set to  0.000000
10/29/2011	2:01:26 PM	PHl3 MFC set to  0.000000
10/29/2011	2:01:26 PM	SiCl4 MFC set to  0.000000
10/29/2011	2:01:26 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	2:01:26 PM	Tube furnace set to 0
10/29/2011	2:01:27 PM	Run finished at 2:01 PM
10/29/2011	2:01:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/29/2011	2:06:06 PM	Main Vac valve closed
10/29/2011	2:06:27 PM	Main Vac valve opened
10/29/2011	2:09:41 PM	Recipe started at 2:09 PM
10/29/2011	2:09:41 PM	Helium valve closed
10/29/2011	2:09:41 PM	H2 valve closed
10/29/2011	2:09:41 PM	BCl3 valve closed
10/29/2011	2:09:41 PM	PH3 valve closed
10/29/2011	2:09:41 PM	SiCl4 pre valve closed
10/29/2011	2:09:41 PM	SiCl4 post valve closed
10/29/2011	2:09:41 PM	Main Vac valve closed
10/29/2011	2:09:41 PM	Bypass valve closed
10/29/2011	2:09:41 PM	Bubbler valve closed
10/29/2011	2:09:41 PM	Helium MFC set to  0.000000
10/29/2011	2:09:41 PM	H2 MFC set to  0.000000
10/29/2011	2:09:41 PM	BCl3 MFC set to  0.000000
10/29/2011	2:09:41 PM	PHl3 MFC set to  0.000000
10/29/2011	2:09:41 PM	SiCl4 MFC set to  0.000000
10/29/2011	2:09:41 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	2:09:41 PM	Tube furnace set to 0
10/29/2011	2:09:44 PM	Helium valve closed
10/29/2011	2:09:44 PM	BCl3 valve closed
10/29/2011	2:09:44 PM	PH3 valve closed
10/29/2011	2:09:44 PM	SiCl4 pre valve closed
10/29/2011	2:09:44 PM	SiCl4 post valve closed
10/29/2011	2:09:44 PM	Main Vac valve closed
10/29/2011	2:09:44 PM	Bypass valve closed
10/29/2011	2:09:44 PM	Bubbler valve closed
10/29/2011	2:09:44 PM	H2 valve opened
10/29/2011	2:09:44 PM	Helium MFC set to  0.000000
10/29/2011	2:09:44 PM	H2 MFC set to  500.000000
10/29/2011	2:09:44 PM	BCl3 MFC set to  0.000000
10/29/2011	2:09:44 PM	PHl3 MFC set to  0.000000
10/29/2011	2:09:44 PM	SiCl4 MFC set to  0.000000
10/29/2011	2:09:44 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	2:09:44 PM	Tube furnace set to 0
10/29/2011	2:10:52 PM	Helium valve closed
10/29/2011	2:10:52 PM	BCl3 valve closed
10/29/2011	2:10:52 PM	PH3 valve closed
10/29/2011	2:10:52 PM	SiCl4 pre valve closed
10/29/2011	2:10:52 PM	SiCl4 post valve closed
10/29/2011	2:10:52 PM	Main Vac valve closed
10/29/2011	2:10:52 PM	Bypass valve closed
10/29/2011	2:10:52 PM	H2 valve opened
10/29/2011	2:10:52 PM	Bubbler valve opened
10/29/2011	2:10:52 PM	Helium MFC set to  0.000000
10/29/2011	2:10:52 PM	H2 MFC set to  500.000000
10/29/2011	2:10:52 PM	BCl3 MFC set to  0.000000
10/29/2011	2:10:52 PM	PHl3 MFC set to  0.000000
10/29/2011	2:10:52 PM	SiCl4 MFC set to  0.000000
10/29/2011	2:10:52 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	2:10:52 PM	Tube furnace set to 0
10/29/2011	2:10:53 PM	Helium valve closed
10/29/2011	2:10:53 PM	BCl3 valve closed
10/29/2011	2:10:53 PM	PH3 valve closed
10/29/2011	2:10:53 PM	SiCl4 pre valve closed
10/29/2011	2:10:53 PM	SiCl4 post valve closed
10/29/2011	2:10:53 PM	Main Vac valve closed
10/29/2011	2:10:53 PM	Bypass valve closed
10/29/2011	2:10:53 PM	H2 valve opened
10/29/2011	2:10:53 PM	Bubbler valve opened
10/29/2011	2:10:53 PM	Helium MFC set to  0.000000
10/29/2011	2:10:53 PM	H2 MFC set to  500.000000
10/29/2011	2:10:53 PM	BCl3 MFC set to  0.000000
10/29/2011	2:10:53 PM	PHl3 MFC set to  0.000000
10/29/2011	2:10:53 PM	SiCl4 MFC set to  0.000000
10/29/2011	2:10:53 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	2:10:53 PM	Tube furnace set to 1050
10/29/2011	2:30:53 PM	Helium valve closed
10/29/2011	2:30:53 PM	PH3 valve closed
10/29/2011	2:30:53 PM	Main Vac valve closed
10/29/2011	2:30:53 PM	Bypass valve closed
10/29/2011	2:30:53 PM	H2 valve opened
10/29/2011	2:30:53 PM	BCl3 valve opened
10/29/2011	2:30:53 PM	SiCl4 pre valve opened
10/29/2011	2:30:53 PM	SiCl4 post valve opened
10/29/2011	2:30:53 PM	Bubbler valve opened
10/29/2011	2:30:53 PM	Helium MFC set to  0.000000
10/29/2011	2:30:53 PM	H2 MFC set to  500.000000
10/29/2011	2:30:53 PM	BCl3 MFC set to  2.500000
10/29/2011	2:30:53 PM	PHl3 MFC set to  0.000000
10/29/2011	2:30:53 PM	SiCl4 MFC set to  50.000000
10/29/2011	2:30:53 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	2:30:53 PM	Tube furnace set to 1050
10/29/2011	2:50:53 PM	Helium valve closed
10/29/2011	2:50:53 PM	BCl3 valve closed
10/29/2011	2:50:53 PM	PH3 valve closed
10/29/2011	2:50:53 PM	SiCl4 pre valve closed
10/29/2011	2:50:53 PM	SiCl4 post valve closed
10/29/2011	2:50:53 PM	Main Vac valve closed
10/29/2011	2:50:53 PM	Bypass valve closed
10/29/2011	2:50:53 PM	H2 valve opened
10/29/2011	2:50:53 PM	Bubbler valve opened
10/29/2011	2:50:53 PM	Helium MFC set to  0.000000
10/29/2011	2:50:53 PM	H2 MFC set to  500.000000
10/29/2011	2:50:53 PM	BCl3 MFC set to  0.000000
10/29/2011	2:50:53 PM	PHl3 MFC set to  0.000000
10/29/2011	2:50:53 PM	SiCl4 MFC set to  0.000000
10/29/2011	2:50:53 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	2:50:54 PM	Tube furnace set to 750
10/29/2011	2:55:54 PM	H2 valve closed
10/29/2011	2:55:54 PM	BCl3 valve closed
10/29/2011	2:55:54 PM	PH3 valve closed
10/29/2011	2:55:54 PM	SiCl4 pre valve closed
10/29/2011	2:55:54 PM	SiCl4 post valve closed
10/29/2011	2:55:54 PM	Main Vac valve closed
10/29/2011	2:55:54 PM	Bypass valve closed
10/29/2011	2:55:54 PM	Helium valve opened
10/29/2011	2:55:54 PM	Bubbler valve opened
10/29/2011	2:55:54 PM	Helium MFC set to  500.000000
10/29/2011	2:55:54 PM	H2 MFC set to  0.000000
10/29/2011	2:55:54 PM	BCl3 MFC set to  0.000000
10/29/2011	2:55:54 PM	PHl3 MFC set to  0.000000
10/29/2011	2:55:54 PM	SiCl4 MFC set to  0.000000
10/29/2011	2:55:54 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	2:55:54 PM	Tube furnace set to 0
10/29/2011	3:09:52 PM	Helium valve closed
10/29/2011	3:09:52 PM	H2 valve closed
10/29/2011	3:09:52 PM	BCl3 valve closed
10/29/2011	3:09:52 PM	PH3 valve closed
10/29/2011	3:09:52 PM	SiCl4 pre valve closed
10/29/2011	3:09:52 PM	SiCl4 post valve closed
10/29/2011	3:09:52 PM	Main Vac valve closed
10/29/2011	3:09:52 PM	Bypass valve closed
10/29/2011	3:09:52 PM	Bubbler valve closed
10/29/2011	3:09:52 PM	Helium MFC set to  0.000000
10/29/2011	3:09:52 PM	H2 MFC set to  0.000000
10/29/2011	3:09:52 PM	BCl3 MFC set to  0.000000
10/29/2011	3:09:52 PM	PHl3 MFC set to  0.000000
10/29/2011	3:09:52 PM	SiCl4 MFC set to  0.000000
10/29/2011	3:09:52 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	3:09:52 PM	Tube furnace set to 0
10/29/2011	3:09:53 PM	Run finished at 3:09 PM
10/29/2011	3:16:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/29/2011	3:16:12 PM	Recipe started at 3:16 PM
10/29/2011	3:16:12 PM	Helium valve closed
10/29/2011	3:16:12 PM	H2 valve closed
10/29/2011	3:16:13 PM	BCl3 valve closed
10/29/2011	3:16:13 PM	PH3 valve closed
10/29/2011	3:16:13 PM	SiCl4 pre valve closed
10/29/2011	3:16:13 PM	SiCl4 post valve closed
10/29/2011	3:16:13 PM	Main Vac valve closed
10/29/2011	3:16:13 PM	Bubbler valve closed
10/29/2011	3:16:13 PM	Bypass valve opened
10/29/2011	3:16:13 PM	Helium MFC set to  0.000000
10/29/2011	3:16:13 PM	H2 MFC set to  0.000000
10/29/2011	3:16:13 PM	BCl3 MFC set to  0.000000
10/29/2011	3:16:13 PM	PHl3 MFC set to  0.000000
10/29/2011	3:16:13 PM	SiCl4 MFC set to  0.000000
10/29/2011	3:16:13 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	3:16:13 PM	Tube furnace set to 0
10/29/2011	3:17:18 PM	Helium valve closed
10/29/2011	3:17:18 PM	H2 valve closed
10/29/2011	3:17:18 PM	BCl3 valve closed
10/29/2011	3:17:18 PM	PH3 valve closed
10/29/2011	3:17:18 PM	SiCl4 pre valve closed
10/29/2011	3:17:18 PM	SiCl4 post valve closed
10/29/2011	3:17:18 PM	Main Vac valve closed
10/29/2011	3:17:18 PM	Bubbler valve closed
10/29/2011	3:17:18 PM	Bypass valve opened
10/29/2011	3:17:18 PM	Helium MFC set to  0.000000
10/29/2011	3:17:18 PM	H2 MFC set to  0.000000
10/29/2011	3:17:18 PM	BCl3 MFC set to  0.000000
10/29/2011	3:17:18 PM	PHl3 MFC set to  0.000000
10/29/2011	3:17:18 PM	SiCl4 MFC set to  0.000000
10/29/2011	3:17:18 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	3:17:18 PM	Tube furnace set to 0
10/29/2011	3:18:18 PM	Helium valve closed
10/29/2011	3:18:18 PM	H2 valve closed
10/29/2011	3:18:18 PM	BCl3 valve closed
10/29/2011	3:18:18 PM	PH3 valve closed
10/29/2011	3:18:18 PM	SiCl4 pre valve closed
10/29/2011	3:18:18 PM	SiCl4 post valve closed
10/29/2011	3:18:18 PM	Bypass valve closed
10/29/2011	3:18:18 PM	Bubbler valve closed
10/29/2011	3:18:18 PM	Main Vac valve opened
10/29/2011	3:18:18 PM	Helium MFC set to  0.000000
10/29/2011	3:18:18 PM	H2 MFC set to  0.000000
10/29/2011	3:18:18 PM	BCl3 MFC set to  0.000000
10/29/2011	3:18:18 PM	PHl3 MFC set to  0.000000
10/29/2011	3:18:18 PM	SiCl4 MFC set to  0.000000
10/29/2011	3:18:18 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	3:18:18 PM	Tube furnace set to 0
10/29/2011	3:18:19 PM	Run finished at 3:18 PM
10/29/2011	3:18:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/29/2011	3:27:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/29/2011	3:28:11 PM	Recipe started at 3:28 PM
10/29/2011	3:28:11 PM	Helium valve closed
10/29/2011	3:28:11 PM	H2 valve closed
10/29/2011	3:28:11 PM	BCl3 valve closed
10/29/2011	3:28:11 PM	PH3 valve closed
10/29/2011	3:28:11 PM	SiCl4 pre valve closed
10/29/2011	3:28:11 PM	SiCl4 post valve closed
10/29/2011	3:28:11 PM	Main Vac valve closed
10/29/2011	3:28:11 PM	Bubbler valve closed
10/29/2011	3:28:11 PM	Bypass valve opened
10/29/2011	3:28:11 PM	Helium MFC set to  0.000000
10/29/2011	3:28:11 PM	H2 MFC set to  0.000000
10/29/2011	3:28:11 PM	BCl3 MFC set to  0.000000
10/29/2011	3:28:11 PM	PHl3 MFC set to  0.000000
10/29/2011	3:28:11 PM	SiCl4 MFC set to  0.000000
10/29/2011	3:28:11 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	3:28:11 PM	Tube furnace set to 0
10/29/2011	3:28:11 PM	Helium valve closed
10/29/2011	3:28:12 PM	H2 valve closed
10/29/2011	3:28:12 PM	BCl3 valve closed
10/29/2011	3:28:12 PM	PH3 valve closed
10/29/2011	3:28:12 PM	SiCl4 pre valve closed
10/29/2011	3:28:12 PM	SiCl4 post valve closed
10/29/2011	3:28:12 PM	Main Vac valve closed
10/29/2011	3:28:12 PM	Bubbler valve closed
10/29/2011	3:28:12 PM	Bypass valve opened
10/29/2011	3:28:12 PM	Helium MFC set to  0.000000
10/29/2011	3:28:12 PM	H2 MFC set to  0.000000
10/29/2011	3:28:12 PM	BCl3 MFC set to  0.000000
10/29/2011	3:28:12 PM	PHl3 MFC set to  0.000000
10/29/2011	3:28:12 PM	SiCl4 MFC set to  0.000000
10/29/2011	3:28:12 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	3:28:12 PM	Tube furnace set to 0
10/29/2011	3:28:12 PM	Helium valve closed
10/29/2011	3:28:12 PM	H2 valve closed
10/29/2011	3:28:12 PM	BCl3 valve closed
10/29/2011	3:28:12 PM	PH3 valve closed
10/29/2011	3:28:12 PM	SiCl4 pre valve closed
10/29/2011	3:28:12 PM	SiCl4 post valve closed
10/29/2011	3:28:12 PM	Bypass valve closed
10/29/2011	3:28:12 PM	Bubbler valve closed
10/29/2011	3:28:12 PM	Main Vac valve opened
10/29/2011	3:28:12 PM	Helium MFC set to  0.000000
10/29/2011	3:28:12 PM	H2 MFC set to  0.000000
10/29/2011	3:28:12 PM	BCl3 MFC set to  0.000000
10/29/2011	3:28:12 PM	PHl3 MFC set to  0.000000
10/29/2011	3:28:12 PM	SiCl4 MFC set to  0.000000
10/29/2011	3:28:12 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	3:28:12 PM	Tube furnace set to 0
10/29/2011	3:28:14 PM	H2 valve closed
10/29/2011	3:28:14 PM	BCl3 valve closed
10/29/2011	3:28:14 PM	PH3 valve closed
10/29/2011	3:28:14 PM	SiCl4 pre valve closed
10/29/2011	3:28:14 PM	SiCl4 post valve closed
10/29/2011	3:28:14 PM	Bypass valve closed
10/29/2011	3:28:14 PM	Bubbler valve closed
10/29/2011	3:28:14 PM	Helium valve opened
10/29/2011	3:28:14 PM	Main Vac valve opened
10/29/2011	3:28:14 PM	Helium MFC set to  20.000000
10/29/2011	3:28:14 PM	H2 MFC set to  0.000000
10/29/2011	3:28:14 PM	BCl3 MFC set to  0.000000
10/29/2011	3:28:14 PM	PHl3 MFC set to  0.000000
10/29/2011	3:28:14 PM	SiCl4 MFC set to  0.000000
10/29/2011	3:28:14 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	3:28:14 PM	Tube furnace set to 0
10/29/2011	3:28:44 PM	Helium valve closed
10/29/2011	3:28:44 PM	H2 valve closed
10/29/2011	3:28:44 PM	BCl3 valve closed
10/29/2011	3:28:44 PM	PH3 valve closed
10/29/2011	3:28:44 PM	SiCl4 pre valve closed
10/29/2011	3:28:44 PM	SiCl4 post valve closed
10/29/2011	3:28:44 PM	Bypass valve closed
10/29/2011	3:28:44 PM	Bubbler valve closed
10/29/2011	3:28:44 PM	Main Vac valve opened
10/29/2011	3:28:44 PM	Helium MFC set to  0.000000
10/29/2011	3:28:44 PM	H2 MFC set to  0.000000
10/29/2011	3:28:44 PM	BCl3 MFC set to  0.000000
10/29/2011	3:28:44 PM	PHl3 MFC set to  0.000000
10/29/2011	3:28:44 PM	SiCl4 MFC set to  0.000000
10/29/2011	3:28:44 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	3:28:45 PM	Tube furnace set to 0
10/29/2011	3:29:15 PM	H2 valve closed
10/29/2011	3:29:15 PM	BCl3 valve closed
10/29/2011	3:29:15 PM	PH3 valve closed
10/29/2011	3:29:15 PM	SiCl4 pre valve closed
10/29/2011	3:29:15 PM	SiCl4 post valve closed
10/29/2011	3:29:15 PM	Bypass valve closed
10/29/2011	3:29:15 PM	Bubbler valve closed
10/29/2011	3:29:15 PM	Helium valve opened
10/29/2011	3:29:15 PM	Main Vac valve opened
10/29/2011	3:29:15 PM	Helium MFC set to  20.000000
10/29/2011	3:29:15 PM	H2 MFC set to  0.000000
10/29/2011	3:29:15 PM	BCl3 MFC set to  0.000000
10/29/2011	3:29:15 PM	PHl3 MFC set to  0.000000
10/29/2011	3:29:15 PM	SiCl4 MFC set to  0.000000
10/29/2011	3:29:15 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	3:29:15 PM	Tube furnace set to 0
10/29/2011	3:29:45 PM	Helium valve closed
10/29/2011	3:29:45 PM	H2 valve closed
10/29/2011	3:29:45 PM	BCl3 valve closed
10/29/2011	3:29:45 PM	PH3 valve closed
10/29/2011	3:29:45 PM	SiCl4 pre valve closed
10/29/2011	3:29:45 PM	SiCl4 post valve closed
10/29/2011	3:29:45 PM	Bypass valve closed
10/29/2011	3:29:45 PM	Bubbler valve closed
10/29/2011	3:29:45 PM	Main Vac valve opened
10/29/2011	3:29:45 PM	Helium MFC set to  0.000000
10/29/2011	3:29:45 PM	H2 MFC set to  0.000000
10/29/2011	3:29:45 PM	BCl3 MFC set to  0.000000
10/29/2011	3:29:45 PM	PHl3 MFC set to  0.000000
10/29/2011	3:29:45 PM	SiCl4 MFC set to  0.000000
10/29/2011	3:29:45 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	3:29:45 PM	Tube furnace set to 0
10/29/2011	3:30:15 PM	H2 valve closed
10/29/2011	3:30:15 PM	BCl3 valve closed
10/29/2011	3:30:15 PM	PH3 valve closed
10/29/2011	3:30:15 PM	SiCl4 pre valve closed
10/29/2011	3:30:15 PM	SiCl4 post valve closed
10/29/2011	3:30:15 PM	Bypass valve closed
10/29/2011	3:30:15 PM	Bubbler valve closed
10/29/2011	3:30:15 PM	Helium valve opened
10/29/2011	3:30:15 PM	Main Vac valve opened
10/29/2011	3:30:15 PM	Helium MFC set to  20.000000
10/29/2011	3:30:15 PM	H2 MFC set to  0.000000
10/29/2011	3:30:15 PM	BCl3 MFC set to  0.000000
10/29/2011	3:30:15 PM	PHl3 MFC set to  0.000000
10/29/2011	3:30:15 PM	SiCl4 MFC set to  0.000000
10/29/2011	3:30:15 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	3:30:15 PM	Tube furnace set to 0
10/29/2011	3:30:45 PM	Helium valve closed
10/29/2011	3:30:45 PM	H2 valve closed
10/29/2011	3:30:45 PM	BCl3 valve closed
10/29/2011	3:30:45 PM	PH3 valve closed
10/29/2011	3:30:45 PM	SiCl4 pre valve closed
10/29/2011	3:30:45 PM	SiCl4 post valve closed
10/29/2011	3:30:45 PM	Bypass valve closed
10/29/2011	3:30:45 PM	Bubbler valve closed
10/29/2011	3:30:45 PM	Main Vac valve opened
10/29/2011	3:30:45 PM	Helium MFC set to  0.000000
10/29/2011	3:30:45 PM	H2 MFC set to  0.000000
10/29/2011	3:30:45 PM	BCl3 MFC set to  0.000000
10/29/2011	3:30:45 PM	PHl3 MFC set to  0.000000
10/29/2011	3:30:45 PM	SiCl4 MFC set to  0.000000
10/29/2011	3:30:45 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	3:30:45 PM	Tube furnace set to 0
10/29/2011	3:31:15 PM	H2 valve closed
10/29/2011	3:31:15 PM	BCl3 valve closed
10/29/2011	3:31:15 PM	PH3 valve closed
10/29/2011	3:31:15 PM	SiCl4 pre valve closed
10/29/2011	3:31:15 PM	SiCl4 post valve closed
10/29/2011	3:31:15 PM	Bypass valve closed
10/29/2011	3:31:15 PM	Bubbler valve closed
10/29/2011	3:31:15 PM	Helium valve opened
10/29/2011	3:31:15 PM	Main Vac valve opened
10/29/2011	3:31:15 PM	Helium MFC set to  20.000000
10/29/2011	3:31:15 PM	H2 MFC set to  0.000000
10/29/2011	3:31:15 PM	BCl3 MFC set to  0.000000
10/29/2011	3:31:15 PM	PHl3 MFC set to  0.000000
10/29/2011	3:31:15 PM	SiCl4 MFC set to  0.000000
10/29/2011	3:31:15 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	3:31:16 PM	Tube furnace set to 0
10/29/2011	3:31:46 PM	Helium valve closed
10/29/2011	3:31:46 PM	H2 valve closed
10/29/2011	3:31:46 PM	BCl3 valve closed
10/29/2011	3:31:46 PM	PH3 valve closed
10/29/2011	3:31:46 PM	SiCl4 pre valve closed
10/29/2011	3:31:46 PM	SiCl4 post valve closed
10/29/2011	3:31:46 PM	Bypass valve closed
10/29/2011	3:31:46 PM	Bubbler valve closed
10/29/2011	3:31:46 PM	Main Vac valve opened
10/29/2011	3:31:46 PM	Helium MFC set to  0.000000
10/29/2011	3:31:46 PM	H2 MFC set to  0.000000
10/29/2011	3:31:46 PM	BCl3 MFC set to  0.000000
10/29/2011	3:31:46 PM	PHl3 MFC set to  0.000000
10/29/2011	3:31:46 PM	SiCl4 MFC set to  0.000000
10/29/2011	3:31:46 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	3:31:46 PM	Tube furnace set to 0
10/29/2011	3:32:16 PM	H2 valve closed
10/29/2011	3:32:16 PM	BCl3 valve closed
10/29/2011	3:32:16 PM	PH3 valve closed
10/29/2011	3:32:16 PM	SiCl4 pre valve closed
10/29/2011	3:32:16 PM	SiCl4 post valve closed
10/29/2011	3:32:16 PM	Bypass valve closed
10/29/2011	3:32:16 PM	Bubbler valve closed
10/29/2011	3:32:16 PM	Helium valve opened
10/29/2011	3:32:16 PM	Main Vac valve opened
10/29/2011	3:32:16 PM	Helium MFC set to  20.000000
10/29/2011	3:32:16 PM	H2 MFC set to  0.000000
10/29/2011	3:32:16 PM	BCl3 MFC set to  0.000000
10/29/2011	3:32:16 PM	PHl3 MFC set to  0.000000
10/29/2011	3:32:16 PM	SiCl4 MFC set to  0.000000
10/29/2011	3:32:16 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	3:32:16 PM	Tube furnace set to 0
10/29/2011	3:32:46 PM	Helium valve closed
10/29/2011	3:32:46 PM	H2 valve closed
10/29/2011	3:32:46 PM	BCl3 valve closed
10/29/2011	3:32:46 PM	PH3 valve closed
10/29/2011	3:32:46 PM	SiCl4 pre valve closed
10/29/2011	3:32:46 PM	SiCl4 post valve closed
10/29/2011	3:32:46 PM	Bypass valve closed
10/29/2011	3:32:46 PM	Bubbler valve closed
10/29/2011	3:32:46 PM	Main Vac valve opened
10/29/2011	3:32:46 PM	Helium MFC set to  0.000000
10/29/2011	3:32:46 PM	H2 MFC set to  0.000000
10/29/2011	3:32:46 PM	BCl3 MFC set to  0.000000
10/29/2011	3:32:46 PM	PHl3 MFC set to  0.000000
10/29/2011	3:32:46 PM	SiCl4 MFC set to  0.000000
10/29/2011	3:32:46 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	3:32:46 PM	Tube furnace set to 0
10/29/2011	3:33:16 PM	H2 valve closed
10/29/2011	3:33:16 PM	BCl3 valve closed
10/29/2011	3:33:16 PM	PH3 valve closed
10/29/2011	3:33:16 PM	SiCl4 pre valve closed
10/29/2011	3:33:16 PM	SiCl4 post valve closed
10/29/2011	3:33:16 PM	Bypass valve closed
10/29/2011	3:33:16 PM	Bubbler valve closed
10/29/2011	3:33:16 PM	Helium valve opened
10/29/2011	3:33:16 PM	Main Vac valve opened
10/29/2011	3:33:16 PM	Helium MFC set to  20.000000
10/29/2011	3:33:16 PM	H2 MFC set to  0.000000
10/29/2011	3:33:16 PM	BCl3 MFC set to  0.000000
10/29/2011	3:33:16 PM	PHl3 MFC set to  0.000000
10/29/2011	3:33:16 PM	SiCl4 MFC set to  0.000000
10/29/2011	3:33:16 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	3:33:16 PM	Tube furnace set to 0
10/29/2011	3:33:46 PM	Helium valve closed
10/29/2011	3:33:46 PM	H2 valve closed
10/29/2011	3:33:46 PM	BCl3 valve closed
10/29/2011	3:33:46 PM	PH3 valve closed
10/29/2011	3:33:46 PM	SiCl4 pre valve closed
10/29/2011	3:33:46 PM	SiCl4 post valve closed
10/29/2011	3:33:46 PM	Bypass valve closed
10/29/2011	3:33:46 PM	Bubbler valve closed
10/29/2011	3:33:46 PM	Main Vac valve opened
10/29/2011	3:33:46 PM	Helium MFC set to  0.000000
10/29/2011	3:33:46 PM	H2 MFC set to  0.000000
10/29/2011	3:33:46 PM	BCl3 MFC set to  0.000000
10/29/2011	3:33:46 PM	PHl3 MFC set to  0.000000
10/29/2011	3:33:46 PM	SiCl4 MFC set to  0.000000
10/29/2011	3:33:46 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	3:33:47 PM	Tube furnace set to 0
10/29/2011	3:34:17 PM	H2 valve closed
10/29/2011	3:34:17 PM	BCl3 valve closed
10/29/2011	3:34:17 PM	PH3 valve closed
10/29/2011	3:34:17 PM	SiCl4 pre valve closed
10/29/2011	3:34:17 PM	SiCl4 post valve closed
10/29/2011	3:34:17 PM	Bypass valve closed
10/29/2011	3:34:17 PM	Bubbler valve closed
10/29/2011	3:34:17 PM	Helium valve opened
10/29/2011	3:34:17 PM	Main Vac valve opened
10/29/2011	3:34:17 PM	Helium MFC set to  20.000000
10/29/2011	3:34:17 PM	H2 MFC set to  0.000000
10/29/2011	3:34:17 PM	BCl3 MFC set to  0.000000
10/29/2011	3:34:17 PM	PHl3 MFC set to  0.000000
10/29/2011	3:34:17 PM	SiCl4 MFC set to  0.000000
10/29/2011	3:34:17 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	3:34:17 PM	Tube furnace set to 0
10/29/2011	3:34:47 PM	Helium valve closed
10/29/2011	3:34:47 PM	H2 valve closed
10/29/2011	3:34:47 PM	BCl3 valve closed
10/29/2011	3:34:47 PM	PH3 valve closed
10/29/2011	3:34:47 PM	SiCl4 pre valve closed
10/29/2011	3:34:47 PM	SiCl4 post valve closed
10/29/2011	3:34:47 PM	Bypass valve closed
10/29/2011	3:34:47 PM	Bubbler valve closed
10/29/2011	3:34:47 PM	Main Vac valve opened
10/29/2011	3:34:47 PM	Helium MFC set to  0.000000
10/29/2011	3:34:47 PM	H2 MFC set to  0.000000
10/29/2011	3:34:47 PM	BCl3 MFC set to  0.000000
10/29/2011	3:34:47 PM	PHl3 MFC set to  0.000000
10/29/2011	3:34:47 PM	SiCl4 MFC set to  0.000000
10/29/2011	3:34:47 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	3:34:47 PM	Tube furnace set to 0
10/29/2011	3:35:17 PM	H2 valve closed
10/29/2011	3:35:17 PM	BCl3 valve closed
10/29/2011	3:35:17 PM	PH3 valve closed
10/29/2011	3:35:17 PM	SiCl4 pre valve closed
10/29/2011	3:35:17 PM	SiCl4 post valve closed
10/29/2011	3:35:17 PM	Bypass valve closed
10/29/2011	3:35:17 PM	Bubbler valve closed
10/29/2011	3:35:17 PM	Helium valve opened
10/29/2011	3:35:17 PM	Main Vac valve opened
10/29/2011	3:35:17 PM	Helium MFC set to  20.000000
10/29/2011	3:35:17 PM	H2 MFC set to  0.000000
10/29/2011	3:35:17 PM	BCl3 MFC set to  0.000000
10/29/2011	3:35:17 PM	PHl3 MFC set to  0.000000
10/29/2011	3:35:17 PM	SiCl4 MFC set to  0.000000
10/29/2011	3:35:17 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	3:35:17 PM	Tube furnace set to 0
10/29/2011	3:35:47 PM	Helium valve closed
10/29/2011	3:35:47 PM	H2 valve closed
10/29/2011	3:35:47 PM	BCl3 valve closed
10/29/2011	3:35:47 PM	PH3 valve closed
10/29/2011	3:35:47 PM	SiCl4 pre valve closed
10/29/2011	3:35:47 PM	SiCl4 post valve closed
10/29/2011	3:35:47 PM	Bypass valve closed
10/29/2011	3:35:47 PM	Bubbler valve closed
10/29/2011	3:35:47 PM	Main Vac valve opened
10/29/2011	3:35:47 PM	Helium MFC set to  0.000000
10/29/2011	3:35:47 PM	H2 MFC set to  0.000000
10/29/2011	3:35:47 PM	BCl3 MFC set to  0.000000
10/29/2011	3:35:47 PM	PHl3 MFC set to  0.000000
10/29/2011	3:35:47 PM	SiCl4 MFC set to  0.000000
10/29/2011	3:35:47 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	3:35:47 PM	Tube furnace set to 0
10/29/2011	3:36:17 PM	H2 valve closed
10/29/2011	3:36:17 PM	BCl3 valve closed
10/29/2011	3:36:17 PM	PH3 valve closed
10/29/2011	3:36:17 PM	SiCl4 pre valve closed
10/29/2011	3:36:18 PM	SiCl4 post valve closed
10/29/2011	3:36:18 PM	Bypass valve closed
10/29/2011	3:36:18 PM	Bubbler valve closed
10/29/2011	3:36:18 PM	Helium valve opened
10/29/2011	3:36:18 PM	Main Vac valve opened
10/29/2011	3:36:18 PM	Helium MFC set to  20.000000
10/29/2011	3:36:18 PM	H2 MFC set to  0.000000
10/29/2011	3:36:18 PM	BCl3 MFC set to  0.000000
10/29/2011	3:36:18 PM	PHl3 MFC set to  0.000000
10/29/2011	3:36:18 PM	SiCl4 MFC set to  0.000000
10/29/2011	3:36:18 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	3:36:18 PM	Tube furnace set to 0
10/29/2011	3:36:48 PM	Helium valve closed
10/29/2011	3:36:48 PM	H2 valve closed
10/29/2011	3:36:48 PM	BCl3 valve closed
10/29/2011	3:36:48 PM	PH3 valve closed
10/29/2011	3:36:48 PM	SiCl4 pre valve closed
10/29/2011	3:36:48 PM	SiCl4 post valve closed
10/29/2011	3:36:48 PM	Bypass valve closed
10/29/2011	3:36:48 PM	Bubbler valve closed
10/29/2011	3:36:48 PM	Main Vac valve opened
10/29/2011	3:36:48 PM	Helium MFC set to  0.000000
10/29/2011	3:36:48 PM	H2 MFC set to  0.000000
10/29/2011	3:36:48 PM	BCl3 MFC set to  0.000000
10/29/2011	3:36:48 PM	PHl3 MFC set to  0.000000
10/29/2011	3:36:48 PM	SiCl4 MFC set to  0.000000
10/29/2011	3:36:48 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	3:36:48 PM	Tube furnace set to 0
10/29/2011	3:37:18 PM	H2 valve closed
10/29/2011	3:37:18 PM	BCl3 valve closed
10/29/2011	3:37:18 PM	PH3 valve closed
10/29/2011	3:37:18 PM	SiCl4 pre valve closed
10/29/2011	3:37:18 PM	SiCl4 post valve closed
10/29/2011	3:37:18 PM	Bypass valve closed
10/29/2011	3:37:18 PM	Bubbler valve closed
10/29/2011	3:37:18 PM	Helium valve opened
10/29/2011	3:37:18 PM	Main Vac valve opened
10/29/2011	3:37:18 PM	Helium MFC set to  20.000000
10/29/2011	3:37:18 PM	H2 MFC set to  0.000000
10/29/2011	3:37:18 PM	BCl3 MFC set to  0.000000
10/29/2011	3:37:18 PM	PHl3 MFC set to  0.000000
10/29/2011	3:37:18 PM	SiCl4 MFC set to  0.000000
10/29/2011	3:37:18 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	3:37:18 PM	Tube furnace set to 0
10/29/2011	3:37:48 PM	Helium valve closed
10/29/2011	3:37:48 PM	H2 valve closed
10/29/2011	3:37:48 PM	BCl3 valve closed
10/29/2011	3:37:48 PM	PH3 valve closed
10/29/2011	3:37:48 PM	SiCl4 pre valve closed
10/29/2011	3:37:48 PM	SiCl4 post valve closed
10/29/2011	3:37:48 PM	Bypass valve closed
10/29/2011	3:37:48 PM	Bubbler valve closed
10/29/2011	3:37:48 PM	Main Vac valve opened
10/29/2011	3:37:48 PM	Helium MFC set to  0.000000
10/29/2011	3:37:48 PM	H2 MFC set to  0.000000
10/29/2011	3:37:48 PM	BCl3 MFC set to  0.000000
10/29/2011	3:37:48 PM	PHl3 MFC set to  0.000000
10/29/2011	3:37:48 PM	SiCl4 MFC set to  0.000000
10/29/2011	3:37:48 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	3:37:48 PM	Tube furnace set to 0
10/29/2011	3:37:49 PM	Run finished at 3:37 PM
10/29/2011	3:37:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/29/2011	3:38:56 PM	Main Vac valve closed
10/29/2011	3:39:13 PM	Main Vac valve opened
10/29/2011	3:41:55 PM	Recipe started at 3:41 PM
10/29/2011	3:41:55 PM	Helium valve closed
10/29/2011	3:41:55 PM	H2 valve closed
10/29/2011	3:41:55 PM	BCl3 valve closed
10/29/2011	3:41:55 PM	PH3 valve closed
10/29/2011	3:41:55 PM	SiCl4 pre valve closed
10/29/2011	3:41:55 PM	SiCl4 post valve closed
10/29/2011	3:41:55 PM	Main Vac valve closed
10/29/2011	3:41:55 PM	Bypass valve closed
10/29/2011	3:41:55 PM	Bubbler valve closed
10/29/2011	3:41:55 PM	Helium MFC set to  0.000000
10/29/2011	3:41:55 PM	H2 MFC set to  0.000000
10/29/2011	3:41:55 PM	BCl3 MFC set to  0.000000
10/29/2011	3:41:55 PM	PHl3 MFC set to  0.000000
10/29/2011	3:41:55 PM	SiCl4 MFC set to  0.000000
10/29/2011	3:41:55 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	3:41:55 PM	Tube furnace set to 0
10/29/2011	3:41:58 PM	Helium valve closed
10/29/2011	3:41:58 PM	BCl3 valve closed
10/29/2011	3:41:58 PM	PH3 valve closed
10/29/2011	3:41:58 PM	SiCl4 pre valve closed
10/29/2011	3:41:58 PM	SiCl4 post valve closed
10/29/2011	3:41:58 PM	Main Vac valve closed
10/29/2011	3:41:58 PM	Bypass valve closed
10/29/2011	3:41:58 PM	Bubbler valve closed
10/29/2011	3:41:58 PM	H2 valve opened
10/29/2011	3:41:58 PM	Helium MFC set to  0.000000
10/29/2011	3:41:58 PM	H2 MFC set to  500.000000
10/29/2011	3:41:58 PM	BCl3 MFC set to  0.000000
10/29/2011	3:41:58 PM	PHl3 MFC set to  0.000000
10/29/2011	3:41:58 PM	SiCl4 MFC set to  0.000000
10/29/2011	3:41:58 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	3:41:59 PM	Tube furnace set to 0
10/29/2011	3:43:05 PM	Helium valve closed
10/29/2011	3:43:05 PM	BCl3 valve closed
10/29/2011	3:43:05 PM	PH3 valve closed
10/29/2011	3:43:05 PM	SiCl4 pre valve closed
10/29/2011	3:43:05 PM	SiCl4 post valve closed
10/29/2011	3:43:05 PM	Main Vac valve closed
10/29/2011	3:43:05 PM	Bypass valve closed
10/29/2011	3:43:05 PM	H2 valve opened
10/29/2011	3:43:05 PM	Bubbler valve opened
10/29/2011	3:43:05 PM	Helium MFC set to  0.000000
10/29/2011	3:43:05 PM	H2 MFC set to  500.000000
10/29/2011	3:43:05 PM	BCl3 MFC set to  0.000000
10/29/2011	3:43:05 PM	PHl3 MFC set to  0.000000
10/29/2011	3:43:05 PM	SiCl4 MFC set to  0.000000
10/29/2011	3:43:05 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	3:43:05 PM	Tube furnace set to 0
10/29/2011	3:43:07 PM	Helium valve closed
10/29/2011	3:43:07 PM	BCl3 valve closed
10/29/2011	3:43:07 PM	PH3 valve closed
10/29/2011	3:43:07 PM	SiCl4 pre valve closed
10/29/2011	3:43:07 PM	SiCl4 post valve closed
10/29/2011	3:43:07 PM	Main Vac valve closed
10/29/2011	3:43:07 PM	Bypass valve closed
10/29/2011	3:43:07 PM	H2 valve opened
10/29/2011	3:43:07 PM	Bubbler valve opened
10/29/2011	3:43:07 PM	Helium MFC set to  0.000000
10/29/2011	3:43:07 PM	H2 MFC set to  500.000000
10/29/2011	3:43:07 PM	BCl3 MFC set to  0.000000
10/29/2011	3:43:07 PM	PHl3 MFC set to  0.000000
10/29/2011	3:43:07 PM	SiCl4 MFC set to  0.000000
10/29/2011	3:43:07 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	3:43:07 PM	Tube furnace set to 1045
10/29/2011	4:03:07 PM	Helium valve closed
10/29/2011	4:03:07 PM	PH3 valve closed
10/29/2011	4:03:07 PM	Main Vac valve closed
10/29/2011	4:03:07 PM	Bypass valve closed
10/29/2011	4:03:07 PM	H2 valve opened
10/29/2011	4:03:07 PM	BCl3 valve opened
10/29/2011	4:03:07 PM	SiCl4 pre valve opened
10/29/2011	4:03:07 PM	SiCl4 post valve opened
10/29/2011	4:03:07 PM	Bubbler valve opened
10/29/2011	4:03:07 PM	Helium MFC set to  0.000000
10/29/2011	4:03:07 PM	H2 MFC set to  500.000000
10/29/2011	4:03:07 PM	BCl3 MFC set to  2.500000
10/29/2011	4:03:07 PM	PHl3 MFC set to  0.000000
10/29/2011	4:03:07 PM	SiCl4 MFC set to  50.000000
10/29/2011	4:03:07 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	4:03:07 PM	Tube furnace set to 1045
10/29/2011	4:23:07 PM	Helium valve closed
10/29/2011	4:23:07 PM	BCl3 valve closed
10/29/2011	4:23:07 PM	PH3 valve closed
10/29/2011	4:23:07 PM	SiCl4 pre valve closed
10/29/2011	4:23:07 PM	SiCl4 post valve closed
10/29/2011	4:23:07 PM	Main Vac valve closed
10/29/2011	4:23:07 PM	Bypass valve closed
10/29/2011	4:23:07 PM	H2 valve opened
10/29/2011	4:23:07 PM	Bubbler valve opened
10/29/2011	4:23:07 PM	Helium MFC set to  0.000000
10/29/2011	4:23:07 PM	H2 MFC set to  500.000000
10/29/2011	4:23:07 PM	BCl3 MFC set to  0.000000
10/29/2011	4:23:07 PM	PHl3 MFC set to  0.000000
10/29/2011	4:23:07 PM	SiCl4 MFC set to  0.000000
10/29/2011	4:23:07 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	4:23:07 PM	Tube furnace set to 750
10/29/2011	4:28:07 PM	H2 valve closed
10/29/2011	4:28:07 PM	BCl3 valve closed
10/29/2011	4:28:07 PM	PH3 valve closed
10/29/2011	4:28:07 PM	SiCl4 pre valve closed
10/29/2011	4:28:07 PM	SiCl4 post valve closed
10/29/2011	4:28:07 PM	Main Vac valve closed
10/29/2011	4:28:07 PM	Bypass valve closed
10/29/2011	4:28:07 PM	Helium valve opened
10/29/2011	4:28:07 PM	Bubbler valve opened
10/29/2011	4:28:07 PM	Helium MFC set to  500.000000
10/29/2011	4:28:07 PM	H2 MFC set to  0.000000
10/29/2011	4:28:07 PM	BCl3 MFC set to  0.000000
10/29/2011	4:28:07 PM	PHl3 MFC set to  0.000000
10/29/2011	4:28:07 PM	SiCl4 MFC set to  0.000000
10/29/2011	4:28:07 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	4:28:07 PM	Tube furnace set to 0
10/29/2011	4:48:07 PM	Helium valve closed
10/29/2011	4:48:07 PM	H2 valve closed
10/29/2011	4:48:07 PM	BCl3 valve closed
10/29/2011	4:48:07 PM	PH3 valve closed
10/29/2011	4:48:07 PM	SiCl4 pre valve closed
10/29/2011	4:48:07 PM	SiCl4 post valve closed
10/29/2011	4:48:07 PM	Main Vac valve closed
10/29/2011	4:48:07 PM	Bypass valve closed
10/29/2011	4:48:07 PM	Bubbler valve closed
10/29/2011	4:48:07 PM	Helium MFC set to  0.000000
10/29/2011	4:48:07 PM	H2 MFC set to  0.000000
10/29/2011	4:48:07 PM	BCl3 MFC set to  0.000000
10/29/2011	4:48:07 PM	PHl3 MFC set to  0.000000
10/29/2011	4:48:07 PM	SiCl4 MFC set to  0.000000
10/29/2011	4:48:07 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	4:48:07 PM	Tube furnace set to 0
10/29/2011	4:48:08 PM	Run finished at 4:48 PM
10/29/2011	6:00:22 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/29/2011	6:00:23 PM	Recipe started at 6:00 PM
10/29/2011	6:00:23 PM	Helium valve closed
10/29/2011	6:00:23 PM	H2 valve closed
10/29/2011	6:00:23 PM	BCl3 valve closed
10/29/2011	6:00:23 PM	PH3 valve closed
10/29/2011	6:00:23 PM	SiCl4 pre valve closed
10/29/2011	6:00:23 PM	SiCl4 post valve closed
10/29/2011	6:00:23 PM	Main Vac valve closed
10/29/2011	6:00:23 PM	Bypass valve closed
10/29/2011	6:00:23 PM	Bubbler valve closed
10/29/2011	6:00:23 PM	Helium MFC set to  0.000000
10/29/2011	6:00:23 PM	H2 MFC set to  0.000000
10/29/2011	6:00:23 PM	BCl3 MFC set to  0.000000
10/29/2011	6:00:23 PM	PHl3 MFC set to  0.000000
10/29/2011	6:00:23 PM	SiCl4 MFC set to  0.000000
10/29/2011	6:00:23 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	6:00:23 PM	Tube furnace set to 0
10/29/2011	6:00:26 PM	H2 valve closed
10/29/2011	6:00:26 PM	BCl3 valve closed
10/29/2011	6:00:26 PM	PH3 valve closed
10/29/2011	6:00:26 PM	SiCl4 pre valve closed
10/29/2011	6:00:26 PM	SiCl4 post valve closed
10/29/2011	6:00:26 PM	Main Vac valve closed
10/29/2011	6:00:26 PM	Bypass valve closed
10/29/2011	6:00:26 PM	Bubbler valve closed
10/29/2011	6:00:26 PM	Helium valve opened
10/29/2011	6:00:26 PM	Helium MFC set to  500.000000
10/29/2011	6:00:26 PM	H2 MFC set to  0.000000
10/29/2011	6:00:26 PM	BCl3 MFC set to  0.000000
10/29/2011	6:00:26 PM	PHl3 MFC set to  0.000000
10/29/2011	6:00:26 PM	SiCl4 MFC set to  0.000000
10/29/2011	6:00:26 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	6:00:26 PM	Tube furnace set to 0
10/29/2011	6:00:32 PM	Helium valve closed
10/29/2011	6:00:32 PM	H2 valve closed
10/29/2011	6:00:32 PM	BCl3 valve closed
10/29/2011	6:00:32 PM	PH3 valve closed
10/29/2011	6:00:32 PM	SiCl4 pre valve closed
10/29/2011	6:00:32 PM	SiCl4 post valve closed
10/29/2011	6:00:32 PM	Main Vac valve closed
10/29/2011	6:00:32 PM	Bypass valve closed
10/29/2011	6:00:32 PM	Bubbler valve closed
10/29/2011	6:00:32 PM	Helium MFC set to  0.000000
10/29/2011	6:00:32 PM	H2 MFC set to  0.000000
10/29/2011	6:00:32 PM	BCl3 MFC set to  0.000000
10/29/2011	6:00:32 PM	PHl3 MFC set to  0.000000
10/29/2011	6:00:32 PM	SiCl4 MFC set to  0.000000
10/29/2011	6:00:32 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	6:00:32 PM	Tube furnace set to 0
10/29/2011	6:00:33 PM	Run finished at 6:00 PM
10/29/2011	6:00:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/29/2011	6:04:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/29/2011	6:04:52 PM	Recipe started at 6:04 PM
10/29/2011	6:04:52 PM	Helium valve closed
10/29/2011	6:04:52 PM	H2 valve closed
10/29/2011	6:04:52 PM	BCl3 valve closed
10/29/2011	6:04:52 PM	PH3 valve closed
10/29/2011	6:04:52 PM	SiCl4 pre valve closed
10/29/2011	6:04:52 PM	SiCl4 post valve closed
10/29/2011	6:04:52 PM	Main Vac valve closed
10/29/2011	6:04:52 PM	Bubbler valve closed
10/29/2011	6:04:52 PM	Bypass valve opened
10/29/2011	6:04:52 PM	Helium MFC set to  0.000000
10/29/2011	6:04:52 PM	H2 MFC set to  0.000000
10/29/2011	6:04:52 PM	BCl3 MFC set to  0.000000
10/29/2011	6:04:52 PM	PHl3 MFC set to  0.000000
10/29/2011	6:04:52 PM	SiCl4 MFC set to  0.000000
10/29/2011	6:04:52 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	6:04:52 PM	Tube furnace set to 0
10/29/2011	6:05:56 PM	Helium valve closed
10/29/2011	6:05:56 PM	H2 valve closed
10/29/2011	6:05:56 PM	BCl3 valve closed
10/29/2011	6:05:56 PM	PH3 valve closed
10/29/2011	6:05:56 PM	SiCl4 pre valve closed
10/29/2011	6:05:56 PM	SiCl4 post valve closed
10/29/2011	6:05:56 PM	Main Vac valve closed
10/29/2011	6:05:56 PM	Bubbler valve closed
10/29/2011	6:05:56 PM	Bypass valve opened
10/29/2011	6:05:56 PM	Helium MFC set to  0.000000
10/29/2011	6:05:56 PM	H2 MFC set to  0.000000
10/29/2011	6:05:56 PM	BCl3 MFC set to  0.000000
10/29/2011	6:05:56 PM	PHl3 MFC set to  0.000000
10/29/2011	6:05:56 PM	SiCl4 MFC set to  0.000000
10/29/2011	6:05:56 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	6:05:56 PM	Tube furnace set to 0
10/29/2011	6:06:56 PM	Helium valve closed
10/29/2011	6:06:56 PM	H2 valve closed
10/29/2011	6:06:56 PM	BCl3 valve closed
10/29/2011	6:06:56 PM	PH3 valve closed
10/29/2011	6:06:56 PM	SiCl4 pre valve closed
10/29/2011	6:06:56 PM	SiCl4 post valve closed
10/29/2011	6:06:56 PM	Bypass valve closed
10/29/2011	6:06:56 PM	Bubbler valve closed
10/29/2011	6:06:56 PM	Main Vac valve opened
10/29/2011	6:06:56 PM	Helium MFC set to  0.000000
10/29/2011	6:06:56 PM	H2 MFC set to  0.000000
10/29/2011	6:06:56 PM	BCl3 MFC set to  0.000000
10/29/2011	6:06:56 PM	PHl3 MFC set to  0.000000
10/29/2011	6:06:56 PM	SiCl4 MFC set to  0.000000
10/29/2011	6:06:56 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	6:06:57 PM	Tube furnace set to 0
10/29/2011	6:06:58 PM	Run finished at 6:06 PM
10/29/2011	6:06:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/29/2011	7:20:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/29/2011	7:20:52 PM	Recipe started at 7:20 PM
10/29/2011	7:20:52 PM	Helium valve closed
10/29/2011	7:20:52 PM	H2 valve closed
10/29/2011	7:20:52 PM	BCl3 valve closed
10/29/2011	7:20:52 PM	PH3 valve closed
10/29/2011	7:20:52 PM	SiCl4 pre valve closed
10/29/2011	7:20:52 PM	SiCl4 post valve closed
10/29/2011	7:20:52 PM	Main Vac valve closed
10/29/2011	7:20:52 PM	Bubbler valve closed
10/29/2011	7:20:52 PM	Bypass valve opened
10/29/2011	7:20:52 PM	Helium MFC set to  0.000000
10/29/2011	7:20:52 PM	H2 MFC set to  0.000000
10/29/2011	7:20:52 PM	BCl3 MFC set to  0.000000
10/29/2011	7:20:52 PM	PHl3 MFC set to  0.000000
10/29/2011	7:20:52 PM	SiCl4 MFC set to  0.000000
10/29/2011	7:20:52 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	7:20:52 PM	Tube furnace set to 0
10/29/2011	7:20:53 PM	Helium valve closed
10/29/2011	7:20:53 PM	H2 valve closed
10/29/2011	7:20:53 PM	BCl3 valve closed
10/29/2011	7:20:53 PM	PH3 valve closed
10/29/2011	7:20:53 PM	SiCl4 pre valve closed
10/29/2011	7:20:53 PM	SiCl4 post valve closed
10/29/2011	7:20:53 PM	Main Vac valve closed
10/29/2011	7:20:53 PM	Bubbler valve closed
10/29/2011	7:20:53 PM	Bypass valve opened
10/29/2011	7:20:53 PM	Helium MFC set to  0.000000
10/29/2011	7:20:53 PM	H2 MFC set to  0.000000
10/29/2011	7:20:53 PM	BCl3 MFC set to  0.000000
10/29/2011	7:20:53 PM	PHl3 MFC set to  0.000000
10/29/2011	7:20:53 PM	SiCl4 MFC set to  0.000000
10/29/2011	7:20:53 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	7:20:53 PM	Tube furnace set to 0
10/29/2011	7:20:53 PM	Helium valve closed
10/29/2011	7:20:53 PM	H2 valve closed
10/29/2011	7:20:53 PM	BCl3 valve closed
10/29/2011	7:20:53 PM	PH3 valve closed
10/29/2011	7:20:53 PM	SiCl4 pre valve closed
10/29/2011	7:20:53 PM	SiCl4 post valve closed
10/29/2011	7:20:53 PM	Bypass valve closed
10/29/2011	7:20:53 PM	Bubbler valve closed
10/29/2011	7:20:53 PM	Main Vac valve opened
10/29/2011	7:20:53 PM	Helium MFC set to  0.000000
10/29/2011	7:20:53 PM	H2 MFC set to  0.000000
10/29/2011	7:20:53 PM	BCl3 MFC set to  0.000000
10/29/2011	7:20:53 PM	PHl3 MFC set to  0.000000
10/29/2011	7:20:53 PM	SiCl4 MFC set to  0.000000
10/29/2011	7:20:53 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	7:20:53 PM	Tube furnace set to 0
10/29/2011	7:20:54 PM	H2 valve closed
10/29/2011	7:20:54 PM	BCl3 valve closed
10/29/2011	7:20:54 PM	PH3 valve closed
10/29/2011	7:20:54 PM	SiCl4 pre valve closed
10/29/2011	7:20:54 PM	SiCl4 post valve closed
10/29/2011	7:20:54 PM	Bypass valve closed
10/29/2011	7:20:54 PM	Bubbler valve closed
10/29/2011	7:20:54 PM	Helium valve opened
10/29/2011	7:20:54 PM	Main Vac valve opened
10/29/2011	7:20:54 PM	Helium MFC set to  20.000000
10/29/2011	7:20:54 PM	H2 MFC set to  0.000000
10/29/2011	7:20:54 PM	BCl3 MFC set to  0.000000
10/29/2011	7:20:54 PM	PHl3 MFC set to  0.000000
10/29/2011	7:20:54 PM	SiCl4 MFC set to  0.000000
10/29/2011	7:20:54 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	7:20:54 PM	Tube furnace set to 0
10/29/2011	7:21:24 PM	Helium valve closed
10/29/2011	7:21:24 PM	H2 valve closed
10/29/2011	7:21:24 PM	BCl3 valve closed
10/29/2011	7:21:24 PM	PH3 valve closed
10/29/2011	7:21:24 PM	SiCl4 pre valve closed
10/29/2011	7:21:24 PM	SiCl4 post valve closed
10/29/2011	7:21:24 PM	Bypass valve closed
10/29/2011	7:21:24 PM	Bubbler valve closed
10/29/2011	7:21:24 PM	Main Vac valve opened
10/29/2011	7:21:24 PM	Helium MFC set to  0.000000
10/29/2011	7:21:24 PM	H2 MFC set to  0.000000
10/29/2011	7:21:24 PM	BCl3 MFC set to  0.000000
10/29/2011	7:21:24 PM	PHl3 MFC set to  0.000000
10/29/2011	7:21:24 PM	SiCl4 MFC set to  0.000000
10/29/2011	7:21:24 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	7:21:24 PM	Tube furnace set to 0
10/29/2011	7:21:54 PM	H2 valve closed
10/29/2011	7:21:54 PM	BCl3 valve closed
10/29/2011	7:21:54 PM	PH3 valve closed
10/29/2011	7:21:54 PM	SiCl4 pre valve closed
10/29/2011	7:21:54 PM	SiCl4 post valve closed
10/29/2011	7:21:54 PM	Bypass valve closed
10/29/2011	7:21:54 PM	Bubbler valve closed
10/29/2011	7:21:54 PM	Helium valve opened
10/29/2011	7:21:54 PM	Main Vac valve opened
10/29/2011	7:21:54 PM	Helium MFC set to  20.000000
10/29/2011	7:21:54 PM	H2 MFC set to  0.000000
10/29/2011	7:21:54 PM	BCl3 MFC set to  0.000000
10/29/2011	7:21:54 PM	PHl3 MFC set to  0.000000
10/29/2011	7:21:54 PM	SiCl4 MFC set to  0.000000
10/29/2011	7:21:54 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	7:21:54 PM	Tube furnace set to 0
10/29/2011	7:22:24 PM	Helium valve closed
10/29/2011	7:22:24 PM	H2 valve closed
10/29/2011	7:22:24 PM	BCl3 valve closed
10/29/2011	7:22:24 PM	PH3 valve closed
10/29/2011	7:22:24 PM	SiCl4 pre valve closed
10/29/2011	7:22:24 PM	SiCl4 post valve closed
10/29/2011	7:22:24 PM	Bypass valve closed
10/29/2011	7:22:24 PM	Bubbler valve closed
10/29/2011	7:22:24 PM	Main Vac valve opened
10/29/2011	7:22:24 PM	Helium MFC set to  0.000000
10/29/2011	7:22:24 PM	H2 MFC set to  0.000000
10/29/2011	7:22:24 PM	BCl3 MFC set to  0.000000
10/29/2011	7:22:24 PM	PHl3 MFC set to  0.000000
10/29/2011	7:22:24 PM	SiCl4 MFC set to  0.000000
10/29/2011	7:22:24 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	7:22:24 PM	Tube furnace set to 0
10/29/2011	7:22:54 PM	H2 valve closed
10/29/2011	7:22:54 PM	BCl3 valve closed
10/29/2011	7:22:54 PM	PH3 valve closed
10/29/2011	7:22:54 PM	SiCl4 pre valve closed
10/29/2011	7:22:54 PM	SiCl4 post valve closed
10/29/2011	7:22:54 PM	Bypass valve closed
10/29/2011	7:22:54 PM	Bubbler valve closed
10/29/2011	7:22:54 PM	Helium valve opened
10/29/2011	7:22:54 PM	Main Vac valve opened
10/29/2011	7:22:54 PM	Helium MFC set to  20.000000
10/29/2011	7:22:54 PM	H2 MFC set to  0.000000
10/29/2011	7:22:54 PM	BCl3 MFC set to  0.000000
10/29/2011	7:22:54 PM	PHl3 MFC set to  0.000000
10/29/2011	7:22:54 PM	SiCl4 MFC set to  0.000000
10/29/2011	7:22:54 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	7:22:55 PM	Tube furnace set to 0
10/29/2011	7:23:25 PM	Helium valve closed
10/29/2011	7:23:25 PM	H2 valve closed
10/29/2011	7:23:25 PM	BCl3 valve closed
10/29/2011	7:23:25 PM	PH3 valve closed
10/29/2011	7:23:25 PM	SiCl4 pre valve closed
10/29/2011	7:23:25 PM	SiCl4 post valve closed
10/29/2011	7:23:25 PM	Bypass valve closed
10/29/2011	7:23:25 PM	Bubbler valve closed
10/29/2011	7:23:25 PM	Main Vac valve opened
10/29/2011	7:23:25 PM	Helium MFC set to  0.000000
10/29/2011	7:23:25 PM	H2 MFC set to  0.000000
10/29/2011	7:23:25 PM	BCl3 MFC set to  0.000000
10/29/2011	7:23:25 PM	PHl3 MFC set to  0.000000
10/29/2011	7:23:25 PM	SiCl4 MFC set to  0.000000
10/29/2011	7:23:25 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	7:23:25 PM	Tube furnace set to 0
10/29/2011	7:23:55 PM	H2 valve closed
10/29/2011	7:23:55 PM	BCl3 valve closed
10/29/2011	7:23:55 PM	PH3 valve closed
10/29/2011	7:23:55 PM	SiCl4 pre valve closed
10/29/2011	7:23:55 PM	SiCl4 post valve closed
10/29/2011	7:23:55 PM	Bypass valve closed
10/29/2011	7:23:55 PM	Bubbler valve closed
10/29/2011	7:23:55 PM	Helium valve opened
10/29/2011	7:23:55 PM	Main Vac valve opened
10/29/2011	7:23:55 PM	Helium MFC set to  20.000000
10/29/2011	7:23:55 PM	H2 MFC set to  0.000000
10/29/2011	7:23:55 PM	BCl3 MFC set to  0.000000
10/29/2011	7:23:55 PM	PHl3 MFC set to  0.000000
10/29/2011	7:23:55 PM	SiCl4 MFC set to  0.000000
10/29/2011	7:23:55 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	7:23:55 PM	Tube furnace set to 0
10/29/2011	7:24:25 PM	Helium valve closed
10/29/2011	7:24:25 PM	H2 valve closed
10/29/2011	7:24:25 PM	BCl3 valve closed
10/29/2011	7:24:25 PM	PH3 valve closed
10/29/2011	7:24:25 PM	SiCl4 pre valve closed
10/29/2011	7:24:25 PM	SiCl4 post valve closed
10/29/2011	7:24:25 PM	Bypass valve closed
10/29/2011	7:24:25 PM	Bubbler valve closed
10/29/2011	7:24:25 PM	Main Vac valve opened
10/29/2011	7:24:25 PM	Helium MFC set to  0.000000
10/29/2011	7:24:25 PM	H2 MFC set to  0.000000
10/29/2011	7:24:25 PM	BCl3 MFC set to  0.000000
10/29/2011	7:24:25 PM	PHl3 MFC set to  0.000000
10/29/2011	7:24:25 PM	SiCl4 MFC set to  0.000000
10/29/2011	7:24:25 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	7:24:25 PM	Tube furnace set to 0
10/29/2011	7:24:55 PM	H2 valve closed
10/29/2011	7:24:55 PM	BCl3 valve closed
10/29/2011	7:24:55 PM	PH3 valve closed
10/29/2011	7:24:55 PM	SiCl4 pre valve closed
10/29/2011	7:24:55 PM	SiCl4 post valve closed
10/29/2011	7:24:55 PM	Bypass valve closed
10/29/2011	7:24:55 PM	Bubbler valve closed
10/29/2011	7:24:55 PM	Helium valve opened
10/29/2011	7:24:55 PM	Main Vac valve opened
10/29/2011	7:24:55 PM	Helium MFC set to  20.000000
10/29/2011	7:24:55 PM	H2 MFC set to  0.000000
10/29/2011	7:24:55 PM	BCl3 MFC set to  0.000000
10/29/2011	7:24:55 PM	PHl3 MFC set to  0.000000
10/29/2011	7:24:55 PM	SiCl4 MFC set to  0.000000
10/29/2011	7:24:55 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	7:24:55 PM	Tube furnace set to 0
10/29/2011	7:25:25 PM	Helium valve closed
10/29/2011	7:25:25 PM	H2 valve closed
10/29/2011	7:25:25 PM	BCl3 valve closed
10/29/2011	7:25:25 PM	PH3 valve closed
10/29/2011	7:25:25 PM	SiCl4 pre valve closed
10/29/2011	7:25:25 PM	SiCl4 post valve closed
10/29/2011	7:25:25 PM	Bypass valve closed
10/29/2011	7:25:25 PM	Bubbler valve closed
10/29/2011	7:25:25 PM	Main Vac valve opened
10/29/2011	7:25:25 PM	Helium MFC set to  0.000000
10/29/2011	7:25:25 PM	H2 MFC set to  0.000000
10/29/2011	7:25:25 PM	BCl3 MFC set to  0.000000
10/29/2011	7:25:25 PM	PHl3 MFC set to  0.000000
10/29/2011	7:25:25 PM	SiCl4 MFC set to  0.000000
10/29/2011	7:25:25 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	7:25:26 PM	Tube furnace set to 0
10/29/2011	7:25:56 PM	H2 valve closed
10/29/2011	7:25:56 PM	BCl3 valve closed
10/29/2011	7:25:56 PM	PH3 valve closed
10/29/2011	7:25:56 PM	SiCl4 pre valve closed
10/29/2011	7:25:56 PM	SiCl4 post valve closed
10/29/2011	7:25:56 PM	Bypass valve closed
10/29/2011	7:25:56 PM	Bubbler valve closed
10/29/2011	7:25:56 PM	Helium valve opened
10/29/2011	7:25:56 PM	Main Vac valve opened
10/29/2011	7:25:56 PM	Helium MFC set to  20.000000
10/29/2011	7:25:56 PM	H2 MFC set to  0.000000
10/29/2011	7:25:56 PM	BCl3 MFC set to  0.000000
10/29/2011	7:25:56 PM	PHl3 MFC set to  0.000000
10/29/2011	7:25:56 PM	SiCl4 MFC set to  0.000000
10/29/2011	7:25:56 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	7:25:56 PM	Tube furnace set to 0
10/29/2011	7:26:26 PM	Helium valve closed
10/29/2011	7:26:26 PM	H2 valve closed
10/29/2011	7:26:26 PM	BCl3 valve closed
10/29/2011	7:26:26 PM	PH3 valve closed
10/29/2011	7:26:26 PM	SiCl4 pre valve closed
10/29/2011	7:26:26 PM	SiCl4 post valve closed
10/29/2011	7:26:26 PM	Bypass valve closed
10/29/2011	7:26:26 PM	Bubbler valve closed
10/29/2011	7:26:26 PM	Main Vac valve opened
10/29/2011	7:26:26 PM	Helium MFC set to  0.000000
10/29/2011	7:26:26 PM	H2 MFC set to  0.000000
10/29/2011	7:26:26 PM	BCl3 MFC set to  0.000000
10/29/2011	7:26:26 PM	PHl3 MFC set to  0.000000
10/29/2011	7:26:26 PM	SiCl4 MFC set to  0.000000
10/29/2011	7:26:26 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	7:26:26 PM	Tube furnace set to 0
10/29/2011	7:26:56 PM	H2 valve closed
10/29/2011	7:26:56 PM	BCl3 valve closed
10/29/2011	7:26:56 PM	PH3 valve closed
10/29/2011	7:26:56 PM	SiCl4 pre valve closed
10/29/2011	7:26:56 PM	SiCl4 post valve closed
10/29/2011	7:26:56 PM	Bypass valve closed
10/29/2011	7:26:56 PM	Bubbler valve closed
10/29/2011	7:26:56 PM	Helium valve opened
10/29/2011	7:26:56 PM	Main Vac valve opened
10/29/2011	7:26:56 PM	Helium MFC set to  20.000000
10/29/2011	7:26:56 PM	H2 MFC set to  0.000000
10/29/2011	7:26:56 PM	BCl3 MFC set to  0.000000
10/29/2011	7:26:56 PM	PHl3 MFC set to  0.000000
10/29/2011	7:26:56 PM	SiCl4 MFC set to  0.000000
10/29/2011	7:26:56 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	7:26:56 PM	Tube furnace set to 0
10/29/2011	7:27:26 PM	Helium valve closed
10/29/2011	7:27:26 PM	H2 valve closed
10/29/2011	7:27:26 PM	BCl3 valve closed
10/29/2011	7:27:26 PM	PH3 valve closed
10/29/2011	7:27:26 PM	SiCl4 pre valve closed
10/29/2011	7:27:26 PM	SiCl4 post valve closed
10/29/2011	7:27:26 PM	Bypass valve closed
10/29/2011	7:27:26 PM	Bubbler valve closed
10/29/2011	7:27:26 PM	Main Vac valve opened
10/29/2011	7:27:26 PM	Helium MFC set to  0.000000
10/29/2011	7:27:26 PM	H2 MFC set to  0.000000
10/29/2011	7:27:26 PM	BCl3 MFC set to  0.000000
10/29/2011	7:27:26 PM	PHl3 MFC set to  0.000000
10/29/2011	7:27:26 PM	SiCl4 MFC set to  0.000000
10/29/2011	7:27:26 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	7:27:26 PM	Tube furnace set to 0
10/29/2011	7:27:56 PM	H2 valve closed
10/29/2011	7:27:56 PM	BCl3 valve closed
10/29/2011	7:27:56 PM	PH3 valve closed
10/29/2011	7:27:56 PM	SiCl4 pre valve closed
10/29/2011	7:27:56 PM	SiCl4 post valve closed
10/29/2011	7:27:56 PM	Bypass valve closed
10/29/2011	7:27:56 PM	Bubbler valve closed
10/29/2011	7:27:56 PM	Helium valve opened
10/29/2011	7:27:56 PM	Main Vac valve opened
10/29/2011	7:27:56 PM	Helium MFC set to  20.000000
10/29/2011	7:27:56 PM	H2 MFC set to  0.000000
10/29/2011	7:27:56 PM	BCl3 MFC set to  0.000000
10/29/2011	7:27:56 PM	PHl3 MFC set to  0.000000
10/29/2011	7:27:56 PM	SiCl4 MFC set to  0.000000
10/29/2011	7:27:56 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	7:27:57 PM	Tube furnace set to 0
10/29/2011	7:28:27 PM	Helium valve closed
10/29/2011	7:28:27 PM	H2 valve closed
10/29/2011	7:28:27 PM	BCl3 valve closed
10/29/2011	7:28:27 PM	PH3 valve closed
10/29/2011	7:28:27 PM	SiCl4 pre valve closed
10/29/2011	7:28:27 PM	SiCl4 post valve closed
10/29/2011	7:28:27 PM	Bypass valve closed
10/29/2011	7:28:27 PM	Bubbler valve closed
10/29/2011	7:28:27 PM	Main Vac valve opened
10/29/2011	7:28:27 PM	Helium MFC set to  0.000000
10/29/2011	7:28:27 PM	H2 MFC set to  0.000000
10/29/2011	7:28:27 PM	BCl3 MFC set to  0.000000
10/29/2011	7:28:27 PM	PHl3 MFC set to  0.000000
10/29/2011	7:28:27 PM	SiCl4 MFC set to  0.000000
10/29/2011	7:28:27 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	7:28:27 PM	Tube furnace set to 0
10/29/2011	7:28:57 PM	H2 valve closed
10/29/2011	7:28:57 PM	BCl3 valve closed
10/29/2011	7:28:57 PM	PH3 valve closed
10/29/2011	7:28:57 PM	SiCl4 pre valve closed
10/29/2011	7:28:57 PM	SiCl4 post valve closed
10/29/2011	7:28:57 PM	Bypass valve closed
10/29/2011	7:28:57 PM	Bubbler valve closed
10/29/2011	7:28:57 PM	Helium valve opened
10/29/2011	7:28:57 PM	Main Vac valve opened
10/29/2011	7:28:57 PM	Helium MFC set to  20.000000
10/29/2011	7:28:57 PM	H2 MFC set to  0.000000
10/29/2011	7:28:57 PM	BCl3 MFC set to  0.000000
10/29/2011	7:28:57 PM	PHl3 MFC set to  0.000000
10/29/2011	7:28:57 PM	SiCl4 MFC set to  0.000000
10/29/2011	7:28:57 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	7:28:57 PM	Tube furnace set to 0
10/29/2011	7:29:27 PM	Helium valve closed
10/29/2011	7:29:27 PM	H2 valve closed
10/29/2011	7:29:27 PM	BCl3 valve closed
10/29/2011	7:29:27 PM	PH3 valve closed
10/29/2011	7:29:27 PM	SiCl4 pre valve closed
10/29/2011	7:29:27 PM	SiCl4 post valve closed
10/29/2011	7:29:27 PM	Bypass valve closed
10/29/2011	7:29:27 PM	Bubbler valve closed
10/29/2011	7:29:27 PM	Main Vac valve opened
10/29/2011	7:29:27 PM	Helium MFC set to  0.000000
10/29/2011	7:29:27 PM	H2 MFC set to  0.000000
10/29/2011	7:29:27 PM	BCl3 MFC set to  0.000000
10/29/2011	7:29:27 PM	PHl3 MFC set to  0.000000
10/29/2011	7:29:27 PM	SiCl4 MFC set to  0.000000
10/29/2011	7:29:27 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	7:29:27 PM	Tube furnace set to 0
10/29/2011	7:29:57 PM	H2 valve closed
10/29/2011	7:29:57 PM	BCl3 valve closed
10/29/2011	7:29:57 PM	PH3 valve closed
10/29/2011	7:29:57 PM	SiCl4 pre valve closed
10/29/2011	7:29:57 PM	SiCl4 post valve closed
10/29/2011	7:29:57 PM	Bypass valve closed
10/29/2011	7:29:57 PM	Bubbler valve closed
10/29/2011	7:29:57 PM	Helium valve opened
10/29/2011	7:29:57 PM	Main Vac valve opened
10/29/2011	7:29:57 PM	Helium MFC set to  20.000000
10/29/2011	7:29:57 PM	H2 MFC set to  0.000000
10/29/2011	7:29:57 PM	BCl3 MFC set to  0.000000
10/29/2011	7:29:57 PM	PHl3 MFC set to  0.000000
10/29/2011	7:29:57 PM	SiCl4 MFC set to  0.000000
10/29/2011	7:29:57 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	7:29:57 PM	Tube furnace set to 0
10/29/2011	7:30:27 PM	Helium valve closed
10/29/2011	7:30:27 PM	H2 valve closed
10/29/2011	7:30:27 PM	BCl3 valve closed
10/29/2011	7:30:27 PM	PH3 valve closed
10/29/2011	7:30:27 PM	SiCl4 pre valve closed
10/29/2011	7:30:27 PM	SiCl4 post valve closed
10/29/2011	7:30:27 PM	Bypass valve closed
10/29/2011	7:30:27 PM	Bubbler valve closed
10/29/2011	7:30:27 PM	Main Vac valve opened
10/29/2011	7:30:27 PM	Helium MFC set to  0.000000
10/29/2011	7:30:27 PM	H2 MFC set to  0.000000
10/29/2011	7:30:27 PM	BCl3 MFC set to  0.000000
10/29/2011	7:30:27 PM	PHl3 MFC set to  0.000000
10/29/2011	7:30:27 PM	SiCl4 MFC set to  0.000000
10/29/2011	7:30:27 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	7:30:28 PM	Tube furnace set to 0
10/29/2011	7:30:29 PM	Run finished at 7:30 PM
10/29/2011	7:30:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/29/2011	7:31:09 PM	Main Vac valve closed
10/29/2011	7:31:31 PM	Main Vac valve opened
10/29/2011	7:32:28 PM	Recipe started at 7:32 PM
10/29/2011	7:32:28 PM	Helium valve closed
10/29/2011	7:32:28 PM	H2 valve closed
10/29/2011	7:32:28 PM	BCl3 valve closed
10/29/2011	7:32:28 PM	PH3 valve closed
10/29/2011	7:32:28 PM	SiCl4 pre valve closed
10/29/2011	7:32:28 PM	SiCl4 post valve closed
10/29/2011	7:32:28 PM	Main Vac valve closed
10/29/2011	7:32:28 PM	Bypass valve closed
10/29/2011	7:32:28 PM	Bubbler valve closed
10/29/2011	7:32:28 PM	Helium MFC set to  0.000000
10/29/2011	7:32:28 PM	H2 MFC set to  0.000000
10/29/2011	7:32:28 PM	BCl3 MFC set to  0.000000
10/29/2011	7:32:28 PM	PHl3 MFC set to  0.000000
10/29/2011	7:32:28 PM	SiCl4 MFC set to  0.000000
10/29/2011	7:32:28 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	7:32:29 PM	Tube furnace set to 0
10/29/2011	7:32:32 PM	Helium valve closed
10/29/2011	7:32:32 PM	BCl3 valve closed
10/29/2011	7:32:32 PM	PH3 valve closed
10/29/2011	7:32:32 PM	SiCl4 pre valve closed
10/29/2011	7:32:32 PM	SiCl4 post valve closed
10/29/2011	7:32:32 PM	Main Vac valve closed
10/29/2011	7:32:32 PM	Bypass valve closed
10/29/2011	7:32:32 PM	Bubbler valve closed
10/29/2011	7:32:32 PM	H2 valve opened
10/29/2011	7:32:32 PM	Helium MFC set to  0.000000
10/29/2011	7:32:32 PM	H2 MFC set to  500.000000
10/29/2011	7:32:32 PM	BCl3 MFC set to  0.000000
10/29/2011	7:32:32 PM	PHl3 MFC set to  0.000000
10/29/2011	7:32:32 PM	SiCl4 MFC set to  0.000000
10/29/2011	7:32:32 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	7:32:32 PM	Tube furnace set to 0
10/29/2011	7:33:40 PM	Helium valve closed
10/29/2011	7:33:40 PM	BCl3 valve closed
10/29/2011	7:33:40 PM	PH3 valve closed
10/29/2011	7:33:40 PM	SiCl4 pre valve closed
10/29/2011	7:33:40 PM	SiCl4 post valve closed
10/29/2011	7:33:40 PM	Main Vac valve closed
10/29/2011	7:33:40 PM	Bypass valve closed
10/29/2011	7:33:40 PM	H2 valve opened
10/29/2011	7:33:40 PM	Bubbler valve opened
10/29/2011	7:33:40 PM	Helium MFC set to  0.000000
10/29/2011	7:33:40 PM	H2 MFC set to  500.000000
10/29/2011	7:33:40 PM	BCl3 MFC set to  0.000000
10/29/2011	7:33:40 PM	PHl3 MFC set to  0.000000
10/29/2011	7:33:40 PM	SiCl4 MFC set to  0.000000
10/29/2011	7:33:40 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	7:33:40 PM	Tube furnace set to 0
10/29/2011	7:33:41 PM	Helium valve closed
10/29/2011	7:33:41 PM	BCl3 valve closed
10/29/2011	7:33:41 PM	PH3 valve closed
10/29/2011	7:33:41 PM	SiCl4 pre valve closed
10/29/2011	7:33:41 PM	SiCl4 post valve closed
10/29/2011	7:33:41 PM	Main Vac valve closed
10/29/2011	7:33:41 PM	Bypass valve closed
10/29/2011	7:33:41 PM	H2 valve opened
10/29/2011	7:33:41 PM	Bubbler valve opened
10/29/2011	7:33:41 PM	Helium MFC set to  0.000000
10/29/2011	7:33:41 PM	H2 MFC set to  500.000000
10/29/2011	7:33:41 PM	BCl3 MFC set to  0.000000
10/29/2011	7:33:41 PM	PHl3 MFC set to  0.000000
10/29/2011	7:33:41 PM	SiCl4 MFC set to  0.000000
10/29/2011	7:33:41 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	7:33:41 PM	Tube furnace set to 1048
10/29/2011	7:53:41 PM	Helium valve closed
10/29/2011	7:53:41 PM	PH3 valve closed
10/29/2011	7:53:41 PM	Main Vac valve closed
10/29/2011	7:53:41 PM	Bypass valve closed
10/29/2011	7:53:41 PM	H2 valve opened
10/29/2011	7:53:41 PM	BCl3 valve opened
10/29/2011	7:53:41 PM	SiCl4 pre valve opened
10/29/2011	7:53:41 PM	SiCl4 post valve opened
10/29/2011	7:53:41 PM	Bubbler valve opened
10/29/2011	7:53:41 PM	Helium MFC set to  0.000000
10/29/2011	7:53:41 PM	H2 MFC set to  500.000000
10/29/2011	7:53:41 PM	BCl3 MFC set to  2.500000
10/29/2011	7:53:41 PM	PHl3 MFC set to  0.000000
10/29/2011	7:53:41 PM	SiCl4 MFC set to  50.000000
10/29/2011	7:53:41 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	7:53:41 PM	Tube furnace set to 1045
10/29/2011	8:18:41 PM	Helium valve closed
10/29/2011	8:18:41 PM	BCl3 valve closed
10/29/2011	8:18:41 PM	PH3 valve closed
10/29/2011	8:18:41 PM	SiCl4 pre valve closed
10/29/2011	8:18:41 PM	SiCl4 post valve closed
10/29/2011	8:18:41 PM	Main Vac valve closed
10/29/2011	8:18:41 PM	Bypass valve closed
10/29/2011	8:18:41 PM	H2 valve opened
10/29/2011	8:18:41 PM	Bubbler valve opened
10/29/2011	8:18:41 PM	Helium MFC set to  0.000000
10/29/2011	8:18:41 PM	H2 MFC set to  500.000000
10/29/2011	8:18:41 PM	BCl3 MFC set to  0.000000
10/29/2011	8:18:41 PM	PHl3 MFC set to  0.000000
10/29/2011	8:18:41 PM	SiCl4 MFC set to  0.000000
10/29/2011	8:18:41 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	8:18:41 PM	Tube furnace set to 1048
10/29/2011	8:23:41 PM	H2 valve closed
10/29/2011	8:23:41 PM	BCl3 valve closed
10/29/2011	8:23:41 PM	PH3 valve closed
10/29/2011	8:23:41 PM	SiCl4 pre valve closed
10/29/2011	8:23:41 PM	SiCl4 post valve closed
10/29/2011	8:23:41 PM	Main Vac valve closed
10/29/2011	8:23:41 PM	Bypass valve closed
10/29/2011	8:23:41 PM	Helium valve opened
10/29/2011	8:23:41 PM	Bubbler valve opened
10/29/2011	8:23:41 PM	Helium MFC set to  500.000000
10/29/2011	8:23:41 PM	H2 MFC set to  0.000000
10/29/2011	8:23:41 PM	BCl3 MFC set to  0.000000
10/29/2011	8:23:41 PM	PHl3 MFC set to  0.000000
10/29/2011	8:23:41 PM	SiCl4 MFC set to  0.000000
10/29/2011	8:23:41 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	8:23:41 PM	Tube furnace set to 0
10/29/2011	8:43:41 PM	Helium valve closed
10/29/2011	8:43:41 PM	H2 valve closed
10/29/2011	8:43:41 PM	BCl3 valve closed
10/29/2011	8:43:41 PM	PH3 valve closed
10/29/2011	8:43:41 PM	SiCl4 pre valve closed
10/29/2011	8:43:41 PM	SiCl4 post valve closed
10/29/2011	8:43:41 PM	Main Vac valve closed
10/29/2011	8:43:41 PM	Bypass valve closed
10/29/2011	8:43:41 PM	Bubbler valve closed
10/29/2011	8:43:41 PM	Helium MFC set to  0.000000
10/29/2011	8:43:41 PM	H2 MFC set to  0.000000
10/29/2011	8:43:41 PM	BCl3 MFC set to  0.000000
10/29/2011	8:43:41 PM	PHl3 MFC set to  0.000000
10/29/2011	8:43:41 PM	SiCl4 MFC set to  0.000000
10/29/2011	8:43:41 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	8:43:42 PM	Tube furnace set to 0
10/29/2011	8:43:43 PM	Run finished at 8:43 PM
10/29/2011	9:02:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/29/2011	9:02:21 PM	Recipe started at 9:02 PM
10/29/2011	9:02:21 PM	Helium valve closed
10/29/2011	9:02:21 PM	H2 valve closed
10/29/2011	9:02:21 PM	BCl3 valve closed
10/29/2011	9:02:21 PM	PH3 valve closed
10/29/2011	9:02:21 PM	SiCl4 pre valve closed
10/29/2011	9:02:21 PM	SiCl4 post valve closed
10/29/2011	9:02:21 PM	Main Vac valve closed
10/29/2011	9:02:21 PM	Bypass valve closed
10/29/2011	9:02:21 PM	Bubbler valve closed
10/29/2011	9:02:21 PM	Helium MFC set to  0.000000
10/29/2011	9:02:21 PM	H2 MFC set to  0.000000
10/29/2011	9:02:21 PM	BCl3 MFC set to  0.000000
10/29/2011	9:02:21 PM	PHl3 MFC set to  0.000000
10/29/2011	9:02:21 PM	SiCl4 MFC set to  0.000000
10/29/2011	9:02:21 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	9:02:21 PM	Tube furnace set to 0
10/29/2011	9:02:24 PM	H2 valve closed
10/29/2011	9:02:24 PM	BCl3 valve closed
10/29/2011	9:02:24 PM	PH3 valve closed
10/29/2011	9:02:24 PM	SiCl4 pre valve closed
10/29/2011	9:02:24 PM	SiCl4 post valve closed
10/29/2011	9:02:24 PM	Main Vac valve closed
10/29/2011	9:02:24 PM	Bypass valve closed
10/29/2011	9:02:24 PM	Bubbler valve closed
10/29/2011	9:02:24 PM	Helium valve opened
10/29/2011	9:02:24 PM	Helium MFC set to  500.000000
10/29/2011	9:02:24 PM	H2 MFC set to  0.000000
10/29/2011	9:02:24 PM	BCl3 MFC set to  0.000000
10/29/2011	9:02:24 PM	PHl3 MFC set to  0.000000
10/29/2011	9:02:24 PM	SiCl4 MFC set to  0.000000
10/29/2011	9:02:24 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	9:02:24 PM	Tube furnace set to 0
10/29/2011	9:02:28 PM	Helium valve closed
10/29/2011	9:02:28 PM	H2 valve closed
10/29/2011	9:02:28 PM	BCl3 valve closed
10/29/2011	9:02:28 PM	PH3 valve closed
10/29/2011	9:02:28 PM	SiCl4 pre valve closed
10/29/2011	9:02:28 PM	SiCl4 post valve closed
10/29/2011	9:02:28 PM	Main Vac valve closed
10/29/2011	9:02:28 PM	Bypass valve closed
10/29/2011	9:02:28 PM	Bubbler valve closed
10/29/2011	9:02:28 PM	Helium MFC set to  0.000000
10/29/2011	9:02:28 PM	H2 MFC set to  0.000000
10/29/2011	9:02:28 PM	BCl3 MFC set to  0.000000
10/29/2011	9:02:28 PM	PHl3 MFC set to  0.000000
10/29/2011	9:02:28 PM	SiCl4 MFC set to  0.000000
10/29/2011	9:02:28 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	9:02:28 PM	Tube furnace set to 0
10/29/2011	9:02:29 PM	Run finished at 9:02 PM
10/29/2011	9:02:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/29/2011	9:05:22 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/29/2011	9:05:23 PM	Recipe started at 9:05 PM
10/29/2011	9:05:23 PM	Helium valve closed
10/29/2011	9:05:23 PM	H2 valve closed
10/29/2011	9:05:23 PM	BCl3 valve closed
10/29/2011	9:05:23 PM	PH3 valve closed
10/29/2011	9:05:23 PM	SiCl4 pre valve closed
10/29/2011	9:05:23 PM	SiCl4 post valve closed
10/29/2011	9:05:23 PM	Main Vac valve closed
10/29/2011	9:05:23 PM	Bubbler valve closed
10/29/2011	9:05:23 PM	Bypass valve opened
10/29/2011	9:05:23 PM	Helium MFC set to  0.000000
10/29/2011	9:05:23 PM	H2 MFC set to  0.000000
10/29/2011	9:05:23 PM	BCl3 MFC set to  0.000000
10/29/2011	9:05:23 PM	PHl3 MFC set to  0.000000
10/29/2011	9:05:23 PM	SiCl4 MFC set to  0.000000
10/29/2011	9:05:23 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	9:05:23 PM	Tube furnace set to 0
10/29/2011	9:06:24 PM	Helium valve closed
10/29/2011	9:06:24 PM	H2 valve closed
10/29/2011	9:06:24 PM	BCl3 valve closed
10/29/2011	9:06:24 PM	PH3 valve closed
10/29/2011	9:06:24 PM	SiCl4 pre valve closed
10/29/2011	9:06:24 PM	SiCl4 post valve closed
10/29/2011	9:06:24 PM	Main Vac valve closed
10/29/2011	9:06:24 PM	Bubbler valve closed
10/29/2011	9:06:24 PM	Bypass valve opened
10/29/2011	9:06:24 PM	Helium MFC set to  0.000000
10/29/2011	9:06:24 PM	H2 MFC set to  0.000000
10/29/2011	9:06:24 PM	BCl3 MFC set to  0.000000
10/29/2011	9:06:24 PM	PHl3 MFC set to  0.000000
10/29/2011	9:06:24 PM	SiCl4 MFC set to  0.000000
10/29/2011	9:06:24 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	9:06:24 PM	Tube furnace set to 0
10/29/2011	9:07:24 PM	Helium valve closed
10/29/2011	9:07:24 PM	H2 valve closed
10/29/2011	9:07:24 PM	BCl3 valve closed
10/29/2011	9:07:24 PM	PH3 valve closed
10/29/2011	9:07:24 PM	SiCl4 pre valve closed
10/29/2011	9:07:24 PM	SiCl4 post valve closed
10/29/2011	9:07:24 PM	Bypass valve closed
10/29/2011	9:07:24 PM	Bubbler valve closed
10/29/2011	9:07:24 PM	Main Vac valve opened
10/29/2011	9:07:24 PM	Helium MFC set to  0.000000
10/29/2011	9:07:24 PM	H2 MFC set to  0.000000
10/29/2011	9:07:24 PM	BCl3 MFC set to  0.000000
10/29/2011	9:07:24 PM	PHl3 MFC set to  0.000000
10/29/2011	9:07:24 PM	SiCl4 MFC set to  0.000000
10/29/2011	9:07:24 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	9:07:24 PM	Tube furnace set to 0
10/29/2011	9:07:25 PM	Run finished at 9:07 PM
10/29/2011	9:07:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/29/2011	10:21:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/29/2011	10:21:48 PM	Recipe started at 10:21 PM
10/29/2011	10:21:48 PM	Helium valve closed
10/29/2011	10:21:48 PM	H2 valve closed
10/29/2011	10:21:48 PM	BCl3 valve closed
10/29/2011	10:21:48 PM	PH3 valve closed
10/29/2011	10:21:48 PM	SiCl4 pre valve closed
10/29/2011	10:21:48 PM	SiCl4 post valve closed
10/29/2011	10:21:48 PM	Main Vac valve closed
10/29/2011	10:21:48 PM	Bubbler valve closed
10/29/2011	10:21:48 PM	Bypass valve opened
10/29/2011	10:21:48 PM	Helium MFC set to  0.000000
10/29/2011	10:21:48 PM	H2 MFC set to  0.000000
10/29/2011	10:21:48 PM	BCl3 MFC set to  0.000000
10/29/2011	10:21:48 PM	PHl3 MFC set to  0.000000
10/29/2011	10:21:48 PM	SiCl4 MFC set to  0.000000
10/29/2011	10:21:48 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	10:21:48 PM	Tube furnace set to 0
10/29/2011	10:21:49 PM	Helium valve closed
10/29/2011	10:21:49 PM	H2 valve closed
10/29/2011	10:21:49 PM	BCl3 valve closed
10/29/2011	10:21:49 PM	PH3 valve closed
10/29/2011	10:21:49 PM	SiCl4 pre valve closed
10/29/2011	10:21:49 PM	SiCl4 post valve closed
10/29/2011	10:21:49 PM	Main Vac valve closed
10/29/2011	10:21:49 PM	Bubbler valve closed
10/29/2011	10:21:49 PM	Bypass valve opened
10/29/2011	10:21:49 PM	Helium MFC set to  0.000000
10/29/2011	10:21:49 PM	H2 MFC set to  0.000000
10/29/2011	10:21:49 PM	BCl3 MFC set to  0.000000
10/29/2011	10:21:49 PM	PHl3 MFC set to  0.000000
10/29/2011	10:21:49 PM	SiCl4 MFC set to  0.000000
10/29/2011	10:21:49 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	10:21:49 PM	Tube furnace set to 0
10/29/2011	10:21:50 PM	Helium valve closed
10/29/2011	10:21:50 PM	H2 valve closed
10/29/2011	10:21:50 PM	BCl3 valve closed
10/29/2011	10:21:50 PM	PH3 valve closed
10/29/2011	10:21:50 PM	SiCl4 pre valve closed
10/29/2011	10:21:50 PM	SiCl4 post valve closed
10/29/2011	10:21:50 PM	Bypass valve closed
10/29/2011	10:21:50 PM	Bubbler valve closed
10/29/2011	10:21:50 PM	Main Vac valve opened
10/29/2011	10:21:50 PM	Helium MFC set to  0.000000
10/29/2011	10:21:50 PM	H2 MFC set to  0.000000
10/29/2011	10:21:50 PM	BCl3 MFC set to  0.000000
10/29/2011	10:21:50 PM	PHl3 MFC set to  0.000000
10/29/2011	10:21:50 PM	SiCl4 MFC set to  0.000000
10/29/2011	10:21:50 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	10:21:50 PM	Tube furnace set to 0
10/29/2011	10:21:55 PM	H2 valve closed
10/29/2011	10:21:55 PM	BCl3 valve closed
10/29/2011	10:21:55 PM	PH3 valve closed
10/29/2011	10:21:55 PM	SiCl4 pre valve closed
10/29/2011	10:21:55 PM	SiCl4 post valve closed
10/29/2011	10:21:55 PM	Bypass valve closed
10/29/2011	10:21:55 PM	Bubbler valve closed
10/29/2011	10:21:55 PM	Helium valve opened
10/29/2011	10:21:55 PM	Main Vac valve opened
10/29/2011	10:21:55 PM	Helium MFC set to  20.000000
10/29/2011	10:21:55 PM	H2 MFC set to  0.000000
10/29/2011	10:21:55 PM	BCl3 MFC set to  0.000000
10/29/2011	10:21:55 PM	PHl3 MFC set to  0.000000
10/29/2011	10:21:55 PM	SiCl4 MFC set to  0.000000
10/29/2011	10:21:55 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	10:21:55 PM	Tube furnace set to 0
10/29/2011	10:22:25 PM	Helium valve closed
10/29/2011	10:22:25 PM	H2 valve closed
10/29/2011	10:22:25 PM	BCl3 valve closed
10/29/2011	10:22:25 PM	PH3 valve closed
10/29/2011	10:22:25 PM	SiCl4 pre valve closed
10/29/2011	10:22:25 PM	SiCl4 post valve closed
10/29/2011	10:22:25 PM	Bypass valve closed
10/29/2011	10:22:25 PM	Bubbler valve closed
10/29/2011	10:22:25 PM	Main Vac valve opened
10/29/2011	10:22:25 PM	Helium MFC set to  0.000000
10/29/2011	10:22:25 PM	H2 MFC set to  0.000000
10/29/2011	10:22:25 PM	BCl3 MFC set to  0.000000
10/29/2011	10:22:25 PM	PHl3 MFC set to  0.000000
10/29/2011	10:22:25 PM	SiCl4 MFC set to  0.000000
10/29/2011	10:22:25 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	10:22:25 PM	Tube furnace set to 0
10/29/2011	10:22:55 PM	H2 valve closed
10/29/2011	10:22:55 PM	BCl3 valve closed
10/29/2011	10:22:55 PM	PH3 valve closed
10/29/2011	10:22:55 PM	SiCl4 pre valve closed
10/29/2011	10:22:55 PM	SiCl4 post valve closed
10/29/2011	10:22:55 PM	Bypass valve closed
10/29/2011	10:22:55 PM	Bubbler valve closed
10/29/2011	10:22:55 PM	Helium valve opened
10/29/2011	10:22:56 PM	Main Vac valve opened
10/29/2011	10:22:56 PM	Helium MFC set to  20.000000
10/29/2011	10:22:56 PM	H2 MFC set to  0.000000
10/29/2011	10:22:56 PM	BCl3 MFC set to  0.000000
10/29/2011	10:22:56 PM	PHl3 MFC set to  0.000000
10/29/2011	10:22:56 PM	SiCl4 MFC set to  0.000000
10/29/2011	10:22:56 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	10:22:56 PM	Tube furnace set to 0
10/29/2011	10:23:26 PM	Helium valve closed
10/29/2011	10:23:26 PM	H2 valve closed
10/29/2011	10:23:26 PM	BCl3 valve closed
10/29/2011	10:23:26 PM	PH3 valve closed
10/29/2011	10:23:26 PM	SiCl4 pre valve closed
10/29/2011	10:23:26 PM	SiCl4 post valve closed
10/29/2011	10:23:26 PM	Bypass valve closed
10/29/2011	10:23:26 PM	Bubbler valve closed
10/29/2011	10:23:26 PM	Main Vac valve opened
10/29/2011	10:23:26 PM	Helium MFC set to  0.000000
10/29/2011	10:23:26 PM	H2 MFC set to  0.000000
10/29/2011	10:23:26 PM	BCl3 MFC set to  0.000000
10/29/2011	10:23:26 PM	PHl3 MFC set to  0.000000
10/29/2011	10:23:26 PM	SiCl4 MFC set to  0.000000
10/29/2011	10:23:26 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	10:23:26 PM	Tube furnace set to 0
10/29/2011	10:23:56 PM	H2 valve closed
10/29/2011	10:23:56 PM	BCl3 valve closed
10/29/2011	10:23:56 PM	PH3 valve closed
10/29/2011	10:23:56 PM	SiCl4 pre valve closed
10/29/2011	10:23:56 PM	SiCl4 post valve closed
10/29/2011	10:23:56 PM	Bypass valve closed
10/29/2011	10:23:56 PM	Bubbler valve closed
10/29/2011	10:23:56 PM	Helium valve opened
10/29/2011	10:23:56 PM	Main Vac valve opened
10/29/2011	10:23:56 PM	Helium MFC set to  20.000000
10/29/2011	10:23:56 PM	H2 MFC set to  0.000000
10/29/2011	10:23:56 PM	BCl3 MFC set to  0.000000
10/29/2011	10:23:56 PM	PHl3 MFC set to  0.000000
10/29/2011	10:23:56 PM	SiCl4 MFC set to  0.000000
10/29/2011	10:23:56 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	10:23:56 PM	Tube furnace set to 0
10/29/2011	10:24:26 PM	Helium valve closed
10/29/2011	10:24:26 PM	H2 valve closed
10/29/2011	10:24:26 PM	BCl3 valve closed
10/29/2011	10:24:26 PM	PH3 valve closed
10/29/2011	10:24:26 PM	SiCl4 pre valve closed
10/29/2011	10:24:26 PM	SiCl4 post valve closed
10/29/2011	10:24:26 PM	Bypass valve closed
10/29/2011	10:24:26 PM	Bubbler valve closed
10/29/2011	10:24:26 PM	Main Vac valve opened
10/29/2011	10:24:26 PM	Helium MFC set to  0.000000
10/29/2011	10:24:26 PM	H2 MFC set to  0.000000
10/29/2011	10:24:26 PM	BCl3 MFC set to  0.000000
10/29/2011	10:24:26 PM	PHl3 MFC set to  0.000000
10/29/2011	10:24:26 PM	SiCl4 MFC set to  0.000000
10/29/2011	10:24:26 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	10:24:26 PM	Tube furnace set to 0
10/29/2011	10:24:56 PM	H2 valve closed
10/29/2011	10:24:56 PM	BCl3 valve closed
10/29/2011	10:24:56 PM	PH3 valve closed
10/29/2011	10:24:56 PM	SiCl4 pre valve closed
10/29/2011	10:24:56 PM	SiCl4 post valve closed
10/29/2011	10:24:56 PM	Bypass valve closed
10/29/2011	10:24:56 PM	Bubbler valve closed
10/29/2011	10:24:56 PM	Helium valve opened
10/29/2011	10:24:56 PM	Main Vac valve opened
10/29/2011	10:24:56 PM	Helium MFC set to  20.000000
10/29/2011	10:24:56 PM	H2 MFC set to  0.000000
10/29/2011	10:24:56 PM	BCl3 MFC set to  0.000000
10/29/2011	10:24:56 PM	PHl3 MFC set to  0.000000
10/29/2011	10:24:56 PM	SiCl4 MFC set to  0.000000
10/29/2011	10:24:56 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	10:24:56 PM	Tube furnace set to 0
10/29/2011	10:25:26 PM	Helium valve closed
10/29/2011	10:25:26 PM	H2 valve closed
10/29/2011	10:25:26 PM	BCl3 valve closed
10/29/2011	10:25:26 PM	PH3 valve closed
10/29/2011	10:25:26 PM	SiCl4 pre valve closed
10/29/2011	10:25:26 PM	SiCl4 post valve closed
10/29/2011	10:25:26 PM	Bypass valve closed
10/29/2011	10:25:26 PM	Bubbler valve closed
10/29/2011	10:25:26 PM	Main Vac valve opened
10/29/2011	10:25:26 PM	Helium MFC set to  0.000000
10/29/2011	10:25:26 PM	H2 MFC set to  0.000000
10/29/2011	10:25:26 PM	BCl3 MFC set to  0.000000
10/29/2011	10:25:26 PM	PHl3 MFC set to  0.000000
10/29/2011	10:25:26 PM	SiCl4 MFC set to  0.000000
10/29/2011	10:25:26 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	10:25:27 PM	Tube furnace set to 0
10/29/2011	10:25:57 PM	H2 valve closed
10/29/2011	10:25:57 PM	BCl3 valve closed
10/29/2011	10:25:57 PM	PH3 valve closed
10/29/2011	10:25:57 PM	SiCl4 pre valve closed
10/29/2011	10:25:57 PM	SiCl4 post valve closed
10/29/2011	10:25:57 PM	Bypass valve closed
10/29/2011	10:25:57 PM	Bubbler valve closed
10/29/2011	10:25:57 PM	Helium valve opened
10/29/2011	10:25:57 PM	Main Vac valve opened
10/29/2011	10:25:57 PM	Helium MFC set to  20.000000
10/29/2011	10:25:57 PM	H2 MFC set to  0.000000
10/29/2011	10:25:57 PM	BCl3 MFC set to  0.000000
10/29/2011	10:25:57 PM	PHl3 MFC set to  0.000000
10/29/2011	10:25:57 PM	SiCl4 MFC set to  0.000000
10/29/2011	10:25:57 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	10:25:57 PM	Tube furnace set to 0
10/29/2011	10:26:27 PM	Helium valve closed
10/29/2011	10:26:27 PM	H2 valve closed
10/29/2011	10:26:27 PM	BCl3 valve closed
10/29/2011	10:26:27 PM	PH3 valve closed
10/29/2011	10:26:27 PM	SiCl4 pre valve closed
10/29/2011	10:26:27 PM	SiCl4 post valve closed
10/29/2011	10:26:27 PM	Bypass valve closed
10/29/2011	10:26:27 PM	Bubbler valve closed
10/29/2011	10:26:27 PM	Main Vac valve opened
10/29/2011	10:26:27 PM	Helium MFC set to  0.000000
10/29/2011	10:26:27 PM	H2 MFC set to  0.000000
10/29/2011	10:26:27 PM	BCl3 MFC set to  0.000000
10/29/2011	10:26:27 PM	PHl3 MFC set to  0.000000
10/29/2011	10:26:27 PM	SiCl4 MFC set to  0.000000
10/29/2011	10:26:27 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	10:26:27 PM	Tube furnace set to 0
10/29/2011	10:26:57 PM	H2 valve closed
10/29/2011	10:26:57 PM	BCl3 valve closed
10/29/2011	10:26:57 PM	PH3 valve closed
10/29/2011	10:26:57 PM	SiCl4 pre valve closed
10/29/2011	10:26:57 PM	SiCl4 post valve closed
10/29/2011	10:26:57 PM	Bypass valve closed
10/29/2011	10:26:57 PM	Bubbler valve closed
10/29/2011	10:26:57 PM	Helium valve opened
10/29/2011	10:26:57 PM	Main Vac valve opened
10/29/2011	10:26:57 PM	Helium MFC set to  20.000000
10/29/2011	10:26:57 PM	H2 MFC set to  0.000000
10/29/2011	10:26:57 PM	BCl3 MFC set to  0.000000
10/29/2011	10:26:57 PM	PHl3 MFC set to  0.000000
10/29/2011	10:26:57 PM	SiCl4 MFC set to  0.000000
10/29/2011	10:26:57 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	10:26:57 PM	Tube furnace set to 0
10/29/2011	10:27:27 PM	Helium valve closed
10/29/2011	10:27:27 PM	H2 valve closed
10/29/2011	10:27:27 PM	BCl3 valve closed
10/29/2011	10:27:27 PM	PH3 valve closed
10/29/2011	10:27:27 PM	SiCl4 pre valve closed
10/29/2011	10:27:27 PM	SiCl4 post valve closed
10/29/2011	10:27:27 PM	Bypass valve closed
10/29/2011	10:27:27 PM	Bubbler valve closed
10/29/2011	10:27:27 PM	Main Vac valve opened
10/29/2011	10:27:27 PM	Helium MFC set to  0.000000
10/29/2011	10:27:27 PM	H2 MFC set to  0.000000
10/29/2011	10:27:27 PM	BCl3 MFC set to  0.000000
10/29/2011	10:27:27 PM	PHl3 MFC set to  0.000000
10/29/2011	10:27:27 PM	SiCl4 MFC set to  0.000000
10/29/2011	10:27:27 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	10:27:27 PM	Tube furnace set to 0
10/29/2011	10:27:57 PM	H2 valve closed
10/29/2011	10:27:57 PM	BCl3 valve closed
10/29/2011	10:27:57 PM	PH3 valve closed
10/29/2011	10:27:57 PM	SiCl4 pre valve closed
10/29/2011	10:27:57 PM	SiCl4 post valve closed
10/29/2011	10:27:57 PM	Bypass valve closed
10/29/2011	10:27:57 PM	Bubbler valve closed
10/29/2011	10:27:57 PM	Helium valve opened
10/29/2011	10:27:57 PM	Main Vac valve opened
10/29/2011	10:27:57 PM	Helium MFC set to  20.000000
10/29/2011	10:27:57 PM	H2 MFC set to  0.000000
10/29/2011	10:27:57 PM	BCl3 MFC set to  0.000000
10/29/2011	10:27:57 PM	PHl3 MFC set to  0.000000
10/29/2011	10:27:57 PM	SiCl4 MFC set to  0.000000
10/29/2011	10:27:57 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	10:27:58 PM	Tube furnace set to 0
10/29/2011	10:28:28 PM	Helium valve closed
10/29/2011	10:28:28 PM	H2 valve closed
10/29/2011	10:28:28 PM	BCl3 valve closed
10/29/2011	10:28:28 PM	PH3 valve closed
10/29/2011	10:28:28 PM	SiCl4 pre valve closed
10/29/2011	10:28:28 PM	SiCl4 post valve closed
10/29/2011	10:28:28 PM	Bypass valve closed
10/29/2011	10:28:28 PM	Bubbler valve closed
10/29/2011	10:28:28 PM	Main Vac valve opened
10/29/2011	10:28:28 PM	Helium MFC set to  0.000000
10/29/2011	10:28:28 PM	H2 MFC set to  0.000000
10/29/2011	10:28:28 PM	BCl3 MFC set to  0.000000
10/29/2011	10:28:28 PM	PHl3 MFC set to  0.000000
10/29/2011	10:28:28 PM	SiCl4 MFC set to  0.000000
10/29/2011	10:28:28 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	10:28:28 PM	Tube furnace set to 0
10/29/2011	10:28:58 PM	H2 valve closed
10/29/2011	10:28:58 PM	BCl3 valve closed
10/29/2011	10:28:58 PM	PH3 valve closed
10/29/2011	10:28:58 PM	SiCl4 pre valve closed
10/29/2011	10:28:58 PM	SiCl4 post valve closed
10/29/2011	10:28:58 PM	Bypass valve closed
10/29/2011	10:28:58 PM	Bubbler valve closed
10/29/2011	10:28:58 PM	Helium valve opened
10/29/2011	10:28:58 PM	Main Vac valve opened
10/29/2011	10:28:58 PM	Helium MFC set to  20.000000
10/29/2011	10:28:58 PM	H2 MFC set to  0.000000
10/29/2011	10:28:58 PM	BCl3 MFC set to  0.000000
10/29/2011	10:28:58 PM	PHl3 MFC set to  0.000000
10/29/2011	10:28:58 PM	SiCl4 MFC set to  0.000000
10/29/2011	10:28:58 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	10:28:58 PM	Tube furnace set to 0
10/29/2011	10:29:28 PM	Helium valve closed
10/29/2011	10:29:28 PM	H2 valve closed
10/29/2011	10:29:28 PM	BCl3 valve closed
10/29/2011	10:29:28 PM	PH3 valve closed
10/29/2011	10:29:28 PM	SiCl4 pre valve closed
10/29/2011	10:29:28 PM	SiCl4 post valve closed
10/29/2011	10:29:28 PM	Bypass valve closed
10/29/2011	10:29:28 PM	Bubbler valve closed
10/29/2011	10:29:28 PM	Main Vac valve opened
10/29/2011	10:29:28 PM	Helium MFC set to  0.000000
10/29/2011	10:29:28 PM	H2 MFC set to  0.000000
10/29/2011	10:29:28 PM	BCl3 MFC set to  0.000000
10/29/2011	10:29:28 PM	PHl3 MFC set to  0.000000
10/29/2011	10:29:28 PM	SiCl4 MFC set to  0.000000
10/29/2011	10:29:28 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	10:29:28 PM	Tube furnace set to 0
10/29/2011	10:29:58 PM	H2 valve closed
10/29/2011	10:29:58 PM	BCl3 valve closed
10/29/2011	10:29:58 PM	PH3 valve closed
10/29/2011	10:29:58 PM	SiCl4 pre valve closed
10/29/2011	10:29:58 PM	SiCl4 post valve closed
10/29/2011	10:29:58 PM	Bypass valve closed
10/29/2011	10:29:58 PM	Bubbler valve closed
10/29/2011	10:29:58 PM	Helium valve opened
10/29/2011	10:29:58 PM	Main Vac valve opened
10/29/2011	10:29:58 PM	Helium MFC set to  20.000000
10/29/2011	10:29:58 PM	H2 MFC set to  0.000000
10/29/2011	10:29:58 PM	BCl3 MFC set to  0.000000
10/29/2011	10:29:58 PM	PHl3 MFC set to  0.000000
10/29/2011	10:29:58 PM	SiCl4 MFC set to  0.000000
10/29/2011	10:29:58 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	10:29:58 PM	Tube furnace set to 0
10/29/2011	10:30:28 PM	Helium valve closed
10/29/2011	10:30:28 PM	H2 valve closed
10/29/2011	10:30:28 PM	BCl3 valve closed
10/29/2011	10:30:28 PM	PH3 valve closed
10/29/2011	10:30:28 PM	SiCl4 pre valve closed
10/29/2011	10:30:28 PM	SiCl4 post valve closed
10/29/2011	10:30:28 PM	Bypass valve closed
10/29/2011	10:30:28 PM	Bubbler valve closed
10/29/2011	10:30:28 PM	Main Vac valve opened
10/29/2011	10:30:28 PM	Helium MFC set to  0.000000
10/29/2011	10:30:28 PM	H2 MFC set to  0.000000
10/29/2011	10:30:28 PM	BCl3 MFC set to  0.000000
10/29/2011	10:30:28 PM	PHl3 MFC set to  0.000000
10/29/2011	10:30:28 PM	SiCl4 MFC set to  0.000000
10/29/2011	10:30:28 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	10:30:29 PM	Tube furnace set to 0
10/29/2011	10:30:59 PM	H2 valve closed
10/29/2011	10:30:59 PM	BCl3 valve closed
10/29/2011	10:30:59 PM	PH3 valve closed
10/29/2011	10:30:59 PM	SiCl4 pre valve closed
10/29/2011	10:30:59 PM	SiCl4 post valve closed
10/29/2011	10:30:59 PM	Bypass valve closed
10/29/2011	10:30:59 PM	Bubbler valve closed
10/29/2011	10:30:59 PM	Helium valve opened
10/29/2011	10:30:59 PM	Main Vac valve opened
10/29/2011	10:30:59 PM	Helium MFC set to  20.000000
10/29/2011	10:30:59 PM	H2 MFC set to  0.000000
10/29/2011	10:30:59 PM	BCl3 MFC set to  0.000000
10/29/2011	10:30:59 PM	PHl3 MFC set to  0.000000
10/29/2011	10:30:59 PM	SiCl4 MFC set to  0.000000
10/29/2011	10:30:59 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	10:30:59 PM	Tube furnace set to 0
10/29/2011	10:31:29 PM	Helium valve closed
10/29/2011	10:31:29 PM	H2 valve closed
10/29/2011	10:31:29 PM	BCl3 valve closed
10/29/2011	10:31:29 PM	PH3 valve closed
10/29/2011	10:31:29 PM	SiCl4 pre valve closed
10/29/2011	10:31:29 PM	SiCl4 post valve closed
10/29/2011	10:31:29 PM	Bypass valve closed
10/29/2011	10:31:29 PM	Bubbler valve closed
10/29/2011	10:31:29 PM	Main Vac valve opened
10/29/2011	10:31:29 PM	Helium MFC set to  0.000000
10/29/2011	10:31:29 PM	H2 MFC set to  0.000000
10/29/2011	10:31:29 PM	BCl3 MFC set to  0.000000
10/29/2011	10:31:29 PM	PHl3 MFC set to  0.000000
10/29/2011	10:31:29 PM	SiCl4 MFC set to  0.000000
10/29/2011	10:31:29 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	10:31:29 PM	Tube furnace set to 0
10/29/2011	10:31:30 PM	Run finished at 10:31 PM
10/29/2011	10:31:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/29/2011	10:36:15 PM	Main Vac valve closed
10/29/2011	10:36:39 PM	Main Vac valve opened
10/29/2011	10:37:31 PM	Recipe started at 10:37 PM
10/29/2011	10:37:31 PM	Helium valve closed
10/29/2011	10:37:31 PM	H2 valve closed
10/29/2011	10:37:31 PM	BCl3 valve closed
10/29/2011	10:37:31 PM	PH3 valve closed
10/29/2011	10:37:31 PM	SiCl4 pre valve closed
10/29/2011	10:37:31 PM	SiCl4 post valve closed
10/29/2011	10:37:31 PM	Main Vac valve closed
10/29/2011	10:37:31 PM	Bypass valve closed
10/29/2011	10:37:31 PM	Bubbler valve closed
10/29/2011	10:37:31 PM	Helium MFC set to  0.000000
10/29/2011	10:37:31 PM	H2 MFC set to  0.000000
10/29/2011	10:37:31 PM	BCl3 MFC set to  0.000000
10/29/2011	10:37:31 PM	PHl3 MFC set to  0.000000
10/29/2011	10:37:31 PM	SiCl4 MFC set to  0.000000
10/29/2011	10:37:31 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	10:37:31 PM	Tube furnace set to 0
10/29/2011	10:37:34 PM	Helium valve closed
10/29/2011	10:37:34 PM	BCl3 valve closed
10/29/2011	10:37:34 PM	PH3 valve closed
10/29/2011	10:37:34 PM	SiCl4 pre valve closed
10/29/2011	10:37:34 PM	SiCl4 post valve closed
10/29/2011	10:37:34 PM	Main Vac valve closed
10/29/2011	10:37:34 PM	Bypass valve closed
10/29/2011	10:37:34 PM	Bubbler valve closed
10/29/2011	10:37:34 PM	H2 valve opened
10/29/2011	10:37:34 PM	Helium MFC set to  0.000000
10/29/2011	10:37:34 PM	H2 MFC set to  500.000000
10/29/2011	10:37:34 PM	BCl3 MFC set to  0.000000
10/29/2011	10:37:34 PM	PHl3 MFC set to  0.000000
10/29/2011	10:37:34 PM	SiCl4 MFC set to  0.000000
10/29/2011	10:37:34 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	10:37:34 PM	Tube furnace set to 0
10/29/2011	10:38:42 PM	Helium valve closed
10/29/2011	10:38:42 PM	BCl3 valve closed
10/29/2011	10:38:42 PM	PH3 valve closed
10/29/2011	10:38:42 PM	SiCl4 pre valve closed
10/29/2011	10:38:42 PM	SiCl4 post valve closed
10/29/2011	10:38:42 PM	Main Vac valve closed
10/29/2011	10:38:42 PM	Bypass valve closed
10/29/2011	10:38:42 PM	H2 valve opened
10/29/2011	10:38:42 PM	Bubbler valve opened
10/29/2011	10:38:42 PM	Helium MFC set to  0.000000
10/29/2011	10:38:42 PM	H2 MFC set to  500.000000
10/29/2011	10:38:42 PM	BCl3 MFC set to  0.000000
10/29/2011	10:38:42 PM	PHl3 MFC set to  0.000000
10/29/2011	10:38:42 PM	SiCl4 MFC set to  0.000000
10/29/2011	10:38:42 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	10:38:42 PM	Tube furnace set to 0
10/29/2011	10:38:43 PM	Helium valve closed
10/29/2011	10:38:43 PM	BCl3 valve closed
10/29/2011	10:38:43 PM	PH3 valve closed
10/29/2011	10:38:43 PM	SiCl4 pre valve closed
10/29/2011	10:38:43 PM	SiCl4 post valve closed
10/29/2011	10:38:43 PM	Main Vac valve closed
10/29/2011	10:38:43 PM	Bypass valve closed
10/29/2011	10:38:43 PM	H2 valve opened
10/29/2011	10:38:43 PM	Bubbler valve opened
10/29/2011	10:38:43 PM	Helium MFC set to  0.000000
10/29/2011	10:38:43 PM	H2 MFC set to  500.000000
10/29/2011	10:38:43 PM	BCl3 MFC set to  0.000000
10/29/2011	10:38:43 PM	PHl3 MFC set to  0.000000
10/29/2011	10:38:43 PM	SiCl4 MFC set to  0.000000
10/29/2011	10:38:43 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	10:38:43 PM	Tube furnace set to 1048
10/29/2011	10:58:43 PM	Helium valve closed
10/29/2011	10:58:43 PM	PH3 valve closed
10/29/2011	10:58:43 PM	Main Vac valve closed
10/29/2011	10:58:43 PM	Bypass valve closed
10/29/2011	10:58:43 PM	H2 valve opened
10/29/2011	10:58:43 PM	BCl3 valve opened
10/29/2011	10:58:43 PM	SiCl4 pre valve opened
10/29/2011	10:58:43 PM	SiCl4 post valve opened
10/29/2011	10:58:43 PM	Bubbler valve opened
10/29/2011	10:58:43 PM	Helium MFC set to  0.000000
10/29/2011	10:58:43 PM	H2 MFC set to  500.000000
10/29/2011	10:58:43 PM	BCl3 MFC set to  2.500000
10/29/2011	10:58:43 PM	PHl3 MFC set to  0.000000
10/29/2011	10:58:43 PM	SiCl4 MFC set to  50.000000
10/29/2011	10:58:43 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	10:58:43 PM	Tube furnace set to 1045
10/29/2011	11:28:43 PM	Helium valve closed
10/29/2011	11:28:43 PM	BCl3 valve closed
10/29/2011	11:28:43 PM	PH3 valve closed
10/29/2011	11:28:43 PM	SiCl4 pre valve closed
10/29/2011	11:28:43 PM	SiCl4 post valve closed
10/29/2011	11:28:43 PM	Main Vac valve closed
10/29/2011	11:28:43 PM	Bypass valve closed
10/29/2011	11:28:43 PM	H2 valve opened
10/29/2011	11:28:43 PM	Bubbler valve opened
10/29/2011	11:28:43 PM	Helium MFC set to  0.000000
10/29/2011	11:28:43 PM	H2 MFC set to  500.000000
10/29/2011	11:28:43 PM	BCl3 MFC set to  0.000000
10/29/2011	11:28:43 PM	PHl3 MFC set to  0.000000
10/29/2011	11:28:43 PM	SiCl4 MFC set to  0.000000
10/29/2011	11:28:43 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	11:28:43 PM	Tube furnace set to 1048
10/29/2011	11:33:43 PM	H2 valve closed
10/29/2011	11:33:43 PM	BCl3 valve closed
10/29/2011	11:33:43 PM	PH3 valve closed
10/29/2011	11:33:43 PM	SiCl4 pre valve closed
10/29/2011	11:33:43 PM	SiCl4 post valve closed
10/29/2011	11:33:43 PM	Main Vac valve closed
10/29/2011	11:33:43 PM	Bypass valve closed
10/29/2011	11:33:43 PM	Helium valve opened
10/29/2011	11:33:43 PM	Bubbler valve opened
10/29/2011	11:33:43 PM	Helium MFC set to  500.000000
10/29/2011	11:33:43 PM	H2 MFC set to  0.000000
10/29/2011	11:33:43 PM	BCl3 MFC set to  0.000000
10/29/2011	11:33:43 PM	PHl3 MFC set to  0.000000
10/29/2011	11:33:43 PM	SiCl4 MFC set to  0.000000
10/29/2011	11:33:44 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	11:33:44 PM	Tube furnace set to 0
10/29/2011	11:51:13 PM	Helium valve closed
10/29/2011	11:51:13 PM	H2 valve closed
10/29/2011	11:51:13 PM	BCl3 valve closed
10/29/2011	11:51:13 PM	PH3 valve closed
10/29/2011	11:51:13 PM	SiCl4 pre valve closed
10/29/2011	11:51:13 PM	SiCl4 post valve closed
10/29/2011	11:51:13 PM	Main Vac valve closed
10/29/2011	11:51:13 PM	Bypass valve closed
10/29/2011	11:51:13 PM	Bubbler valve closed
10/29/2011	11:51:13 PM	Helium MFC set to  0.000000
10/29/2011	11:51:13 PM	H2 MFC set to  0.000000
10/29/2011	11:51:13 PM	BCl3 MFC set to  0.000000
10/29/2011	11:51:13 PM	PHl3 MFC set to  0.000000
10/29/2011	11:51:13 PM	SiCl4 MFC set to  0.000000
10/29/2011	11:51:13 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	11:51:14 PM	Tube furnace set to 0
10/29/2011	11:51:15 PM	Run finished at 11:51 PM
10/29/2011	11:54:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/29/2011	11:54:20 PM	Recipe started at 11:54 PM
10/29/2011	11:54:20 PM	Helium valve closed
10/29/2011	11:54:20 PM	H2 valve closed
10/29/2011	11:54:20 PM	BCl3 valve closed
10/29/2011	11:54:20 PM	PH3 valve closed
10/29/2011	11:54:20 PM	SiCl4 pre valve closed
10/29/2011	11:54:20 PM	SiCl4 post valve closed
10/29/2011	11:54:20 PM	Main Vac valve closed
10/29/2011	11:54:20 PM	Bubbler valve closed
10/29/2011	11:54:20 PM	Bypass valve opened
10/29/2011	11:54:20 PM	Helium MFC set to  0.000000
10/29/2011	11:54:20 PM	H2 MFC set to  0.000000
10/29/2011	11:54:20 PM	BCl3 MFC set to  0.000000
10/29/2011	11:54:20 PM	PHl3 MFC set to  0.000000
10/29/2011	11:54:20 PM	SiCl4 MFC set to  0.000000
10/29/2011	11:54:20 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	11:54:20 PM	Tube furnace set to 0
10/29/2011	11:55:23 PM	Helium valve closed
10/29/2011	11:55:23 PM	H2 valve closed
10/29/2011	11:55:23 PM	BCl3 valve closed
10/29/2011	11:55:23 PM	PH3 valve closed
10/29/2011	11:55:23 PM	SiCl4 pre valve closed
10/29/2011	11:55:23 PM	SiCl4 post valve closed
10/29/2011	11:55:23 PM	Main Vac valve closed
10/29/2011	11:55:23 PM	Bubbler valve closed
10/29/2011	11:55:23 PM	Bypass valve opened
10/29/2011	11:55:23 PM	Helium MFC set to  0.000000
10/29/2011	11:55:23 PM	H2 MFC set to  0.000000
10/29/2011	11:55:23 PM	BCl3 MFC set to  0.000000
10/29/2011	11:55:23 PM	PHl3 MFC set to  0.000000
10/29/2011	11:55:23 PM	SiCl4 MFC set to  0.000000
10/29/2011	11:55:23 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	11:55:24 PM	Tube furnace set to 0
10/29/2011	11:56:24 PM	Helium valve closed
10/29/2011	11:56:24 PM	H2 valve closed
10/29/2011	11:56:24 PM	BCl3 valve closed
10/29/2011	11:56:24 PM	PH3 valve closed
10/29/2011	11:56:24 PM	SiCl4 pre valve closed
10/29/2011	11:56:24 PM	SiCl4 post valve closed
10/29/2011	11:56:24 PM	Bypass valve closed
10/29/2011	11:56:24 PM	Bubbler valve closed
10/29/2011	11:56:24 PM	Main Vac valve opened
10/29/2011	11:56:24 PM	Helium MFC set to  0.000000
10/29/2011	11:56:24 PM	H2 MFC set to  0.000000
10/29/2011	11:56:24 PM	BCl3 MFC set to  0.000000
10/29/2011	11:56:24 PM	PHl3 MFC set to  0.000000
10/29/2011	11:56:24 PM	SiCl4 MFC set to  0.000000
10/29/2011	11:56:24 PM	Bypass solenoid MFC set to  0.000000
10/29/2011	11:56:24 PM	Tube furnace set to 0
10/29/2011	11:56:25 PM	Run finished at 11:56 PM
10/29/2011	11:56:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
